Abstract:
A semiconductor probe having a wedge shape resistive tip and a method of fabricating the semiconductor probe is provided. The semiconductor probe includes a resistive tip that is doped with a first impurity, has a resistance region doped with a low concentration of a second impurity having an opposite polarity to the first impurity, and has first and second semiconductor electrode regions doped with a high concentration of the second impurity on both side slopes of the resistive tip. The probe also includes a cantilever having the resistive tip on an edge portion thereof, and an end portion of the resistive tip has a wedge shape.
Abstract:
A method and an apparatus for calibrating the position of an image sensor, and a method for detecting position of an image sensor are provided to calibrate and detect the image sensor position in sub-pixel unit and to improve the position sensing accuracy without installing additional position sensor by means of a simplified algorithm using symmetry distribution characteristic of cross correlation related to the image sensor position. The first image information corresponding to the first position of image sensor is gained(210) and the second image information corresponding to the second position of an image sensor is gained(240). The cross correlation value between the first image information and the second image information is calculated(250). The symmetry characteristic of the calculated cross correlation value is investigated(260). In case of existence of the symmetry characteristic, the driving power value of the image sensor for moving distance between the first and the second position is established as the standard driving power value for moving the image sensor in one pixel(280). The position of the image sensor is calibrated by using the established driving power value(290). In case of absence of the symmetry characteristic, the second position is changed by controlling the driving power value(270).
Abstract:
A method for manufacturing a ferroelectric thin film and a method for manufacturing a ferroelectric recording medium are provided to increase recording density of the recording medium by forming uniform nano grains on the ferroelectric thin film. An amorphous TiO2 layer(12) is formed on a substrate(10). A PbO gas atmosphere(200) is formed on the TiO2 layer. The TiO2 layer is mixed with the PbO gas at a temperature between 400 and 800 °C. A PbTiO3 ferroelectric thin film is formed on the substrate. Nano grains with a size between 1 and 20 nm are formed on the PbTiO3 ferroelectric thin film. At least one of a reaction temperature and a reaction time of the TiO2 layer and the PbO gas and a flux of the PbO gas is controlled, such that the size of the nano grain and a stoichiometry of the PbTiO3 ferroelectric thin film are controlled.
Abstract:
A semiconductor probe having a wedge-shaped resistive tip, and a method of fabricating the same are provided to increase the resolution of a resistance area by forming highly doped electrode areas on both sides of the resistance area of the resistive tip. A semiconductor probe comprises a resistive tip(150), and a cantilever(170). The resistive tip, doped by the first impurity, comprises a resistance area(156) which is doped by the second impurity, having an opposite polarity to that of the first impurity, in low concentration on its top portion, and has first and second semiconductor electrode areas(152,154) doped by the second impurity in high concentration on its inclined portion. The cantilever has the resistive tip on its edge portion. The end portion of the resistive tip is wedge-shaped and the length of the end portion of the tip is in a range of 20nm to 2mum.
Abstract:
An image sensor for improving image quality and a method for sensing an image using the same are provided to change the position of a color filter by using the size of a conventionally used photoelectric semiconductor device and a color filter array, thereby improving the image quality of a sensed image without an increase of cost and the deterioration of sensing capabilities. An image sensor for improving image quality comprises a scanner unit(100), a color filter array(120) and a photoelectric semiconductor device(110). The scanner unit is movable on a plate. The color filter array is fixed on the scanner unit. The photoelectric semiconductor device has plural pixels arranged in the lower part of the color filter array. A microlens array(130) is additionally included in the image sensor. The microlens array is formed in the upper part of the color filter array corresponding to the pixels to concentrate light.
Abstract:
An image sensor having improved resolution and a method for sensing an image using the same are provided to improve image resolution by detecting the image as moving a photoelectric conversion semiconductor device fixed on a scanner unit. A scanner unit(100) moves on the plane. A photoelectric conversion semiconductor device(110) is mounted and fixed on the scanner unit. The photoelectric conversion semiconductor device has plural pixels arranged on the whole surface thereof. A color filter array(120) is arranged on the photoelectric conversion semiconductor device by corresponding to the pixel. A micro lens array(130) is formed on an upper portion of the color filter array by corresponding to the pixel to condense light. The scanner unit moves in horizontal and vertical directions. The scanner unit moves by an interval less than a distance from the pixel.
