公开(公告)号：EP2309130A3

公开(公告)日：2013-03-06

申请号：EP10180441.7

申请日：2000-06-27

Applicant: California Institute of Technology

Inventor： Unger, Marc A. ,  Scherer, Axel ,  Quake, Stephen R. ,  Chou, Hou-Pu ,  Thorsen, Todd A.

IPC: F04B43/04 ,  F15C5/00 ,  F16K99/00

CPC classification number: B29C51/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B33Y80/00 ,  B81B5/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2201/034 ,  C12Q1/6874 ,  F04B43/043 ,  F15C1/06 ,  F15C5/00 ,  F16K11/20 ,  F16K13/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2224 ,  Y10T137/87249 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：EP2066582A2

公开(公告)日：2009-06-10

申请号：EP07826453.8

申请日：2007-09-19

Applicant: Koninklijke Philips Electronics N.V.

Inventor： GILLIES, Murray, F. ,  DEN TOONDER, Jacob, M., J. ,  JOHNSON, Mark, T. ,  PONJEE, Marc, W., G.

IPC: B81B3/00

CPC classification number: B81B3/0029 ,  B81B2201/036

Abstract: The Invention concerns to a micro-actuator device for the use in biochip or bio-system. In order to achieve a micro-actuator device for the use as a micro pump in biosensors or bio-systems, or at least bio-chips, by which the actuation can be steered very precisely and effective, the solution is that the micro actuator consist of a photosensitive actuator element (1), which can be deformed from a reversal basic-form into an activated deformation form by photonic activation of a light source (3, 4, L1, L2) in order to generate with this controlled movement a defined flow in a gas or a liquid.

公开(公告)号：EP1345551B1

公开(公告)日：2009-04-01

申请号：EP01989783.4

申请日：2001-11-28

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： UNGER, Marc, A. ,  CHOU, Hou-Pu ,  THORSEN, Todd, A. ,  SCHERER, Axel ,  QUAKE, Stephen, R. ,  LIU, Jian ,  ADAMS, Mark, L. ,  HANSEN, Carl, L.

IPC: A61F2/00

CPC classification number: B05D3/04 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/06 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B65B31/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6832 ,  C12Q1/6874 ,  C30B29/54 ,  F04B43/043 ,  F15C1/06 ,  F15C3/00 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0424 ,  Y10T137/206 ,  Y10T137/2082 ,  Y10T137/2164 ,  Y10T137/2169 ,  Y10T137/2174 ,  Y10T137/2202 ,  Y10T137/2224 ,  Y10T137/3084 ,  Y10T137/7837 ,  Y10T137/86027 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24612 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：EP1199174B1

公开(公告)日：2008-05-21

申请号：EP01308476.9

申请日：2001-10-03

Applicant: Xerox Corporation

Inventor： Kubby, Joel A. ,  Eklund, Elliott A. ,  Gulvin, Peter M.

IPC: B41J2/14

CPC classification number: F04B43/043 ,  B41J2/14314 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/045 ,  B81B2201/052 ,  B81B2203/0127 ,  B81B2203/053

公开(公告)号：EP1754683A1

公开(公告)日：2007-02-21

申请号：EP05017927.4

申请日：2005-08-18

Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

Inventor： Schenk, Harald, Dr.-Ing.

IPC: B81B3/00 ,  G02B26/08 ,  B01L3/00

CPC classification number: G02B26/0825 ,  B01L3/5027 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0361 ,  B81B2207/07 ,  B81C1/00182 ,  B81C2201/014 ,  F04B43/043 ,  G02B26/0841

Abstract: Die Erfindung betrifft Mikro-Elektromechanische Elemente, die vielfältig mit geringfügigen Modifikationen in der Mikromechanik, -optik und auch -fluidik eingesetzt werden können. Sie sollen kostengünstig hergestellt werden können und für verschiedene Applikationen anpassbar sein. Die erfindungsgemäßen Elemente sind dabei so ausgebildet, dass auf einem Substrat eine elastisch verformbare Membran aus einem zumindest bereichsweise elektrisch leitenden Werkstoff so befestigt ist, dass zwischen Substrat und Membran ein Hohlraum oder ein Spaltbereich mittels Abstandshaltern ausgebildet ist. Ein oder mehrere Abstandshalter sind aus einem dielektrischen polymeren Werkstoff gebildet. Am Substrat ist mindestens ein Kontaktelement vorhanden, das an eine elektrische Spannungsquelle angeschlossen ist.

Abstract translation: 微机电元件在基板上具有由导电材料制成的柔性延性膜片。 在基板（1）和隔膜（2）之间，由介电聚合材料的多个间隔物（4）提供空腔（3）或间隙。 在基板上设有一个连接到电源上的接触元件。 触点可以单独控制。 触点和/或部分用于局部限定的布置在基板上的隔膜的柔性变形。

公开(公告)号：EP1687535A1

公开(公告)日：2006-08-09

申请号：EP04805827.5

申请日：2004-11-12

Applicant: STMicroelectronics S.A.

