Abstract:
PURPOSE: A silicon nanoparticle collection system and a nanoparticle collection/storage container used for the same are provided to supply nanoparticles to a deposition system which is collected and stored, after a nanoparticle container in which nanoparticles are collected is separated from an inlet system for collecting the nanoparticles inflowing with carrier gas into multiple nanoparticle containers which is connected to one inlet line. CONSTITUTION: A silicon nano particle collection system comprises an inlet line, multiple nanoparticle collection/storage containers(10), and a carrier gas discharge line. The inlet line flows nanoparticles and carrier gas in. The multiple nanoparticle collection/storage containers are connected to the inlet line. The carrier gas discharge line discharges the carrier gas which is flowing through the inlet line from the nanoparticle collection/storage containers. The nanoparticle collection/storage containers comprise a nano particle inlet unit(11), a filter screen(13), and a carrier gas discharge unit(14). The nanoparticle inlet unit is connected to the inlet line, and is installed on one side of the nanoparticle collection/storage containers. The filter screen is equipped in the nanoparticle collection/storage containers. The carrier gas discharge unit is installed in the nanoparticle collection/storage container to discharge the carrier gas which is passing through the filter screen, and is connected to the carrier gas discharge line.
Abstract:
PURPOSE: A method and apparatus for texturing a thin-film solar cell using droplets and the thin-film solar cell textured by the same are provided to perform a environment-friendly process using a plasma reactor in which the process is easily controlled. CONSTITUTION: Textured solutions of droplets are formed. The texturing solution of the droplet is injected in a plasma reactor in which plasma is formed. A thin film solar cell is textured. The texturing solutions of the droplets are formed by an ultrasonic droplet generator. The texturing solution can be methanol or ethanol. [Reference numerals] (AA) Making droplets from texturing solutions; (BB) Injection of the droplets into a reactor
Abstract:
PURPOSE: A window assembly capable of enabling a user to confirm the opening and closing state of a window is provided to rapidly recognize a user that a window is opened and to enable the user to rapidly close the window. CONSTITUTION: A window assembly(100) capable of enabling a user to confirm an opening and closing state comprises a frame member(110), a window frame member(120), a light permeating member, a solar battery(140), a condensing member, a mark member, a luminous member, and a control member. The frame member is installed on the wall of a structure. The window frame member is slidably formed in the frame member. The light permeating member is composed of a transparent material and sends external light to the inside the structure. The solar battery converts solar energy into electric energy. The condensing member stores the converted electric energy. The mark member is arranged on one surface of the light permeating member. The luminous member is electrically connected to the condensing member and emits light. The control member controls the light emitting of the luminous member.
Abstract:
PURPOSE: An apparatus, a method, and a system for depositing a solar cell thin film are provided to reduce the number of equipment pieces by performing a fixed dual deposition of a substrate without rotation. CONSTITUTION: A plurality of unit chambers(110a, 110b) are divided based on a substrate(W). A deposition gas spraying unit(120) independently sprays deposition gas(G1, G2) to the plurality of unit chambers. A dissolving unit(130) dissolves the deposition gas and is separated from one side of the substrate. A support unit(140) supports the substrate.
Abstract:
PURPOSE: A CIS system compound thin film manufacturing device is provided to form a uniform thin film by preventing the heat loss and the damage of a substrate due to contact. CONSTITUTION: A vacuum chamber(20) includes a boat containing elements such as Cu, In, Ga. A heating part(30) comprises a body, a tray and a heating source. A pyrometer(40) measures the temperature of the substrate placed in the tray. A controller receives a signal which is measured from the pyrometer. The pyrometer is installed inside the body of the heating part and measures the temperature of the back side of the substrate.
Abstract:
본 발명은 본 발명은 내주면에 기판(B,B1)을 수용하여 회전하는 회전체(100); 및 상기 회전체(100)의 내부에 배치되고 상기 회전체(100)의 회전시 상기 기판을 향해서 코팅용 용액(S)을 분사하는 용액 분사수단;을 포함하고, 상기 용액(S)은 중력과 원심력에 의해 상기 기판의 표면에 고르게 코팅되는 것을 특징으로 하는 회전체를 이용한 기판의 코팅장치를 제공한다. 본 발명은 상기 구성에 의해서, 회전체의 회전 원심력과 중력을 이용하여 기판의 표면에 용액을 균일한 두께로 코팅할 수 있고, 용액(S)의 밀도 및 점성에 따라 회전체의 회전 속도를 가변 조절할 수 있는 유리한 이점을 갖고, 또한 중력과 원심력이 용액을 눌러 고르게 펴주기 때문에 텍스처가 있는 기판에도 적용할 수 있는 점이 또 하나의 장점이다.
Abstract:
본 발명은 플라즈마 반응부에 근접하여 제1가스 주입부를 위치시키되, 제2가스 주입부는 플라즈마 반응부로부터 멀리 위치시키고, 주입가스 별로 주입관을 교차배열시킴으로서, 제1가스 간에 혼합이 충분히 이루어질 뿐 아니라, 플라즈마 반응영역에서도 제1가스와 제2가스 간의 균일한 플라즈마 반응이 가능하며, 짧은 체류시간 동안 플라즈마 밀도를 높임으로서 플라즈마 퍼짐현상도 최소화되고, 보다 입도제어가 용이하고, 생성입자 간의 입자응집 형성을 방지하기 위해 냉각가스를 주입함으로서 수율을 향상시키게 된다.
Abstract:
The present invention relates to an apparatus and a method for coating a substrate for coating a solution sprayed on the substrate by applying rotational centrifugal force and gravity and for evenly coating the solution on the surface of the substrate by adjusting a rotational speed of a rotor depending on the density of the solution. The coating apparatus of the present invention comprises: a rotor which rotates around the axis of rotation; a fixing board disposed on the upper surface of the rotor, wherein the upper part of the fixing board is spaced apart from the bottom of the rotor; and a supporting board connected to the upper part of the fixing board to allow swing movement, wherein a substrate is safely attached to the upper part of the supporting board.