公开(公告)号：WO2006014494A2

公开(公告)日：2006-02-09

申请号：PCT/US2005/023994

申请日：2005-07-06

Applicant: CORCORAN, Timothy C.

Inventor： CORCORAN, Timothy C.

IPC: G01J3/30

CPC classification number: G01N21/6456 ,  G01J3/02 ,  G01J3/021 ,  G01J3/14 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/6486 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6441 ,  G01N2021/6463 ,  G01N2201/10 ,  G01N2201/1042

Abstract: Methods and devices are disclosed which apply an excitation-emission matrix (EEM) to a heterogeneous, two-dimensional sample, allowing a considerably larger number of emitting, e.g. fluorescent, labels to be used simultaneously. This may be accomplished by employing a spectroscopic method of excitation-emission matrices which allows discrimination of species with similar emission spectra, and also allows positive identification of energy transfer between emitting species. The methods and devices may employ a novel excitation-light scanning technique which allows imaging of the emission from the heterogeneous sample both in two spatial dimensions (length and width) and in two spectral dimensions (excitation and emission wavelength). This light scanning technique maximizes the throughput of excitation light, increasing the sensitivity and hence the reading speed of the instrument.

Abstract translation: 公开了将激发发射矩阵（EEM）施加到异质二维样品的方法和装置，允许相当大量的发射，例如， 荧光，标签同时使用。 这可以通过采用激发发射矩阵的光谱方法来实现，其允许区分具有相似发射光谱的物质，并且还允许阳性鉴定发射物质之间的能量转移。 所述方法和装置可以采用新的激发光扫描技术，其允许在两个空间维度（长度和宽度）和两个光谱尺寸（激发和发射波长）中成像异质样品的发射。 这种光扫描技术使激发光的吞吐量最大化，从而提高了仪器的灵敏度和读取速度。

公开(公告)号：EP3074755A1

公开(公告)日：2016-10-05

申请号：EP14800193.6

申请日：2014-10-29

Applicant: Nanometrics Incorporated

Inventor： BUCZKOWSKI, Andrzej

IPC: G01N21/55 ,  G01N21/64 ,  G01N21/88 ,  G01N21/47 ,  G01N21/95 ,  G01B11/06

CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2201/06113 ,  G01N2201/1042 ,  G01N2201/1053 ,  H04N3/155

Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.

Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 扫描系统可以用于扫描样品上的照明点以形成照明线。 检测器对沿着照明线发射的光致发光进行光谱成像。 此外，宽带照明源可以用于在样本上产生第二照明线，其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。

公开(公告)号：EP2200758B1

公开(公告)日：2014-01-08

申请号：EP08829903.7

申请日：2008-09-03

Applicant: TOMRA Sorting NV

Inventor： BERGHMANS, Paul

IPC: B07C5/342 ,  G01N21/89

CPC classification number: B07C5/342 ,  G01N21/85 ,  G01N21/8901 ,  G01N2021/8592 ,  G01N2201/1042

公开(公告)号：EP2200758A1

公开(公告)日：2010-06-30

申请号：EP08829903.7

申请日：2008-09-03

Applicant: Belgian Electronic Sorting Technology, N.V.

Inventor： BERGHMANS, Paul

IPC: B07C5/342 ,  G01N21/89

CPC classification number: B07C5/342 ,  G01N21/85 ,  G01N21/8901 ,  G01N2021/8592 ,  G01N2201/1042

Abstract: The invention relates to a system comprising a broadband optical light source and a sorting device and more specifically to laser sorting devices. The object of the present invention is to provide a system comprising a sorting device with a light-source offering all wavelengths for the sorting process. This is solved by using an all fiber supercontinuum light source.

