公开(公告)号：JPH0765704A

公开(公告)日：1995-03-10

申请号：JP23596593

申请日：1993-08-30

Applicant: CANON KK

Inventor： SUGIOKA HIDEYUKI ,  ONISHI TOSHIICHI ,  OKUDA MASAHIRO ,  MATSUTANI SHIGEKI ,  MITOME MASANORI ,  ASAI AKIRA ,  OSADA YOSHIYUKI

IPC: H01J1/316 ,  H01J1/30 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12

Abstract: PURPOSE:To provide an electron emission element, where the island structure of superfine particles is controlled by the orientation property peculiar to an organic film so as to suppress the dispersion between elements, by arranging an organic film layer containing superfine particles between a pair of electrodes. CONSTITUTION:On an insulating substrate 4, an organic film layer 1 of both mediaphilic properties, which shows peculiar self composition by the mutual action of hydrophobic and hydrophilic radicals containing superfine particles such as ribosome 202 where, for example, conductive superfine particles 201 are sealed, is arranged between element electrodes 2 and 3. For the ribosome, the size and the retention efficiency into inner water phase of sealed matter can be controlled to some degree by making method, so the dispersion between elements can be controlled by controlling the island structure of the superfine particles. After current application treatment with the voltage applied between the electrodes 2 and 3, the substrate 4 and an insulating substrate 13, where a phosphor layer 11 and a transparent electrode 12 are arranged, are confronted with each other across a sealing member 14, and the space 15 is decompressed for sealing.

公开(公告)号：JP2000306499A

公开(公告)日：2000-11-02

申请号：JP11560799

申请日：1999-04-23

Applicant: CANON KK

Inventor： ONISHI TOSHIICHI ,  MITOME MASANORI

IPC: H01J9/02

Abstract: PROBLEM TO BE SOLVED: To provide excellent electron emission characteristics and form a high quality image by applying voltage in an atmosphere in which an organic substance from which impurities are removed exists to a conductive film arranged between a pair of electrodes. SOLUTION: An organic metal thin film is formed on a substrate 1 on which element electrodes 2, 3 are installed by coating the substrate 1 with an organic metal solution. The organic metal thin film is heated, baked, and patterned by lift off or etching to form a conductive film 4. Electric current is supplied between the element electrodes 2, 3 in a current carrying forming process to form a gap 6 in a portion of the conductive film 4. An activation treatment repeating apply of pulse is conducted to the elements after the current carrying forming is finished same as the current carrying forming under an atmosphere containing gas of an organic substance. The purity of the organic substance used in activation is preferable to be 99% or higher. As the organic substance, aliphatic hydrocarbons of alkane, alkene alkyne, aromatic hydrocarbons, and alcohols are used.

公开(公告)号：JP2000200545A

公开(公告)日：2000-07-18

申请号：JP17931799

申请日：1999-06-25

Applicant: CANON KK

Inventor： KAWADE ISAAKI ,  YAMAMOTO KEISUKE ,  HAMAMOTO YASUHIRO ,  YAMANOBE MASATO ,  MITOME MASANORI

IPC: H01J9/02

Abstract: PROBLEM TO BE SOLVED: To provide the more even and stabilized electron emitting characteristic by applying the pulse-like voltage to a conductive film arranged on a substrate in the atmosphere including the reducing material, and forming the conductive film with an electron emitting part. SOLUTION: A flat surface transmission type electron emitting element is formed of a substrate 1, element electrodes 4, 5, a conductive film 3 and an electron emitting part 2. In a process for manufacturing this element, the board 1 provided with the element electrodes 4, 5 is coated with the organic metal solution so as to form an organic metal film, and thereafter, heating for burning is performed so as to form a conductive film 3 made of the metal oxide. Continuously, when the forming process for feeding the current from the predetermined power source is performed between the element electrodes 4, 5, the conductive film 3 is partially formed with a part, of which structure is changed by breakdown, deformation and deterioration. This part forms the electron emitting part 2. This electrical feeding forming process is performed in the atmosphere including the reducing material.

