公开(公告)号：JPS5958751A

公开(公告)日：1984-04-04

申请号：JP8367383

申请日：1983-05-13

Applicant: Fumio Watanabe

Inventor： WATANABE FUMIO

IPC: G01L21/32 ,  H01J41/04

CPC classification number: H01J41/04

Abstract: PURPOSE:To enable a true ionic current caused due to pressure to be read by constituting an extractor-type ionization vacuum gage by installing an ion-collecting electrode below an ion-drawing hole and inserting an ionic-current controlling electrode between the ion-drawing hole and the ion-controlling electrode. CONSTITUTION:An ion-drawing hole 4 is provided in the center of the lower end of a bell-like ion-drawing electrode 3. An ion-collecting electrode 5 surrounded by an ion-reflecting electrode facilitating collection of ions, is installed below the ion-drawing electrode 3. A proper electric potential is produced by inserting a grid-like ionic-current controlling electrode 7, formed by the use of a meshy material or the like, between the electrodes 3 and 5 so as to read a true ionic current caused due to pressure. As a result, the factors of measurement limit can be completely removed by 100% modulation of ionic current, thereby pressures of 10 -10 Torr can be measured.

Abstract translation: 目的：通过在离子吸引孔下方设置离子收集电极，并将离子电流控制电极插入到离子吸附之间，使构成抽出式离子化真空计的压力能够产生真正的离子电流 孔和离子控制电极。 构成：在钟形离子引出电极3的下端的中央设置有离子引出孔4.由离子反射电极包围的离子收集电极5，其容易收集离子，被安装在 离子吸引电极3.通过在电极3和5之间插入通过使用网状材料形成的格栅状离子电流控制电极7，从而读出真正的离子电位而产生适当的电位 电流由于压力而造成。 因此，可以通过离子电流的100％调制来完全消除测量极限的因素，从而可以测量10 <-10> -15乇的压力。

公开(公告)号：JP5379684B2

公开(公告)日：2013-12-25

申请号：JP2009520742

申请日：2007-06-18

Applicant: ブルックス オートメーション インコーポレイテッド

Inventor： カーマイケル・ラリー・ケー ,  ボレンスタイン・マイケル・ディー ,  アーノルド・ポール・シー ,  ブラウチ・スティーブン・シー ,  ノット・リチャード・エー

IPC: H01J41/04

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

公开(公告)号：JP5127042B2

公开(公告)日：2013-01-23

申请号：JP2007528344

申请日：2006-05-08

Applicant: 株式会社アンペール

Inventor： 文夫 渡辺 ,  励起 渡辺

IPC: G01L21/32

CPC classification number: G01L21/32 ,  H01J41/04

公开(公告)号：JPS6120110B2

公开(公告)日：1986-05-20

申请号：JP8367383

申请日：1983-05-13

Applicant: Fumio Watanabe ,  Seikoo Denshi Kogyo Kk

Inventor： WATANABE FUMIO

IPC: G01L21/32 ,  H01J41/04

CPC classification number: H01J41/04

公开(公告)号：WO2016139894A1

公开(公告)日：2016-09-09

申请号：PCT/JP2016/000698

申请日：2016-02-10

Applicant: 株式会社アルバック

Inventor： 宮下　剛 ,  中島　豊昭 ,  福原　万沙洋

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: 　イオンコレクタ表面から放出される粒子の影響を少なくして測定誤差なく測定対象物の圧力を測定することができる三極管型電離真空計を提供する。　三極管型電離真空計ＩＧは、フィラメント２と、フィラメントの周囲に配置される筒状の輪郭を有するグリッド３と、グリッドの周囲に同心に配置される筒状のイオンコレクタ４とを備える。イオンコレクタの母線方向の長さＬ２をグリッドの母線方向の長さＬ１の６％～８０％の範囲に設定し、イオンコレクタの母線方向の両端部における粒子放出領域が省略されるように構成する。

Abstract translation: 提供一种三极管型离子化真空计，其中从离子收集器表面发射的颗粒的作用可以最小化，并且可以在没有测量误差的情况下测量测量对象的压力。 三极管式电离真空计IG具有灯丝2，布置在灯丝周边的圆柱形轮廓的栅格3和布置在栅格周边以与其同心的圆柱形离子收集器4 。 本发明的特征在于，将母线长度方向的离子集电体的长度L2设定为总线方向的电网长度L1的6％〜80％的范围， 省略了离子集电体的总线方向的两端。

公开(公告)号：WO2008010887A8

公开(公告)日：2008-03-27

申请号：PCT/US2007014130

申请日：2007-06-18

Applicant: BROOKS AUTOMATION INC ,  CARMICHAEL LARRY K ,  BORENSTEIN MICHAEL D ,  ARNOLD PAUL C ,  BLOUCH STEPHEN C ,  KNOTT RICHARD A