公开(公告)号：EP1850119A1

公开(公告)日：2007-10-31

申请号：EP07105607.1

申请日：2007-04-04

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Stockmann, Michael ,  Weber, Martin ,  Heine, Wolfgang ,  Spriegel, Dieter

IPC: G01N21/896 ,  G01N33/38 ,  G02B21/00

CPC classification number: G01N21/896 ,  G01N21/8901 ,  G01N21/958 ,  G01N33/386 ,  G01N2021/4716 ,  G01N2021/4735 ,  G01N2021/8905 ,  G01N2201/0642 ,  G01N2201/1042

Abstract: Ein Optischer Sensor wird zur Erfassung von punktförmigen, linienförmigen oder flächigen Defekten eingesetzt, die an glatten Oberflächen wie Glas auftreten können. Der Sensor bestehend aus:
a) einem telezentrischen Laserscanner (12) mit
- einem Laser (1) zur annähernd senkrechten Beleuchtung einer glatten Oberfläche (5),
- einem Scannspiegel (2),
- einer telezentrischen Optik (4) zur Führung von Beleuchtungs- und Detektionsstrahlen,

b) einer Erfassungseinheit (11) mit
- einer Detektoroptik (8),
- einer zentralen Blende (9), die konzentrisch in der Nähe der Detektoroptik von dieser aus in Richtung auf den telezentrischen Laserscanner (4) positioniert ist,
- einem hochempfindlichen Photomultiplier (6) zur Erfassung von Streulicht, das von Defekten auf glatten Oberflächen (5) ausgeht,
- einer dem Photomultiplier (6) vorgeschalteten Schlitzblende (7).


Anwendung/Produkt: Prüfanlage zur optischen Inspektion von Oberflächen

Abstract translation: 传感器具有远心激光扫描器（12），其包括用于平坦表面区域（5）近似垂直点亮的激光器（1），用于引导照明和检测光束的扫描反射器（2）和远中心光学器件（4）。 检测单元（11）具有检测器光学系统（8）和中心狭缝（9），该中心狭缝（9）通过远程中心激光扫描仪的方向上的检测器光学系统同心地定位。 检测单元还具有超敏感光电倍增器，用于收集从平面表面积上的缺陷和光电倍增器（6）上游狭缝光阑（7）延伸的散射光。 还包括用于在平面表面积处收集点状，线形或层状缺陷的方法的独立权利要求。

公开(公告)号：US09739661B2

公开(公告)日：2017-08-22

申请号：US14788561

申请日：2015-06-30

Applicant: Agilent Technologies, Inc.

Inventor： Andrew Ghetler ,  Adam Kleczewski ,  Richard P. Tella

IPC: G01J3/02 ,  G01J3/42 ,  G01N21/27 ,  G01N21/3563 ,  G01N21/55 ,  G01J3/10 ,  G01J3/28 ,  G01N21/47

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/108 ,  G01J3/2823 ,  G01J3/42 ,  G01N21/274 ,  G01N21/276 ,  G01N21/3563 ,  G01N21/4785 ,  G01N21/55 ,  G01N2201/101 ,  G01N2201/1042 ,  G01N2201/127

Abstract: A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.

公开(公告)号：US20130015370A1

公开(公告)日：2013-01-17

申请号：US13550291

申请日：2012-07-16

Applicant: Savvas Damaskinos ,  Arthur Edward Dixon

Inventor： Savvas Damaskinos ,  Arthur Edward Dixon

IPC: G01N21/64

CPC classification number: G01N21/6452 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2201/10 ,  G01N2201/1042

Abstract: An instrument and method for scanning a large specimen supported on a specimen holder has a plurality of illumination sources with each illumination, source being focused on a different focus spot of the specimen simultaneously. There are a plurality of spectrally resolved detectors to receive light reflected or emitted from the different focus spots simultaneously with each spectrally resolved detector receiving light from one illumination source only.

