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公开(公告)号：KR1020030034611A
公开(公告)日：2003-05-09
申请号：KR1020010066263
申请日：2001-10-26
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: PURPOSE: A packaging of an optical switching device is provided to secure a stable operation without influence from the external environment when the optical switching device is packaged. CONSTITUTION: A packaging of an optical switching device includes a lower substrate(10) provided with a driving member(20) for driving the mirror surface of the reflection plate, an upper substrate(50) formed thereon a polymer pattern(40) provided with an insertion path of an optical fiber(60) and provided with a structure(30) at both inner sides of the polymer pattern(40) and an upper substrate(50) coupled to the top surface of the lower substrate(10), wherein the optical fiber(60) is inserted into the insertion path of the optical fiber(60).
Abstract translation: 目的：提供一种光开关装置的封装，以确保稳定的操作，而不会在外部环境的影响下，当光开关器件被封装时。 构成：光开关装置的封装包括设置有用于驱动反射板的镜面的驱动构件（20）的下基板（10），形成有聚合物图案（40）的上基板（50） 光纤（60）的插入路径，并且在聚合物图案（40）的两个内侧处设置有结构（30）和耦合到下基板（10）的顶表面的上基板（50），其中 光纤（60）插入到光纤（60）的插入路径中。
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公开(公告)号：KR1020030034610A
公开(公告)日：2003-05-09
申请号：KR1020010066262
申请日：2001-10-26
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: PURPOSE: A micro optical switch is provided, which is applied to an optical switch with a simple structure made of an upper electrode and a lower electrode. CONSTITUTION: A micro optical switch includes a semiconductor substrate(10), an insulation layer(20) and a lower electrode(30) formed on the semiconductor substrate(10) successively, an upper electrode(40) having a predetermined length coupled to the one side of the upper surface of the insulation layer(20), a mirror surface(60) and a coated connection member(50) in such a way that a portion of the coated connection member(50) is connected to the ground surface of the mirror surface(60) at a portion of the upper electrode(40) not coupled to the insulation layer(20).
Abstract translation: 目的：提供一种微型光开关，其应用于具有由上电极和下电极构成的简单结构的光开关。 构成：微型光开关包括依次形成在半导体衬底（10）上的半导体衬底（10），绝缘层（20）和下电极（30），具有预定长度的上电极（40） 绝缘层（20）的上表面的一侧，镜面（60）和涂覆的连接构件（50），使得涂覆的连接构件（50）的一部分连接到 在上电极（40）的未连接到绝缘层（20）的部分处的镜面（60）。
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公开(公告)号：KR1020030034609A
公开(公告)日：2003-05-09
申请号：KR1020010066261
申请日：2001-10-26
Applicant: 한국과학기술연구원
IPC: B81B7/00
CPC classification number: B81B3/0021 , B81B2201/03 , B81B2203/04 , B81B2203/05
Abstract: PURPOSE: A large displacement operating type actuator is provided to obtain a large displacement by arranging the actuator to operate at the region having a sub micro spacing. CONSTITUTION: A large displacement operating type actuator comprises a fixed electrode(100) for generating displacement at a fixed state; a movable electrode(200) protruded from the front end of a supporting beam(210) and coupled to the fixed electrode so as to generate displacement when the actuator is in operation; and a sub micro gap(400) formed between the electrodes in the portion where the supporting beam of the movable electrode is coupled, when the fixed electrode and the movable electrode are coupled with each other and operate.
Abstract translation: 目的：提供大排量操作型致动器，通过将致动器布置在具有亚微间距的区域上来获得大的位移。 构成：大排量操作型致动器包括用于在固定状态下产生位移的固定电极（100） 从所述支撑梁（210）的前端突出并联接到所述固定电极的可动电极（200），以在所述致动器运行时产生位移; 以及当固定电极和可动电极彼此耦合并且操作时，在可动电极的支撑梁的部分中的电极之间形成的子微间隙（400）。
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公开(公告)号：KR1020030034607A
公开(公告)日：2003-05-09
申请号：KR1020010066259
申请日：2001-10-26
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: PURPOSE: An optical switch capable of removing an offset is provided to remove the tube loss due to the offset generated by the thickness of mirror surface when the optical switch is operated, thereby increasing the reliability and efficiency of the transmission data in the application of optical communication. CONSTITUTION: An optical switch capable of removing an offset includes a reflection plate(200) for changing an optical path to an output terminal by reflecting an input light beam(100) inputted from an input terminal installed at a reflection surface in an arbitrary direction to minimize the offset, a driving device(220) for generating a driving force to move by deforming the position of the reflection plate(200) to an arbitrary direction and an anchor(260) provided with a supporting beam(240) for supporting the reflection plate(200) and the structure of the driving device(220) to the ground.
