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公开(公告)号：JPH11317156A
公开(公告)日：1999-11-16
申请号：JP12139698
申请日：1998-04-30
Applicant: CANON KK
Inventor： MITOME MASANORI
IPC: H01J9/02
Abstract: PROBLEM TO BE SOLVED: To provide a surface conductive electron emitting element having an uniform and large electron emitting capacity by introducing two or more organic materials having different vapor pressures to vacuum atmosphere to apply a voltage to the element in activation process. SOLUTION: As the organic material, specifically, saturated hydrocarbon represented by Cn H2n+2 ; unsaturated hydrocarbon represented by a composition formula Cn H2n or the like such as ethylene; benzene; propionic acid and the like are usable. The criterion of selecting two or more organic materials depends on thematerial constituting the element or the structure of the element and, preferably, a material gaseous at ordinary temperature with high vapor pressure is combined with a material liquid at a room temperature with a low vapor pressure. By this treatment, carbon or carbon compounds are accumulated in and around the electrically insulated area between electrodes 2, 3, and the element current and discharge current are remarkably changed and increased to form an electron emitting part 5. The form, width, interval and peak of the pulse to be applied are properly set.
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52.发明专利
公开(公告)号：JPH103847A
公开(公告)日：1998-01-06
申请号：JP17287896
申请日：1996-06-13
Applicant: CANON KK
Inventor： MITOME MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide an electron emission element as an electron beam source capable of realizing a high-quality image forming device. SOLUTION: A gap 5 is formed in a conductive film 4 formed by laminating layers 4a and 4b made of different materials, carbon and/or a carbon compound is deposited in at least one part of the gap 5 and its neighborhood, and an electron emission part 6 is formed. Thus, the position and shape of the electron emission part 6 can be controlled precisely, uniformity of element characteristics is realized, and an element with high electron emission efficiency and durability is obtained.
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公开(公告)号：JPH08180804A
公开(公告)日：1996-07-12
申请号：JP33662594
申请日：1994-12-26
Applicant: CANON KK
Inventor： MITOME MASANORI , YAMAMOTO KEISUKE , YAMANOBE MASATO , HAMAMOTO YASUHIRO
Abstract: PURPOSE: To improve electron emitting properties and durability by carrying out activation treatment after an electron emitting part is formed by electrification to a conductive thin film which communicates element electrodes formed on a substrate with each other. CONSTITUTION: After materials for element electrodes are deposited on a sufficiently cleaned substrate 1, a pair of opposed element electrodes 4, 5 are formed by photolithographic method. After that, an organometal solution is applied to the resulting substrate, heated and baked to form a conductive thin film 3 which communicates the element electrodes 4, 5. Then, electricity is applied between the element electrodes 4, 5 to partly damage, deform or denature the thin film 3 to form an electron emitting part 2. Furthermore, the obtained substrate is activated by applying voltage under the atmosphere containing an organic compound while the voltage being increased from voltage lower than foaming voltage to voltage higher than the foaming voltage continuously or step by step at 0.1-1.0V/minute increasing ratio.
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公开(公告)号：JPH087749A
公开(公告)日：1996-01-12
申请号：JP13731794
申请日：1994-06-20
Applicant: CANON KK
Inventor： ONISHI TOSHIICHI , MITOME MASANORI
Abstract: PURPOSE:To manufacture electron emitting elements having excellent stability and a high efficiency quickly and easily by forming an electron emission part on a conductive film furnished between two opposing electrodes, and depositing carbon by the use of a carbonic compound having a specific vapor pressure. CONSTITUTION:By means of sputtering, etc., an electrode material is deposited on a base board 1, and element electrodes 2, 3 are formed using the photographic technique. Thereon a molten organic metal is applied followed by heating, baking, and etching or the like so that a conductive film 4 is formed between the two electrodes 2, 3 which are opposing. Then a reforming process is conducted, consisting of impressing a pulse voltage between the element electrodes 2, 3 and feeding current, and an electron emission part 5 whose structure has changed is formed on the conductive film 4. Then carbon or a carbonic compound is deposited on this film 4 as an activating process. The carbonic compound should have a vapor pressure of 5000hPa or less, more favorably between 2-5000hPa, in the temp. atmosphere specified for this process, and current is fed to between the electrodes so that activation is obtained.
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公开(公告)号：JPH07192611A
公开(公告)日：1995-07-28
申请号：JP34592793
申请日：1993-12-24
Applicant: CANON KK
Inventor： MITOME MASANORI , OKUDA MASAHIRO , ASAI AKIRA , MATSUTANI SHIGEKI , SUGIOKA HIDEYUKI
IPC: H01J9/02
Abstract: PURPOSE:To complete a forming process in a short time simultaneously relating to a plurality of elements, in a method whereby the forming process of the electron emitting element can be performed without directly applying voltage and allowing a current to directly flow in an element wire. CONSTITUTION:Electrodes 5, 6 and a conductive thin film 2 are formed on an insulating substrate 1, and by locally destructing and deforming or denaturing this conductive thin film, an electron emitting part is formed. An AC electric field and AC magnetic field or electromagnetic wave are applied as an external field to the conductive thin film 2 by an irradiating means 7, to locally destruct and deform or denature this conductive thin film.
