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公开(公告)号：KR100512006B1
公开(公告)日：2005-09-02
申请号：KR1020010011540
申请日：2001-03-06
Applicant: 삼성전자주식회사
IPC: H01L21/027
CPC classification number: G03F7/2026
Abstract: 포토레지스트가 도포된 웨이퍼에서 상기 웨이퍼의 주연 부위를 정확한 간격만큼 노광하기 위한 방법 및 이를 수행하기 위한 장치가 개시되어 있다. 포토레지스트막이 형성된 웨이퍼를 이동시키면서 상기 광을 조사하여, 상기 웨이퍼의 주연 부위에 형성된 포토레지스트막을 노광한다. 상기 노광을 수행할 때, 상기 웨이퍼의 주연 부위의 정확한 위치로 상기 광이 조사되는지 검사한다. 그리고 상기 검사에 의해 광이 정확한 위치로 조사되지 않는 것이 확인되면, 상기 조사되는 광의 위치를 조정한다. 따라서 상기 광이 상기 웨이퍼의 주연 부위에 정확히 조사되는지를 검사하면서 상기 광의 위치를 조정하여, 상기 웨이퍼 주연 부위를 정확한 간격만큼 노광할 수 있다.
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公开(公告)号：KR100486307B1
公开(公告)日：2005-04-29
申请号：KR1020030012810
申请日：2003-02-28
Applicant: 삼성전자주식회사
IPC: G10L15/14
Abstract: 은닉 마코프 모델 알고리즘의 관측 확률 연산 장치가 개시된다. 본 발명에 따른 관측 확률 연산 장치는 제 1 내지 제 3 연산부 및 비교부를 구비한다. 제 1 연산부는 입력된 음성 신호로부터 추출한 파라미터(Feature)에서 대표 음소들로부터 추출된 파라미터의 평균(Mean)을 감산하고, 상기 감산 결과와 상기 평균(Mean)의 분포 정도(분산, Precision)를 승산한다. 제 2 연산부는 상기 제 1 연산부의 출력을 자승 연산하고, 상기 자승 연산한 결과를 N 번 누산한다. 제 3 연산부는 상기 제 2 연산부의 출력에서 소정의 가중치(Gconst)를 감산한다. 비교부는 상기 제 3 연산부의 출력을 저장하고, 저장된 복수개의 제 3 연산부의 출력들 중 큰 순서대로 L 개를 추출하여 저장한다. 상기 비교부는 상기 제 3 연산부의 출력들 중 큰 순서대로 L개를 저장하는 제 1 내지 제 L 레지스터들 및 상기 제 1 내지 제 L 레지스터에 저장된 제 3 연산부의 출력들이 발생된 순서를 저장하는 제 1 내지 제 L 인덱스(index) 레지스터들을 구비한다. 본 발명에 따른 관측 확률 연산 장치는 은닉 마코프 모델 알고리즘 중 가장 많은 연산 량을 차지하는 관측 확률 연산을 수행하는 전용의 하드웨어 장치를 제공함으로써 음성 인식 장치의 처리 속도를 증가시키고 전력 소비를 줄일 수 있는 장점이 있다.
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公开(公告)号：KR100457339B1
公开(公告)日：2005-01-17
申请号：KR1019970050626
申请日：1997-09-30
Applicant: 삼성전자주식회사
Inventor： 민병호
IPC: H01L21/68
Abstract: PURPOSE: A semiconductor wafer transfer arm is provided to easily correct a fork by installing an angle control part in a fork part and to avoid particles by using a stainless steel material. CONSTITUTION: A vacuum line(22) is formed in a main body(20). A fork part(21) is connected to the main body, including a vacuum hole(23) and a fork. The vacuum hole comes in contact with the rear surface of a wafer to be capable of absorbing the wafer by vacuum pressure. A vacuum line for forming vacuum pressure in the vacuum hole is formed in the fork of a thin plate type wherein the fork is connected to the vacuum line of the main body. An angle control part(24) controls the angle of the fork part, installed in the connection part of the main body and the fork part.
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公开(公告)号：KR1020040014835A
公开(公告)日：2004-02-18
申请号：KR1020020047581
申请日：2002-08-12
Applicant: 삼성전자주식회사
IPC: G10L15/28
Abstract: PURPOSE: A voice-recognition device is provided to improve voice recognition speed by installing dedicated calculator having a self-processing function to process loads which requires system usage rate. CONSTITUTION: A codec module(440) samples an inputted aural signal and makes sample data as block by predetermined time and output it. A register file module(404) buffers the blocks of sample data belong to an effective voice section among the blocks of sample data. An FFT(Fast Fourier Transform) module(412) transforms the data blocks into a frequency domain, or executes an inverse operation, and stores the result at the register file module. An MAC(Multiply And Accumulate) module(408) compares feature values extracted based on a frequency spectrum obtained by the FFT with feature values of each word syllable preliminarily selected, so the MAC module calculates the observation probability.
