Abstract:
PURPOSE: A distance measuring sensor is provided to improve performance by moving light-generated charges to a charge storage area rapidly and stably. CONSTITUTION: First and second charge storage areas(150a,150b) are separated with each other on a substrate doped with a first impurity, and are doped with a second impurity where charges are stored. A photoelectric conversion area(140a) is formed between the first and second charge storage areas. A first dielectric layer(110a) is formed on the substrate to cover the first and second charge storage areas and the photoelectric conversion area. First and second transfer gates are formed between the first and second charge storage areas and are separated from each other on the first dielectric layer. The first and second transfer gates transport charges of the photoelectric conversion area to the first and second charge storage areas selectively, and cover a part of a second dielectric layer.
Abstract:
PURPOSE: A sensor and a data processing system are provided to increase a generation range of an electric field in a side, thereby increasing photoelectron resolution. CONSTITUTION: A sensor(10) includes a depth pixel(16) of 1-tab pixel structure. A photoelectric transformation area generates a photo charge. An insulating layer is implemented on a semiconductor substrate. The semiconductor substrate includes the photoelectric transformation area. A first photo gate and a second photo gate are implemented on the insulating layer.
Abstract:
PURPOSE: A micro lens, a depth sensor including the same, and a method for manufacturing the micro lens are provided to prevent the performance degradation of the depth lens. CONSTITUTION: Photo-resist for forming a micro lens(110) is formed on a substrate. The photo-resist is exposed in order to form a photo-resist pattern. The viscosity of the photo-resist is 150 to 250cp. The thickness of the photo-resist is 0.1 to 9.9micrometers. The diameter of the photo-resist is 10 to 99micrometers. A photoelectric conversion element(160) creates a photo charge in response to infrared rays condensed through micro lens. A processer calculates distance of an object according to a signal outputted from a depth sensor.
Abstract:
An electric field sensor with a vertical thin film structure is provided to control the density of foreign material accurately since there is no need of a diffusion process in forming a high resistance semiconductor layer. In a substrate(13), a low resistance semiconductor layer(10) in which impurity is doped to the high concentration is prepared in the top layer. The high resistance semiconductor layer(20) is located in the partial domain on the low resistance semiconductor layer. The impurity is doped to the low concentration, and a conductive layer(30) is located on the high resistance semiconductor layer. The change of the electric field is detected by the change of a current flowing through the low resistance semiconductor layer.
Abstract:
An electric field reproduction/record head and a manufacturing method thereof, and an information storage apparatus including the electric field reproduction/record head are provided to improve operation stability and recording density of reproduction/record head by applying the electric field recording method to the drive system of HDD. An electric field reproduction/record head comprises a resistance region(20) which is formed within a substrate, having an end surface facing a recording medium, a source(30a) and a drain(30b) which are formed in either side of the resistance region of the substrate, and an insulating layer(40) and a write electrode(50) which are successively provided in the resistance region. The length(‘±) and width(w) of the resistance region satisfy the following equation, (‘±/w)>=0.2 or (‘±/w)>=1.
Abstract:
An electric field effect record/playback apparatus and a driving method thereof are provided to compensate the playback sensitivity degradation by a problem in manufacturing and achieve optimum playback sensitivity by applying a predetermined voltage is authorized in a write electrode of an electric field effect record/playback head in the reproduction operation. A driving method of an electric field effect record/playback apparatus employing electric field effect record/playback head(100) including a resistance zone(R) located between a source area(S) and a drain region(D) and a write electrode(W) located in the resistance zone includes a step for applying adjustment voltage lower than critical voltage inducing polarization in a recording medium to the write electrode, and reproducing the information recorded in the recording medium according to the polarization direction of the electric domain on the recording medium based on the change in current amount flowing through the resistance zone.
Abstract:
A device for storing high density data and a recording/reproducing method thereof are provided to safely record/reproduce the data in a recording medium by separating the tip of a probe from the recording medium. A device for storing high density data uses a recording medium(200) and a probe(100). The recording medium is a thin film made of a phase change material or an oxide resistance variable material. A tip(140), having a channel structure of a field-effect transistor, is formed at the lower part of the probe and separated from the top of the recording medium.
Abstract:
A semiconductor probe having a resistive tip and a method for fabricating the same are provided to prevent abrasion of a resistive region by forming a plane with a dielectric layer of the resistive region, an electric field shield, and a dielectric layer. A resistive tip is doped with a first impurity. A stage of the resistive tip is doped with a second impurity of low density. The second impurity has polarity different from the polarity of the first impurity. A first and second semiconductor electrode regions are formed on an inclined surface of the resistive tip. The first and second semiconductor electrode regions are doped with the second impurity of high density. A dielectric layer(160) is formed on the resistive tip. An electric field shield(162) is formed on a dielectric layer. The electric field shield and the dielectric layer are formed as a plane on the end of the resistive tip. A cantilever(170) is positioned at an end of the resistive tip.
Abstract:
A method for manufacturing a carbon nanotube probe tip is provided to record/reproduce information at high density and have a simple and easy manufacturing process by miniaturizing the carbon nanotube probe tip. A substrate(10) is prepared. A catalyst metal layer(12) and an aluminum oxide layer are successively formed on the substrate(10). The aluminum oxide layer is anodized to be changed to a porous aluminum oxide layer having fine holes which expose the catalyst metal layer(12). A carbon nanotube(20) is grown on the exposed catalyst metal layer(12). A photoresist is coated on the aluminum oxide layer, and the carbon nanotube(20) to be used as a probe tip is selectively masked. The dry etching of certain depth is performed from an upper surface of the aluminum oxide layer which is not coated by the photoresist to expose the substrate(10). The isotropic undercut etching of the substrate surface exposed by the dry etching is performed to form a front end part for supporting the carbon nanotube(20). The catalyst metal layer(12) exposed by the isotropic undercut etching is etched to expose a lower surface of the aluminum oxide layer which surrounds the carbon nanotube(20). The wet etching of the aluminum oxide layer is performed from a lower surface side of the aluminum oxide layer, and the aluminum oxide layer and the photoresist formed on the aluminum oxide layer are removed. The catalyst metal layer(12) is formed by at least one metal selected from a group containing Ni, an invar, Fe, Co, and Au.