Abstract translation: 用于扫描支撑在样本保持器上的大样本的仪器和方法具有多个照明源，每个照明源同时聚焦在样本的不同聚焦点上。 存在多个光谱分辨检测器，用于接收来自不同焦点的反射或发射的光，同时每个光谱分辨检测器仅接收来自一个照明源的光。

公开(公告)号：US07532326B2

公开(公告)日：2009-05-12

申请号：US11175955

申请日：2005-07-06

Applicant: Timothy C. Corcoran

Inventor： Timothy C. Corcoran

IPC: G01J3/12

CPC classification number: G01N21/6456 ,  G01J3/02 ,  G01J3/021 ,  G01J3/14 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/6486 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6441 ,  G01N2021/6463 ,  G01N2201/10 ,  G01N2201/1042

Abstract: Methods and devices are disclosed which apply an excitation-emission matrix (EEM) to a heterogeneous, two-dimensional sample, allowing a considerably larger number of emitting, e.g. fluorescent, labels to be used simultaneously. This may be accomplished by employing a spectroscopic method of excitation-emission matrices which allows discrimination of species with similar emission spectra, and also allows positive identification of energy transfer between emitting species. The methods and devices may employ a novel excitation-light scanning technique which allows imaging of the emission from the heterogeneous sample both in two spatial dimensions (length and width) and in two spectral dimensions (excitation and emission wavelength). This light scanning technique maximizes the throughput of excitation light, increasing the sensitivity and hence the reading speed of the instrument.

Abstract translation: 公开了将激发发射矩阵（EEM）施加到异质二维样品的方法和装置，允许相当大量的发射，例如， 荧光，标签同时使用。 这可以通过采用激发发射矩阵的光谱方法来实现，其允许区分具有相似发射光谱的物质，并且还允许阳性鉴定发射物质之间的能量转移。 所述方法和装置可以采用新的激发光扫描技术，其允许在两个空间维度（长度和宽度）和两个光谱尺寸（激发和发射波长）中成像来自异质样品的发射。 这种光扫描技术使激发光的吞吐量最大化，从而提高了仪器的灵敏度和读取速度。

公开(公告)号：US07468507B2

公开(公告)日：2008-12-23

申请号：US11339044

申请日：2006-01-25

Applicant: Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

Inventor： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC: H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Abstract translation: 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。

公开(公告)号：US20070206192A1

公开(公告)日：2007-09-06

申请号：US11363938

申请日：2006-03-01

Applicant: Pavel Fomitchov ,  Eugene Barash ,  Ahmad Yekta ,  Joseph Masino

Inventor： Pavel Fomitchov ,  Eugene Barash ,  Ahmad Yekta ,  Joseph Masino

IPC: G01N21/25

CPC classification number: G01N21/6458 ,  G01N21/47 ,  G01N2201/0407 ,  G01N2201/1042 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/367

Abstract: A system and method for multimode imaging of at least one sample is disclosed. The system includes at least one light source; an optical system selected responsive to a mode of operation of the imaging system; and a detector capable of selective reading of pixels. The at least one sample is moved elative to the optical system using a sample movement technique selected from the group consisting of step sample moving and continuous sample moving. The method includes the steps of (1) selecting a mode of operation for the imaging system; (2) transmitting light from at least one light source through an optical system selected in response to the mode of operation for the imaging system; (3) moving the at least one sample relative to the optical system using a sample movement technique selected from the group consisting of step sample moving and continuous sample moving; and (4) selectively reading pixels with a detector.

Abstract translation: 公开了一种用于至少一个样品的多模成像的系统和方法。 该系统包括至少一个光源; 响应于成像系统的操作模式选择的光学系统; 以及能够选择性地读取像素的检测器。 使用选自步骤样品移动和连续样品移动的样品移动技术将至少一个样品移动到光学系统。 该方法包括以下步骤：（1）选择成像系统的操作模式; （2）从至少一个光源透射通过响应于成像系统的操作模式选择的光学系统的光; （3）使用选自步骤样品移动和连续样品移动的样本移动技术来移动所述至少一个样品相对于所述光学系统; 和（4）用检测器选择性地读取像素。