Abstract:
An X-Y stage driving apparatus having a locking device and a storage system having the same are provided to store or record high density information by precisely controlling a position of an X-Y stage without displacement expect required direction. An X-Y stage driving apparatus having a locking device includes an X-Y stage(20), a supporting unit, a driving unit, a stiffener(40), and a locking device(50). The supporting unit elastically supports the X-Y stage(20), and has an elastic beam which supports a corner of the X-Y stage(20). The driving unit drives the X-Y stage(20) to a first direction and a second direction which is perpendicular to the first direction. The stiffener(40) stops a rotation of the X-Y stage(20). The locking device(50) fixes the stiffener(40) by an electrostatic force. The locking device(50) has a first anchor, a plurality of first comb electrodes, and a plurality of second comb electrodes. The first anchor is arranged to be opposite to a side plane of the stiffener(40). The plurality of first comb electrodes are formed on an opposite plane of the stiffener(40). The plurality of second comb electrodes are arranged alternatively with the first comb electrodes on the opposite plane of the stiffener(40).
Abstract:
반도체 탐침과 이를 이용한 기록재생방법이 개시된다. 개시된 반도체 탐침은 하부면에 전극층이 마련된 강유전성 매체에 정보를 기록 또는 기록된 정보를 재생하는 반도체 탐침으로서, 저항성 팁;과 매체와 대향하는 면에, 전극층과의 사이에 전압을 온, 오프 함으로써 매체와 팁 간의 접촉력을 조절하는 정전력 형성 전극부가 구비된 캔티레버;를 포함하는 것을 특징으로 한다. 또 개시된 기록재생방법은 본 발명에 의한 반도체 탐침을 이용하는 기록재생방법으로서, 매체의 전극층과 반도체 탐침의 정전력 형성 전극부간에 전압을 인가하여 매체와 팁간의 접촉력에 정전력을 포함되게 하는 기록단계;와 전극층과 정전력 형성 전극부간에 전압을 인가하지 않아 매체와 팁간의 접촉력에 정전력이 포함되지 않게 하는 재생단계; 를 포함하는 것을 특징으로 한다.
Abstract:
저항성 팁을 구비한 반도체 탐침 및 그 제조방법이 개시된다. 개시된 제조방법은 제1불순물을 도핑한 기판의 상면에 스트라이프형의 마스크막을 형성하고, 상기 마스크막을 제외한 상기 기판의 영역에 제2불순물을 고농도로 도핑하여 제1 및 제2반도체 전극영역을 형성하는 단계와, 상기 기판을 열처리하여 상기 제1 및 제2 반도체 전극영역의 외곽에 상기 제2분순물이 저농도로 도핑된 저항영역을 형성하는 단계와, 상기 마스크막과 직교하는 방향으로 스트라이프 형상의 제1감광제를 형성하고, 식각공정을 수행하여 상기 마스크막을 사각형상으로 형성하는 단계와, 상기 제1감광제의 일부를 덮으며 캔티레버 영역을 한정하는 제2감광제를 형성하는 단계와, 상기 제1 및 제2감광제를 제외한 영역을 식각하여 상기 캔티레버 영역을 형성하는 단계와, 상기 제1 및 제2감광제를 제거하고, 상기 마스크막을 제외한 상기 기판을 식각하여 반사각뿔 형상의 저항성 팁을 형성하는 단계를 구비한다.
Abstract:
자기 논리 소자와 그 제조 및 동작 방법이 개시되어 있다. 개시된 본 발명은 제1 배선 상에 적층되어 자기 분극 방향이 주어진 방향으로 고정된 하부 자성막과, 상기 하부 자성막 상에 적층된 비자성막과, 상기 비자성막 상에 적층되어 자기 분극 방향이 상기 하부 자성막의 자기 분극 방향과 동일하거나 반대인 상부 자성막과, 상기 상부 자성막 상에 형성된 제2 배선을 포함하는 것을 특징으로 하는 자기 논리 소자와 그 제조 및 동작 방법을 제공한다. 상기 제1 배선의 일단과 상기 제2 배선의 일단사이에 제1 전류원이 구비되고, 상기 제1 배선의 타단과 상기 제2 배선의 타단사이에 제2 전류원이 구비될 수 있다.