公开(公告)号：JPH09298029A

公开(公告)日：1997-11-18

申请号：JP8307196

申请日：1996-03-13

Applicant: CANON KK

Inventor： KAWADE ISAAKI ,  YAMAMOTO KEISUKE ,  HAMAMOTO YASUHIRO ,  YAMANOBE MASATO ,  MITOME MASANORI

IPC: G09G3/22 ,  H01J1/316 ,  H01J9/02 ,  H01J29/00 ,  H01J29/04 ,  H01J29/46 ,  H01J31/10 ,  H01J31/12 ,  H01J1/30

Abstract: PROBLEM TO BE SOLVED: To uniformize and stabilize the electron emitting characteristic, and improve the electron emitting efficiency by uniformly forming an electron emitting part, particularly, in surface conductive type, so that the width of a crack is 50nm or less, and the length corresponding to voltage application is 5nm or less. SOLUTION: This element has a base 1, opposed element electrodes 4, 5, and a conductive film 3 formed of fine particle film, and an electron emitting part 2 formed of a crack by electric forming is formed on the film 3. The crack width is uniformly set to 50nm or less and, preferably, the voltage application corresponding length is uniformly set to 5nm or less. Namely, the electric forming is performed in the atmosphere containing a gas for promoting the coagulation of the film 3 by applying a pulse voltage preferably in a prescribed wave height value. As the gas, reductive H2 , CO or the like is used when the film 3 is formed of a metal oxide, to coagulate the film 3 in reduction. Thus, the power necessary for treatment is reduced, and since the emitting part 2 is formed when the resistance value of the film 3 is reduced to the same value, the dispersion between elements is suppressed.

公开(公告)号：JPH0765711A

公开(公告)日：1995-03-10

申请号：JP23596293

申请日：1993-08-30

Applicant: CANON KK

Inventor： ASAI AKIRA ,  YAMAMOTO KEISUKE ,  MITOME MASANORI ,  SUGIOKA HIDEYUKI ,  OKUDA MASAHIRO ,  MATSUTANI SHIGEKI ,  OSADA YOSHIYUKI

IPC: H01J9/02 ,  H01J1/30

Abstract: PURPOSE:To form an electron emission part with high positional accuracy by processing one part of the conductive film made on an insulating substrate by the use of the probe of a scanning type of tunneling microscope, and then, applying a current treatment. CONSTITUTION:Element electrodes 12 and 13 consisting of Ni are made on the surface of an insulating quartz substrate 11 cleaned with organic solvent. Hereon, solution containing organic palladium is applied, and then it is heat- treated to form a conductive fine particle thin film 14 consisting of paradium oxide fine particles. Next, tungsten fin particles 16 are formed by shifting the probe 15 of a scanning type of tunneling microscope on which tungsten atoms are stuck and bringing it into contact with the film or separating it while confirming a tunnel current. When pulse voltage is applied between the electrodes 12 and 13, the structural change of the film 14 occurs from the place of particles 16, and the electron emission part 17 consisting of a crack can be made with the positional accuracy on atom scale.

公开(公告)号：JPH0712824A

公开(公告)日：1995-01-17

申请号：JP15540293

申请日：1993-06-25

Applicant: CANON KK

Inventor： KUSAKA TAKAO ,  MITOME MASANORI

IPC: G01N37/00 ,  G01Q60/10 ,  G01Q60/14 ,  G01R29/12 ,  G01R29/14 ,  H01J37/28

Abstract: PURPOSE:To accurately measure ruggedness and potential distribution in a very small area on the surface of a sample by applying an AC voltage as a bias voltage and finding the amplitude of the component of a tunnel current synchronous to the AC voltage. CONSTITUTION:When an AC voltage V1 from an oscillator 5 and voltage V2 from another oscillator 6 are applied across a sample 1 and probe 7, with the voltage V1 being applied as a bias voltage, a tunnel current It (=I1+I2) starts to flow. In addition multipliers 10 and 17 input a voltage proportional to a noise-superimposed component. The multiplier 10 outputs the component synchronous to a reference signal 1 among the sum signals of the current It noise, and signal 1 after converting it into a DC and the other component after converting it into an AC. A feedback circuit 13 only inputs the amplitude of the current I1 from which only the DC component is filtered 11 and a Z-axis driving signal accurately reflects the surface ruggedness of the sample 1. Of the components outputted from the multiplier 17, only the DC component is similarly filtered and only the amplitude of the current I2 is inputted to a voltage measuring circuit 20. As a result, the potential distribution map on the surface of the sample 1 is obtained by recording 21 the amplitude together with X- and Y-axis driving signals, namely, the position of the probe 7.