Abstract translation: 目的：提供一种能够去除偏移的光学开关，以消除由光学开关操作时镜面厚度产生的偏移造成的管损失，从而提高光学应用中传输数据的可靠性和效率 通讯。 构成：能够去除偏移的光学开关包括反射板（200），用于通过将从安装在任意方向上的反射表面的输入端子输入的输入光束（100）反射到向任意方向反射的输入光束（100）而将光路改变为输出端子， 使偏移最小化的驱动装置（220），用于通过使反射板（200）的位置变形到任意方向而产生移动的驱动力的驱动装置（220）和设置有用于支撑反射的支撑梁（240）的锚固件（260） 板（200）和驱动装置（220）的结构到地面。
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公开(公告)号：KR1020020088146A
公开(公告)日：2002-11-27
申请号：KR1020010027084
申请日：2001-05-17
Applicant: 한국과학기술연구원
IPC: B81C1/00
CPC classification number: B81C1/00031 , B81B2201/04 , B81C1/00349 , B81C1/00388 , B81C1/00436
Abstract: PURPOSE: A method for fabricating micro lens array is provided to achieve improved performance and reliability by minimizing the problem of adhesion caused during demolding process for lens array master and polymer material. CONSTITUTION: A method comprises a first step of depositing an oxide film onto a semiconductor substrate(200); a second step of forming a photosensitive film pattern onto the oxide film; a third step of forming an oxide film pattern by using the photosensitive film pattern as an etching barrier; a fourth step of forming a lens array master having an undercut beneath the semiconductor substrate, by performing an isotropic etching using XeF6 etching gas and the oxide film pattern as an etching barrier; a fifth step of removing the oxide film pattern from the semiconductor substrate; a sixth step of depositing polymer into a predetermined thickness all over the resultant structure; and a seventh step of forming shape of a micro lens array(250) by separating the polymer deposited on the semiconductor substrate from the semiconductor substrate master.
Abstract translation: 目的：提供一种制造微透镜阵列的方法，通过最小化透镜阵列母材和聚合物材料的脱模过程中引起的粘附问题来实现改进的性能和可靠性。 构成：一种方法包括在半导体衬底（200）上沉积氧化膜的第一步骤; 在氧化膜上形成感光膜图案的第二步骤; 通过使用感光膜图案作为蚀刻阻挡层来形成氧化膜图案的第三步骤; 通过使用XeF 6蚀刻气体和氧化膜图案作为蚀刻阻挡层进行各向同性蚀刻来形成在半导体衬底下方具有底切的透镜阵列母板的第四步骤; 从半导体衬底去除氧化膜图案的第五步骤; 在所得到的结构上将聚合物沉积到预定厚度的第六步骤; 以及通过将沉积在半导体衬底上的聚合物与半导体衬底母板分离来形成微透镜阵列（250）的形状的第七步骤。
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Patent Agency Ranking
公开(公告)号：KR100343815B1
公开(公告)日：2002-07-20
申请号：KR1020000045113
申请日：2000-08-03
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: 본 발명은 옵셋(offset) 보정이 가능한 광스위치 소자에 관한 것이다. 특히, 초소형 기계식 구동(MEMS) 기술을 이용하여 제작되는 광스위치 소자에서 반사판의 두께에 따라 입,출력단 사이에서 발생하는 옵셋을 보정 가능토록 하는 기술에 관한 것이다.
본 발명은 반사판에서 반사된 입사광을 다시 반사판으로 반사시키는 측벽과, 입력단으로부터 입사되는 입사광을 상기 측벽의 반사면에 반사시켜 광손실을 최소화할 수 있는 거리의 중앙부에 위치하여 출력단으로의 광로를 변화시키는 반사판 및 상기 반사판과 결합되어 임의의 위치로 이동할 수 있는 구동력을 발생시키는 구동소자를 포함하여 이루어진 것을 특징으로 하는 옵셋 보정이 가능한 광스위치 소자가 제시된다.
