HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM
    45.
    发明申请
    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM 有权
    高纯度合成二氧化硅及其制造的半导体夹具

    公开(公告)号:US20130115391A1

    公开(公告)日:2013-05-09

    申请号:US13809231

    申请日:2011-07-08

    Abstract: Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fibre reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.

    Abstract translation: 公开了外径大于400mm,内径大于300mm的透明合成玻璃石英玻璃的中空铸锭。 锭基本上没有直径大于100um的气泡或夹杂物,具有不超过100ppB的任何单独的金属杂质,并且氯浓度小于5ppM。 还公开了生产这种锭的方法,其中密度大于0.4g / cm 3的多孔烟灰体沉积在抗氧化心轴上。 在真空下或在还原气体存在下,烟灰体在包括石墨,碳纤维增强碳,碳化硅,硅浸渍的碳化硅,碳化硅涂覆的石墨或玻璃状二氧化硅的心轴上脱水,然后烧结成透明 无孔玻璃在真空或氦气氛中。

    Method for producing quartz glass using a mixed powder
    46.
    发明授权
    Method for producing quartz glass using a mixed powder 有权
    使用混合粉末生产石英玻璃的方法

    公开(公告)号:US08156761B2

    公开(公告)日:2012-04-17

    申请号:US13023262

    申请日:2011-02-08

    Applicant: Tatsuhiro Sato

    Inventor: Tatsuhiro Sato

    Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

    Abstract translation: 混合石英粉含有0.1〜20质量%的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N,C和F的第一掺杂元素和选自Mg,Ca,Sr,Ba,Sc,Y,Ti,Zr,Hf的第二掺杂元素, 镧系元素和锕系元素。 “石英粉”是结晶石英粉,或是玻璃状SiO 2粉末的粉末。 它由天然石英制成,或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量(M1)与上述第二元素的总量(M2)的配位比优选为0.1〜20。作为原子数(M1)/(M2)的比例,优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

    INTERNAL VAPOUR DEPOSITION PROCESS
    47.
    发明申请
    INTERNAL VAPOUR DEPOSITION PROCESS 有权
    内部蒸汽沉积过程

    公开(公告)号:US20110247369A1

    公开(公告)日:2011-10-13

    申请号:US13082080

    申请日:2011-04-07

    Abstract: A method for manufacturing a primary preform for optical fibres using an internal vapour deposition process, including the steps of: i) providing a hollow glass substrate tube having a supply side and a discharge side, ii) surrounding at least part of the hollow glass substrate tube by a furnace, iii) supplying a gas flow, doped or undoped, of glass-forming gases to the interior of the hollow glass substrate tube via the supply side thereof, iv) creating a reaction zone in which conditions such that deposition of glass will take place on the interior of the hollow glass tube are created, and v) moving the reaction zone back and forth in longitudinal direction over the hollow glass substrate tube between a reversal point located near the supply side and a reversal point located near the discharge side of the hollow glass substrate tube.

    Abstract translation: 一种使用内部气相沉积工艺制造用于光纤的初级预制棒的方法,包括以下步骤:i)提供具有供给侧和排出侧的中空玻璃基板管,ii)至少部分中空玻璃基板 通过炉子管,iii)通过其供应侧向中空玻璃基底管的内部供应玻璃形成气体的掺杂或未掺杂的气流,iv)产生反应区,其中使玻璃沉积的条件 将产生在中空玻璃管​​的内部,并且v)使反应区域在纵向方向上前后移动到中空玻璃基板管之间,位于靠近供应侧的反转点和位于放电附近的反转点 一侧的中空玻璃基板管。

    METHOD FOR PRODUCING QUARTZ GLASS DOPED WITH NITROGEN AND QUARTZ GLASS GRAINS SUITABLE FOR CARRYING OUT THE METHOD
    48.
    发明申请
    METHOD FOR PRODUCING QUARTZ GLASS DOPED WITH NITROGEN AND QUARTZ GLASS GRAINS SUITABLE FOR CARRYING OUT THE METHOD 审中-公开
    用于生产适用于实施方法的硝酸盐和石英玻璃颗粒的石英玻璃的方法

    公开(公告)号:US20110183138A1

    公开(公告)日:2011-07-28

    申请号:US12737468

    申请日:2009-07-16

    Abstract: In a known method for producing quartz glass that is doped with nitrogen, an SiO2 base product is prepared in the form of SiO2 grains or in the form of a porous semi-finished product produced from the SiO2 grains and the SiO2 base product is processed into the quartz glass with the nitrogen chemically bound therein in a hot process in an atmosphere containing a reaction gas containing nitrogen. From this starting point, a method is provided for achieving nitrogen doping in quartz glass with as high a fraction of chemically bound nitrogen as possible. This object is achieved according to the invention in that a nitrogen oxide is used as the nitrogen-containing reaction gas, and that a SiO2 base product is used that in the hot process has a concentration of oxygen deficient defects of at least 2×1015 cm−3, wherein the SiO2 base product comprises SiO2 particles having an average particle size in the range of 200 nm to 300 μm (D50 value).

    Abstract translation: 在制造掺杂有氮的石英玻璃的已知方法中,SiO 2基底产物以SiO 2晶粒的形式制备,或以由SiO 2晶粒生成的多孔半成品的形式制备,将SiO 2基产物加工成 在含有含氮反应气体的气氛中,在热过程中氮化学结合的石英玻璃。 从这个起点,提供了一种在石英玻璃中实现氮掺杂的方法,尽可能高的一部分化学键合的氮。 根据本发明的目的是根据本发明实现氮氧化物作为含氮反应气体,并且使用SiO 2基产物,其在热处理中具有至少2×1015cm的缺氧缺陷浓度 -3,其中SiO 2基产物包含平均粒度在200nm至300μm(D50值)范围内的SiO 2颗粒。

    Method for production of silica optical fiber preforms
    50.
    发明授权
    Method for production of silica optical fiber preforms 失效
    二氧化硅光纤预制棒的生产方法

    公开(公告)号:US06928839B2

    公开(公告)日:2005-08-16

    申请号:US10219745

    申请日:2002-08-15

    Inventor: Leonid M. Blinov

    Abstract: A device and method is disclosed for manufacturing optical fiber preforms utilizing microwave plasma assisted chemical vapor deposition. Precursor gas is introduced to the face of a vertically mounted dielectric rod, and a plasma is struck by means of simultaneous excitation of an E01 type wave and an H type wave with rotating linear polarization. The silica rod is positioned so that its face is at the bottom of the tube. Precursor gas is delivered from a position below the face of the silica rod, and microwave energy, which travels through the rod to the rod face, is delivered from a source positioned above the rod. With this configuration, a uniformly dense plasma localized on the face of the rod can simultaneously deposit both a pure or doped core and a doped cladding. It is also useful for creating waveguides, preform cores for use as substrates in creating optical fiber preforms, capillaries and ceramic rods.

    Abstract translation: 公开了一种利用微波等离子体辅助化学气相沉积制造光纤预制件的装置和方法。 前体气体被引入垂直安装的介质棒的表面,并且通过同时激发E 01型波和具有旋转线性极化的H型波来冲击等离子体。 硅胶棒被定位成使其表面位于管的底部。 前体气体从二氧化硅棒的表面下方的位置输送,并且将通过该杆传播到杆面的微波能量从位于杆上方的源输送。 利用这种构造,位于棒表面上的均匀致密的等离子体等离子体可以同时沉积纯或掺杂的芯和掺杂的包层。 它也可用于创建波导,预制核心用作创建光纤预制件,毛细管和陶瓷棒的基板。

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