公开(公告)号：JPH07225136A

公开(公告)日：1995-08-22

申请号：JP3654494

申请日：1994-02-09

Applicant: CANON KK

Inventor： MITOME MASANORI ,  KUSAKA TAKAO

IPC: G01D1/10 ,  G01N23/227 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/10 ,  G01Q60/12 ,  G01Q90/00

Abstract: PURPOSE:To easily measure a second order partial differential coefficient regarding a plurality of variables by adding modulation signals having different frequencies to dependent variables of a signal to be measured and by multiplying obtained signals by an alternate signal of frequencies equivalent to a difference or sum of two modulation signals. CONSTITUTION:A signal to be measured entering from an input terminal 1 enters an adder 6 after extra oscillating components are filtered off. A rectangular wave having a frequency equivalent to a difference or sum of frequencies of two modulation signals created by a rectangular wave generating circuit 5 enters the adder 6 and multiplied by a signal to be measured that is the output of the filter 4. As a result of multiplication, a signal outputted from the adder 6 can be regarded as the sum of a dc signal and an ac signal. The do signal is proportional to a second order partial differential coefficient and is therefore passed through a low-frequency pass filter 7 and amplified by time average, thereby selectively amplifying the second order partial differential coefficient.

公开(公告)号：JPH05247646A

公开(公告)日：1993-09-24

申请号：JP4883692

申请日：1992-03-05

Applicant: CANON KK

Inventor： MITOME MASANORI

IPC: C23C14/52 ,  C23C14/54 ,  H01L21/203

Abstract: PURPOSE:To measure the average particle diameter of a superfine-particle thin film formed on a substrate by providing an electron beam source and an electron energy analyzer in a vacuum vessel. CONSTITUTION:A gaseous mixture of SiH4, H2, and Ar as the raw gas 6 is decomposed by the microwave from a microwave power source 4 in a cavity resonator 1 and blown off through a nozzle 3, and hence the superfine Si particles are formed and deposited on a substrate 5. The local region of the thin film of the superfine Si particles is exposed to an electron beam, and the average diameter of the superfine particles is measured by an electrostatic cylindrical mirror-type electron energy analyzer 8. Meanwhile, a dil. superfine Si gas is exposed to the electron beam before the particles are deposited on the substrate 5 to measure the average particle diameter. The average diameter of the superfine particles of micron order is measured in this way.

公开(公告)号：JPH05231849A

公开(公告)日：1993-09-07

申请号：JP6930192

申请日：1992-02-20

Applicant: CANON KK

Inventor： MITOME MASANORI

IPC: G01B15/00 ,  G01N15/02

Abstract: PURPOSE:To measure a particle diameter and an average particle diameter of an ultrafine particle by obtaining a plasmon energy from an electronic energy loss spectrum which is measured by an electron ray source and an electronic energy analysis device. CONSTITUTION:Plasmon energy which is generated within an ultrafine particle is affected by quantum size effect when the particle diameter is reduced and becomes larger than that of a large crystal. Since a relationship which is expressed by a specific expression exists between plasmon energy and a particle diameter d of the ultrafine particle, a single particle diameter of the ultrafine particle which exists in a minute area which is equal to or less than 10mum is calculated by measuring plasmon energy within the ultrafine particle. Furthermore, an average particle diameter of a plurality of ultrafine particles can be obtained by measuring plasmon energy of a plurality of ultrafine particles with a particle diameter distribution. Plasmon energy can be obtained by measuring an electronic energy loss spectrum. Namely, the electronic energy loss spectrum is measured by an electronic energy analysis device while being exposed to electron beam from electron ray source.

公开(公告)号：JPH11329306A

公开(公告)日：1999-11-30

申请号：JP13196598

申请日：1998-05-14

Applicant: CANON KK

Inventor： MITOME MASANORI

IPC: H01J29/86 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To restrain generation of an error in color in each pigment caused by a selected electron emitting element by changing a distance between the element and a phosphor having a face-to-face relation therewith. SOLUTION: The height of a support frame 82 of an image forming device 88 is not made constant such that its right side is made higher than the left side. Accordingly, a distance between a face plate and a substrate 1 having an electron emitting element mounted thereon is not made constant, and the distance in the vicinity of vessel outer terminals Dox1-Doxm, Doy1-Doyn is made larger while the distance at a position remote therefrom is made small. Electrons are emitted from each electron emitting element 74 through the terminals Dox1-Doxm, Doy1-Doyn with the application of a scanning signal and a demodulation signal, and through a high voltage end Hv a high voltage is impressed to a metal back 85 to accerelate an electron beam to impinge it on a fluorescent film 84. Accordingly, the element 74 at any position can emit light evenly at a same brightness.