公开(公告)号：KR1020010067381A

公开(公告)日：2001-07-12

申请号：KR1020000076972

申请日：2000-12-15

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 기타노다카히로 ,  모리카와마사테루 ,  에사키유키히코 ,  이시자카노부카즈 ,  고가노리히사 ,  다케시타가즈히로 ,  오쿠마히로후미 ,  아키모토마사미

IPC: H01L21/027

CPC classification number: H01L21/6715

Abstract: PURPOSE: A Film forming apparatus is provided to completely remove fine fouling adherent to the discharge opening of a coating liquid discharging nozzle even when the opening is minute. CONSTITUTION: A cleaning block is installed freely vertically movably in the moving range of the nozzle(85). A cleaning space is formed on the upper surface of the block. An opened ejection port for the coating liquid is formed in the inside surface of the space, and an opened suction port for sucking air around the discharge opening(94) of the nozzle(85) is formed in the bottom surface of the space. A projection part which comes into contact with the nozzle plate(95) of the nozzle(85) during cleaning is formed on the upper surface of the block. In cleaning, the lower surface of the nozzle(85) is brought into contact with the upper surface of the block.

Abstract translation: 目的：提供一种成膜装置，即使当开口很小时也能完全除去附着在涂液排出嘴的排出口上的细污垢。 构成：清洁块在喷嘴（85）的移动范围内可自由上下移动地安装。 在块的上表面上形成清洁空间。 在空间的内表面上形成用于涂布液体的打开的喷射口，并且在空间的底面形成有用于在喷嘴（85）的排出口（94）周围吸引空气的打开的吸入口。 在清洁过程中与喷嘴（85）的喷嘴板（95）接触的突起部分形成在块体的上表面上。 在清洁中，喷嘴（85）的下表面与块的上表面接触。