Inventor： CARMICHAEL LARRY K ,  BORENSTEIN MICHAEL D ,  ARNOLD PAUL C ,  BLOUCH STEPHEN C ,  KNOTT RICHARD A

IPC: H01J41/04

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和设备，以增加气体工艺环境中电离计的操作寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度，但是足以减少沉积在其表面上的材料的量或者被优化以减少在其之间的化学相互作用 工艺气体和至少一个备用阴极的材料。 备用阴极可以不断或定期加热。 在其他实施例中，在处理压力超过给定的压力阈值之后，多个阴极可以被加热到非发射温度，多个阴极可以被加热到更低的发射温度，或者发射阴极可以被加热到降低 电子发射电流。

公开(公告)号：WO2008010887A2

公开(公告)日：2008-01-24

申请号：PCT/US2007/014130

申请日：2007-06-18

Applicant: BROOKS AUTOMATION, INC. ,  CARMICHAEL, Larry, K. ,  BORENSTEIN, Michael, D. ,  ARNOLD, Paul, C. ,  BLOUCH, Stephen, C. ,  KNOTT, Richard, A.

Inventor： CARMICHAEL, Larry, K. ,  BORENSTEIN, Michael, D. ,  ARNOLD, Paul, C. ,  BLOUCH, Stephen, C. ,  KNOTT, Richard, A.

IPC: H01J41/04

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和设备，以增加气体处理环境中电离计的操作寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度，但是足以减少沉积在其表面上的材料的量或者被优化以减少在其之间的化学相互作用 工艺气体和至少一个备用阴极的材料。 备用阴极可以不断或定期加热。 在其他实施例中，在处理压力超过给定的压力阈值之后，多个阴极可以被加热到非发射温度，多个阴极可以被加热到更低的发射温度，或者发射阴极可以被加热到降低 电子发射电流。

公开(公告)号：WO2005091331A3

公开(公告)日：2006-09-28

申请号：PCT/US2005008003

申请日：2005-03-10

Applicant: BROOKS AUTOMATION INC ,  ARNOLD PAUL C ,  RUTT PAUL M

Inventor： ARNOLD PAUL C ,  RUTT PAUL M

IPC: G01L21/32 ,  H01J33/00 ,  H01J41/00 ,  H01J41/04

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。

公开(公告)号：WO2006094687A1

公开(公告)日：2006-09-14

申请号：PCT/EP2006/001864

申请日：2006-03-01

Applicant: INFICON GMBH ,  KNAPP, Wolfram ,  WÜEST, Martin

Inventor： KNAPP, Wolfram ,  WÜEST, Martin

IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J1/30 ,  H01J1/304 ,  H01J41/00 ,  H01J41/02 ,  H01J41/04 ,  H01J41/06 ,  H01J41/08 ,  H01J41/10 ,  H01J19/00 ,  H01J19/02 ,  H01J19/04 ,  H01J19/10

CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

Abstract: An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (V G ) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (I A ) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

Abstract translation: 电子发射阴极（6）由附着在由不锈钢构成的侧壁（2）上的导电发射极层（7）和门 发射极层（7）。 阴极（6）围绕包含圆柱形栅状阳极（5）的反应区域（3）和由直轴向丝线组成的中心离子收集器（4）。 通过电流计（11）测量反映在反应区域（3）中气体密度的离子集电极电流（11a），同时栅极电压（V SUB）保持在接地电压 的发射极层（7）和较高的阳极电压（V SUB），并且以使得阳极电流（I SUB）保持恒定的方式被调节。 发射极层（7）可以由碳纳米管，类金刚石，金属或金属或半导体材料的混合物组成，例如可以用碳化物或钼涂覆的硅。 然而，发射体表面也可以是通过例如化学蚀刻使侧壁的内表面的一部分变粗糙。 栅极（9）可以是栅格，或者它可以由分布在发射极区域上的覆盖隔离物的金属膜的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

公开(公告)号：KR1020170120692A

公开(公告)日：2017-10-31

申请号：KR1020177027508

申请日：2016-02-10

Applicant: 가부시키가이샤 알박

Inventor： 미야시타,타케시 ,  나카지마,토요아키 ,  후쿠하라,마사히로

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: 본발명은이온콜렉터표면에서방출되는입자의영향을줄여측정오차없이측정대상물의압력을측정할수 있는삼극관형전리진공계를제공한다. 삼극관형전리진공계(IG)는, 필라멘트(2); 필라멘트주위에배치되는통 모양의윤곽을갖는그리드(3); 그리드주위에동심으로배치되는통 모양의이온콜렉터(4);를구비한다. 이온콜렉터의모선방향의길이(L2)를그리드의모선방향의길이(L1)의 6%~80% 범위로설정하고, 이온콜렉터의모선방향의양단부에서의입자방출영역이생략되도록구성된다.

Abstract translation: 本发明提供了一种三极管型电离真空计，从而降低无测量误差被测定由离子收集器表面发射可以测量该物体的压力的颗粒的影响。 三极管型电离真空系统（IG）包括灯丝（2）; 网格（3）具有围绕细丝布置的管状轮廓; 并且围绕网格同心地布置管状离子收集器4。 离子收集器的总线方向的长度（L2）设定为6％的网格的总线方向的长度（L1）的〜80％，并且被构造为使得eseoui总线方向的离子收集器的端部是不粒子发射区。