Abstract translation: 目的：提供语音识别设备，通过安装具有自我处理功能的专用计算器来处理需要系统使用率的负载来提高语音识别速度。 构成：编解码器模块（440）对输入的听觉信号进行采样，并将样本数据按预定时间块进行输出。 寄存器文件模块（404）在样本数据块中缓存属于有效语音段的样本数据块。 FFT（快速傅立叶变换）模块（412）将数据块变换成频域，或执行逆运算，并将结果存储在寄存器文件模块中。 MAC（乘法和累加）模块（408）将基于FFT获得的频谱提取的特征值与预先选择的每个单词音节的特征值相比较，从而MAC模块计算观测概率。
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公开(公告)号：KR1020030030626A
公开(公告)日：2003-04-18
申请号：KR1020010062849
申请日：2001-10-12
Applicant: 삼성전자주식회사
IPC: H01L21/304
Abstract: PURPOSE: A substrate cleaning apparatus is provided to enhance the adhesive strength of the thin film or the photoresist to the substrate by effectively removing the organic material residue on the substrate. CONSTITUTION: A substrate cleaning apparatus has a process chamber for making the required processing steps. An injection unit is mounted at the inner wall of the process chamber to inject oxygen into the process chamber. An exhaust lowers the pressure within the process chamber. A susceptor(102) is internally installed at the bottom of the process chamber to mount the substrate thereon. The process chamber is formed with a body portion bearing the susceptor(102), and a header portion covering the body portion. The header portion of the process chamber is provided with a lamp unit(100) for illuminating the ultraviolet ray into the process chamber.
Abstract translation: 目的：提供一种基板清洗装置，通过有效地去除基板上的有机材料残渣，提高薄膜或光致抗蚀剂对基板的粘合强度。 构成：基板清洗装置具有用于进行所需处理步骤的处理室。 注射单元安装在处理室的内壁处以将氧气注入到处理室中。 排气降低了处理室内的压力。 基座（102）内部安装在处理室的底部以将基板安装在其上。 处理室形成有承载基座（102）的主体部分和覆盖主体部分的头部部分。 处理室的头部设置有用于将紫外线照射到处理室中的灯单元（100）。
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Patent Agency Ranking
公开(公告)号：KR1020030027183A
公开(公告)日：2003-04-07
申请号：KR1020010056835
申请日：2001-09-14
Applicant: 삼성전자주식회사
IPC: H01L21/027
Abstract: PURPOSE: A baking apparatus for fabricating a semiconductor device is provided to prevent a semiconductor substrate from being installed over a guide by mounting an optical sensor capable of inspecting a settlement state of the semiconductor substrate on a cover or the guide. CONSTITUTION: The semiconductor substrate(W) is placed on a baking plate(200). The baking plate heats the substrate to harden a layer on the substrate. A concave part on which the baking plate is placed is formed in a panel(202). The cover(206) is formed on the baking plate. The cover is closely attached to the panel to cover the baking plate when the substrate is heated. A sensing unit is installed in the bottom surface of the cover. The sensing unit senses the settlement state of the substrate placed on the baking plate.
Abstract translation: 目的：提供一种用于制造半导体器件的烘烤装置，以通过将能够检查半导体衬底的沉降状态的光学传感器安装在盖子或引导件上来防止将半导体衬底安装在引导件上。 构成：将半导体基板（W）放置在烘烤板（200）上。 烘烤板加热基底以硬化基底上的层。 在面板（202）上形成有放置烘烤板的凹部。 盖（206）形成在烘烤板上。 当加热基材时，盖子紧密地附着到面板上以覆盖烤盘。 传感单元安装在盖的底面。 感测单元感测放置在烘烤板上的基板的沉降状态。
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公开(公告)号：KR1020030010047A
公开(公告)日：2003-02-05
申请号：KR1020010044798
申请日：2001-07-25
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: PURPOSE: An exposure inspection apparatus of photo equipment for semiconductor is provided to improve productivity by performing a real-time inspection for a wafer transferred from an exposure apparatus without a damage of the wafer. CONSTITUTION: An exposure inspection apparatus includes a wafer holder and a CCD(Charge Coupled Device) camera(110). The wafer holder is used for holding a wafer having a plurality of patterns. The CCD camera(110) is used for photographing a surface image of the wafer. The wafer holder and the CCD camera(110) are used for inspecting an entire surface of the wafer. A storage portion(125) is used for storing normal image data. A controller(120) has a comparator(127). The comparator(127) is used for comparing images transmitted from the CCD camera(110) with the normal images of the storage portion(125). A transferring portion(130) have an alarm function and an interlock function.