Inventor： BOUCHE, Guillaume

IPC: F04B43/04 ,  F15C5/00 ,  B81B3/00

CPC classification number: F04B43/043 ,  B81B7/0093 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0315 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention relates to a pump comprising: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity comprising an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

公开(公告)号：EP1317625A4

公开(公告)日：2005-08-10

申请号：EP01968418

申请日：2001-08-31

Applicant: ADVANCED SENSOR TECHNOLOGIES

Inventor： HOWER ROBERT W ,  CANTOR HAL C ,  MONDRO JASON R

IPC: A61B5/00 ,  A61B5/103 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  F04B19/00 ,  F04B19/24 ,  F04B35/02 ,  F04B43/04 ,  F15B15/20 ,  F15C5/00 ,  F16K99/00 ,  G01N27/416 ,  F16K7/04 ,  F16K31/122

CPC classification number: F04B19/006 ,  A61B5/0002 ,  A61B5/145 ,  A61B5/14514 ,  A61B5/14532 ,  A61B5/14546 ,  A61B5/1491 ,  A61B2560/0412 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/10 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0816 ,  B01L2300/087 ,  B01L2400/0442 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/086 ,  B81B1/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B43/046 ,  F15B2015/208 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0036 ,  F16K99/0061 ,  F16K2099/0069 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0084

Abstract: According to the present invention, there is provided a micro-fluidic sensor system (6) including a micro-conduit (56) for carrying fluid therethrough having a flexible wall portion (18), at least one micro-fluidic actuator having a closed cavity, flexible mechanism defining a wall of the cavity (11) and flexible wall portion (18) of the micro-conduit for deflecting upon an application of pressure thereto, and expanding mechanism (14) disposed in the cavity for selectively expanding the cavity and thereby selectively flexing said expanding mechanism, and sensor mechanism in fluid communication with the micro-conduit for sensing the presence or absence of molecules. The present invention further provides for a micro-fluidic system for moving micro-fluid amounts including a micro-conduit and at least one micro-fluidic actuator in fluid communication with the micro-conduit.

Abstract translation: 根据本发明，提供了一种微流体传感器系统（6），其包括用于承载流体通过其中的微导管（56），该微导管具有柔性壁部分（18），至少一个微流致动器具有封闭腔 ，柔性机构限定微型导管的腔体（11）和柔性壁部分（18）的壁，用于在对其施加压力时偏转，以及设置在腔体中的扩张机构（14），用于选择性扩张腔体 选择性地弯曲所述膨胀机构，以及与微导管流体连通的传感器机构，用于感测分子的存在或不存在。 本发明还提供了用于移动微流体量的微流体系统，该微流体系统包括微导管和与该微导管流体连通的至少一个微流致动器。

公开(公告)号：EP2520367A1

公开(公告)日：2012-11-07

申请号：EP12179245.1

申请日：2006-10-03

Applicant: Rheonix, Inc.

Inventor： Lincoln, Young ,  Peng, Zhou

IPC: B01L3/00 ,  F04B43/04 ,  B32B27/00 ,  F04B53/10 ,  B01F11/00 ,  B01F13/00 ,  B01F5/06 ,  B29C65/48 ,  B81B1/00 ,  C09J5/00 ,  F16K99/00 ,  F04B43/06 ,  B81C1/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜与衬底的表面相抵靠，并且其中隔膜从衬底移开的致动状态。 从下面的描述可以看出，用该隔膜形成的微流体结构提供易于制造和坚固的系统，以及容易制造的部件，例如阀和泵。

公开(公告)号：EP2309130A2

公开(公告)日：2011-04-13

申请号：EP10180441.7

申请日：2000-06-27

Applicant: California Institute of Technology

Inventor： Unger, Marc A. ,  Scherer, Axel ,  Quake, Stephen R. ,  Chou, Hou-Pu ,  Thorsen, Todd A.

IPC: F04B43/04 ,  F15C5/00 ,  F16K99/00

CPC classification number: B29C51/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B33Y80/00 ,  B81B5/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2201/034 ,  C12Q1/6874 ,  F04B43/043 ,  F15C1/06 ,  F15C5/00 ,  F16K11/20 ,  F16K13/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2224 ,  Y10T137/87249 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿着所述第二弹性体层的底表面延伸的第二凹槽，将所述第二弹性体层的底表面接合到顶部 第一弹性体层的表面，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将所述第一弹性体层定位在平面基底的顶部上，使得在所述第一弹性体层和所述平面基底之间的所述第一凹部中形成流动通道。

公开(公告)号：EP2039940A2

公开(公告)日：2009-03-25

申请号：EP08158448.4

申请日：2008-06-18

Applicant: Honeywell International Inc.

Inventor： Yang, Wei

IPC: F04D17/12 ,  F04D17/16

CPC classification number: F04D17/168 ,  B81B3/0021 ,  B81B2201/034 ,  B81B2201/036 ,  B81B2203/056 ,  F04D17/127

Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.

Abstract translation: 一种径向涡轮分子真空泵，其包括由包括单片制造的微型叶片的硅转子表面制成的转子，以及由硅定子表面制成的定子，该定子由包括相应的单片制造的凹槽构成。 微型叶片和槽布置在多个环中，并且转子和定子盘被放置在邻近处，产生交错的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。