50.
    发明专利
    未知

    公开(公告)号:DE69023023D1

    公开(公告)日:1995-11-23

    申请号:DE69023023

    申请日:1990-03-09

    Applicant: CANON KK

    Abstract: The present invention provides an X-ray mask structure comprising an X-ray transmissive membrane, an X-ray absorber held on said X-ray transmissive membrane, and a holding frame that holds said X-ray transmissive membrane, wherein; said X-ray transmissive membrane comprises a layer of aluminum nitride; and said X-ray absorber comprises a nitride of heavy metal. a

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