Abstract:
An apparatus for forming Strontium-Tantalum-Oxide films and a method thereof using an atomic layer deposition tool are provided. In the Strontium-Tantalum-Oxide films deposited by using plasma and the atomic layer deposition, its leakage-current is very low, and its dielectric constant has a range of 30 to 100 depending on the there heating conditions. Therefore, the method provides structures for i) an insulating film of an NDRO-type ferroelectric memory device that has a structure of Metal-film/Ferroelectric-film/Insulating-film/Silicon, ii) a gate oxide film substituting for silicon oxide film, and iii) an insulating film of Electro Luminescent Display (ELD) device.
Abstract:
PURPOSE: A ferroelectric field effect transistor is provided to improve a device characteristic by utilizing as a gate dielectric film a ferroelectric indicating an excellent ferroelectric characteristic of a low perceptivity and a high temperature. CONSTITUTION: A ferroelectric field effect transistor comprises a gate of a metal-ferroelectric-insulator-silicon structure on an active region of a semiconductor substrate(11). The metal-ferroelectric-insulator-silicon structure includes a gate oxidation film(20a), a ferroelectric thin film(20b) of Ba-Ti-Nb-O formed on the gate oxidation film, a metal gate electrode formed on the ferroelectric thin film and a protection film(22) formed on an entire surface of the gate.
Abstract:
PURPOSE: A ferroelectric transistor of MFIS(metal ferroelectrics insulator silicon) structure and method thereof are provided which can fabricate at high temperature processing by using Ba-Sr-Nb-O as a gate insulator. CONSTITUTION: The ferroelectric comprises (Bax, Sr1-x)Nb2O5, here x = 0.7 - 0.85. The ferroelectric has a dielectric constant of 60-180 and a residual polarization (Pr) of 20-30 micro C/cm¬2 after high temperature processing of 850°C more than. The method comprises the steps of preparing a starting solution by using Ba(C8H15O2)2, Sr(C8H15O2)2, and Nb(OC2H5)5 as source materials (303); spin-coating the starting solution on a substrate (304); and drying and annealing the coated starting solution (305-307).
Abstract translation:目的:提供一种可以通过使用Ba-Sr-Nb-O作为栅极绝缘体在高温处理中制造的MFIS(金属铁电绝缘体硅)的铁电晶体管结构及其方法。 构成:铁电体包含(Bax,Sr1-x)Nb2O5,这里x = 0.7-0.85。 在850℃以上的高温处理之后,铁电体的介电常数为60-180,残留极化(Pr)为20-30微克/厘米2。 该方法包括以Ba(C 8 H 15 O 2)2,Sr(C 8 H 15 O 2)2和Nb(OC 2 H 5)5为原料制备起始溶液的步骤。 将起始溶液旋涂在基底(304)上; 并对涂覆的起始溶液进行干燥和退火(305-307)。
Abstract:
PURPOSE: An electroluminescence device structure is provided to have a stable and big current even in a low acting voltage by accelerating injected electron into an electroluminescent layer. CONSTITUTION: The electroluminescence device is composed of: the first insulating layer formed on a silicon substrate; the first electrode(3) formed by metal film on the upper part of the first insulating layer; a ferroelectric layer(4) formed over the first electrode and working as an electron generator if feeding the pulse voltage of the positive voltage and the negative voltage that have a regular period, to the first electrode; and a second electrode(5) formed on the upper part of the ferroelectric layer having a regular interval.
Abstract:
PURPOSE: A device for the distribution processing of a software service and a method thereof are provided to flexibly determine a proper service server by obtaining state information of a service server and selecting the service server based on the state information. CONSTITUTION: Service servers(300) process a software service in an SaaS(Software as a Service) environment. A monitoring server(400) collects state information about the service servers. A distributed server(200) allocates a software service requested by a client terminal to one of the service servers based on the state information. The state information includes session durability, platform versions, service metadata cache states, and load states. [Reference numerals] (100) Client terminal; (200) Distribution server; (300) Service server; (400) Monitoring server