Abstract translation: 目的：提供一种用于半导体的照相设备的曝光检查装置，通过对从曝光装置传送的晶片进行实时检查而不损坏晶片来提高生产率。 构成：曝光检查装置包括晶片保持器和CCD（电荷耦合器件）照相机（110）。 晶片保持器用于保持具有多个图案的晶片。 CCD照相机（110）用于拍摄晶片的表面图像。 晶片保持器和CCD照相机（110）用于检查晶片的整个表面。 存储部分（125）用于存储正常图像数据。 控制器（120）具有比较器（127）。 比较器（127）用于将从CCD照相机（110）发送的图像与存储部分（125）的正常图像进行比较。 转印部（130）具有报警功能和互锁功能。
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公开(公告)号：KR1020010017673A
公开(公告)日：2001-03-05
申请号：KR1019990033328
申请日：1999-08-13
Applicant: 삼성전자주식회사
IPC: H01L21/306
Abstract: PURPOSE: An apparatus for displaying a lamp state is provided to take a rapid action against a lamp when the lamp malfunctions, by detecting a quantity of current flowing through the lamp, and by displaying an on/off state of the lamp in a display unit, so that the on/off state of the lamp can easily be recognized from the exterior of the apparatus. CONSTITUTION: A current detecting unit(2) detects current flowing through a lamp(1). A driving unit(3) is operated according to a voltage outputted from the current detecting unit. A switching unit(4) is operated according to an output voltage of the driving unit. A display unit(5) emits light according to an operation of the switching unit. The switching unit may be a transistor.
Abstract translation: 目的：提供一种用于显示灯状态的装置，用于当灯发生故障时通过检测流过灯的电流量以及通过在显示单元中显示灯的开/关状态来快速地对灯进行动作 ，使得可以从设备的外部容易地识别灯的开/关状态。 构成：电流检测单元（2）检测流过灯（1）的电流。 驱动单元（3）根据从电流检测单元输出的电压进行动作。 开关单元（4）根据驱动单元的输出电压进行动作。 显示单元（5）根据切换单元的操作发光。 开关单元可以是晶体管。
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公开(公告)号：KR1020000066747A
公开(公告)日：2000-11-15
申请号：KR1019990014056
申请日：1999-04-20
Applicant: 삼성전자주식회사
Inventor： 민병호
IPC: H01L29/78
Abstract: PURPOSE: A method of making a polycide gate electrode is provided of prevent an anti-reflected layer from being lifted from a silicide film by improving coupling force between the silicide film and the anti-reflected layer. CONSTITUTION: A method of making a polycide gate electrode comprises forming a gate insulation film(2) on a silicon substrate(1) on which a field oxide film(100) is formed. A polysilicon film(3) is formed on the gate insulation film(2) by a diffusion process. A silicide film(4) is formed on the polysilicon film(3) by a chemical vapor deposition process. An anti-reflected layer(5) is formed on the silicide film(4) by performing a diffusion process to the substrate in diffusion equipment.
Abstract translation: 目的：提供一种制造多晶硅栅电极的方法，其通过改善硅化物膜和抗反射层之间的耦合力来防止抗反射层从硅化物膜提升。 构成：制造多晶硅栅电极的方法包括在其上形成有场氧化膜（100）的硅衬底（1）上形成栅极绝缘膜（2）。 通过扩散工艺在栅绝缘膜（2）上形成多晶硅膜（3）。 通过化学气相沉积工艺在多晶硅膜（3）上形成硅化物膜（4）。 通过对扩散装置中的基板进行扩散处理，在硅化物膜（4）上形成抗反射层（5）。
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公开(公告)号：KR1020000013209A
公开(公告)日：2000-03-06
申请号：KR1019980031932
申请日：1998-08-05
Applicant: 삼성전자주식회사
IPC: H01L21/02
Abstract: PURPOSE: The time when a chemical is taken out is displayed accurately and identified visibly even at a long distance for the convenience of the user of the chemical. CONSTITUTION: The movement of a plate (14) throws switch (S1). A control device (24) to which a switching signal is transmitted decides if the time corresponds to the fixed mode by receiving clock signals to count time continuously from a clock(28), generates a signal corresponding to the clock signal and indicates the signal on the display panel(16) through a decoder(32). Then the time is displayed and a lamp corresponding to the befitting mode radiates on the selection device(30).
Abstract translation: 目的：为了使化学品的使用者方便，即使在长时间内也可以准确地显示化学物质的时间并且被识别出来。 构成：板（14）的移动引起开关（S1）。 发送切换信号的控制装置（24）通过从时钟（28）接收时钟信号连续计数时间来决定时间是否对应于固定模式，生成对应于时钟信号的信号，并指示信号 显示面板（16）通过解码器（32）。 然后显示时间，并且与选择装置相对应的灯在选择装置（30）上辐射。
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