따라서, 본 발명은 광스위치 소자의 옵셋 보정이 가능하도록 하여 입사광의 반사에 따른 광 손실을 최소화할 수 있으므로 이를 대용량이면서 안정적으로 동작할 수 있는 광스위치 소자에 적용시킬 수 있다.-
公开(公告)号：KR1020020011689A
公开(公告)日：2002-02-09
申请号：KR1020000045113
申请日：2000-08-03
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: PURPOSE: An optical switch device with an offset correcting function is provided to be capable of minimizing optical loss by assuring the offset correction for an optical switch device fabricated using an MEMS(Micro Electro Mechanical System) technique. CONSTITUTION: An incident beam(200) reflected from a reflection plate(300) is again reflected toward the reflection plate(300) by a sidewall(100). The reflection plate(300) is positioned on a middle place of a distance for minimizing optical loss by reflecting an incident beam from an input toward a reflection surface of the sidewall(100). A driver(400) is coupled to the reflection plate(300) to generate drive force for moving the reflection plate to any positions. That is, the incident beam(200) is sequentially reflected by the reflection plate(300) and the sidewall(100).
Abstract translation: 目的：提供具有偏移校正功能的光学开关装置，以便通过确保使用MEMS（微机电系统）技术制造的光学开关装置的偏移校正来最小化光学损耗。 构成：从反射板（300）反射的入射光束（200）再次被侧壁（100）反射向反射板（300）。 反射板（300）位于距离中间位置，以通过将来自输入的入射光束反射到侧壁（100）的反射表面来最小化光学损失。 驱动器（400）耦合到反射板（300）以产生用于将反射板移动到任何位置的驱动力。 也就是说，入射光束（200）被反射板（300）和侧壁（100）依次反射。
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公开(公告)号：KR1020020010060A
公开(公告)日：2002-02-02
申请号：KR1020000043855
申请日：2000-07-28
Applicant: 한국과학기술연구원
IPC: H01L31/101 , G01J1/02
Abstract: PURPOSE: A method for manufacturing an infrared detection layer using a multilayered thin film method is provided to induce sufficient diffusion of oxygen to a single-layered thin film and to guarantee repeatability of a manufacturing process, by using two single-layered thin films which are stably manufactured by using general sputtering equipment. CONSTITUTION: A silicon nitride layer(200) is formed on a semiconductor substrate(100). The first vanadium oxide thin film(300) is formed on the silicon nitride layer. The first vanadium metal thin film(400) is formed on the first vanadium oxide thin film. The second vanadium oxide thin film(500) is formed on the first vanadium metal thin film. The n-th vanadium metal thin film(1000) is formed on the second vanadium oxide thin film. The n-th vanadium oxide thin film(1100) is formed on the n-th vanadium metal thin film. A heat treatment process is performed regarding the resultant structure to stabilize the multilayered thin film.
Abstract translation: 目的：提供一种使用多层薄膜方法制造红外检测层的方法，以通过使用两层单层薄膜来诱导足够的氧扩散到单层薄膜并保证制造工艺的重复性 通过使用一般的溅射设备稳定地制造。 构成：在半导体衬底（100）上形成氮化硅层（200）。 第一氧化钒薄膜（300）形成在氮化硅层上。 第一钒金属薄膜（400）形成在第一氧化钒薄膜上。 在第一钒金属薄膜上形成第二氧化钒薄膜（500）。 在第二钒氧化物薄膜上形成第n个钒金属薄膜（1000）。 在第n个钒金属薄膜上形成第n氧化钒薄膜（1100）。 对所得到的结构进行热处理工艺以稳定多层薄膜。
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公开(公告)号：KR1020010100605A
公开(公告)日：2001-11-14
申请号：KR1020000023922
申请日：2000-05-04
Applicant: 한국과학기술연구원
IPC: G02B26/08
Abstract: 본 발명은 광스위칭장치에 관한 것으로서, 특히, 입력광을 반사시켜 광로를 변화시키는 반사미러; 입력신호에 의해 정전인력을 발생하여 기설정된 위치로 스위칭하도록 상기 반사미러를 구동시키고, 상기 반사미러의 변위에 대응하여 정전용량을 변화시키는 구동수단; 상기 구동수단으로부터 정전용량의 변화량을 검출하는 정전용량 검출수단; 및 상기 정전용량 검출수단의 출력신호에 기초하여 상기 반사미러의 스위칭 위치를 판별하여 기설정 위치와 일치하지 않을 시 상기 반사미러의 위치를 보정하도록 상기 구동수단을 제어하는 제어수단을 구비하는 것을 특징으로 한다.
따라서, 본 발명에서는 제어 가능한 초소형 기계적 구조물을 이용하여 반사미러의 변위에 따른 정전용량의 변화량을 검출하여 반사미러의 스위칭 위치를 제어하는 피드백 회로를 구현함으로써, 반사미러의 정밀한 위치 제어가 가능하게 하며, 이로 인해 복수의 광로를 선택할 수 있는 선택성이 개선됨과 아울러 광손실이 줄어드는 효과가 있다. -
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