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Patent Agency Ranking
公开(公告)号：JPH0765703A
公开(公告)日：1995-03-10
申请号：JP23596493
申请日：1993-08-30
Applicant: CANON KK
Inventor： OKUDA MASAHIRO , SUGIOKA HIDEYUKI , ASAI AKIRA , MITOME MASANORI , MATSUTANI SHIGEKI , OSADA YOSHIYUKI
Abstract: PURPOSE:To lessen the temperature rise of an element during electron emission and lessen the dispersion between the element of currents inside an insulating substrate, and improve the efficiency of electron emission by forming a groove in the insulating substrate at the crack part of a conductive film. CONSTITUTION:In the first place, after cleaning of an insulating substrate 1, element electrodes 2 and 3 of, for example, Ni are formed on the surface by vacuum evaporation and photolithography technology. Solution of organic compound, which has Pd, Ru, or the like for its main element, is applied on over the electrodes 2 and 3, and left as it is to form a film. This organic metallic film is heated and baked and is patterned by lift off, etching, or the like so as to form a thin film 4 for formation of an electron emission part. A current is applied between the electrodes 2 and 3 so as to form a crack part in the electron emission part 5. With the island structure of the thin film 4 as a mask, a groove 6 is formed in the substrate 1 in the emission part 5 by dry or wet etching process.
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公开(公告)号：JPH0765702A
公开(公告)日：1995-03-10
申请号：JP23596393
申请日：1993-08-30
Applicant: CANON KK
Inventor： OKUDA MASAHIRO , MITOME MASANORI , ASAI AKIRA , SUGIOKA HIDEYUKI , MATSUTANI SHIGEKI , OSADA YOSHIYUKI
Abstract: PURPOSE:To make the temperature rise during electron emission small and lessen the dispersion between elements and improve the efficiency of electron emission by constituting a conductive film out of two or more different kinds of stacked layers, and besides constituting a crack layer out of two or more kinds of substances. CONSTITUTION:The quartz surface of an insulating substrate 1 is cleaned and element electrodes 2 and 3 consisting of Ni are made. Next, a gold thin film 13 is made between the electrodes 2 and 3 by lift off method and vacuum evaporation method, and a crank part 14 is made by applying voltage with a pulse- shaped power source 7. Next, solution containing organic palladium is applied on the film 13, and is heat-treated so as to make a thin film 4 for formation of an electron emission part consisting of palladium monoxide fine particles. Lastly, the electrode emission part 5 is made in the crack part 14 by applying voltage between the electrodes 2 and 3 and heat-treating it. Hereby, materials different in work function are stacked on the electron emission part 5, and the dispersion of an electron current is suppressed, and the efficiency of electron emission can be raised.
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公开(公告)号：JPH11339639A
公开(公告)日：1999-12-10
申请号：JP12677499
申请日：1999-05-07
Applicant: CANON KK
Inventor： KAWADE ISAAKI , YAMAMOTO KEISUKE , HAMAMOTO YASUHIRO , YAMANOBE MASATO , MITOME MASANORI
IPC: H01J9/02
Abstract: PROBLEM TO BE SOLVED: To provide an electron source having a large number of electron emitting elements having a uniform and stable electron emitting characteristic. SOLUTION: This electron source has plural lines of electron emitting element lines for connecting in common plural electron emitting elements 74 having a conductive film having the electron emitting part on a base body 71. In a manufacturing method of this electron source, in forming the electron emitting part, pulse voltage of one to several pulses is impressed in order with respective electron emitting element lines so that this is repeated plural times.
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公开(公告)号：JPH11195374A
公开(公告)日：1999-07-21
申请号：JP26150898
申请日：1998-09-16
Applicant: CANON KK
Inventor： MITOME MASANORI , ODA HITOSHI , KISHI FUMIO , YAMANOBE MASATO
Abstract: PROBLEM TO BE SOLVED: To reduce the cost, and to improve characteristics by providing a process to accumulate deposits in an area containing at least an area being the electron emitting part, and accumulating the deposits in a state of having an average free process to put gas in a viscous flow state in a gas atmosphere containing at least a raw material of the deposits. SOLUTION: A conductive thin film 4 is formed by applying an organic metallic solution by forming element electrodes 2 and 3 by a photolithography technology after cleaning a base board 1. Activating processing is applied to a foaming finished element. An activating process repeatedly impresses pulse voltage on insert gas such as nitrogen or helium in an atmosphere of mixed gas containing gas of an organic substance. Introduction pressure of the mixed gas at this time is set not less than pressure of a degree that a mean free path λ of a gas molecule to constitute the mixed gas becomes sufficiently smaller than a reference dimension of the space inside having na electron emitting element. This is a viscous flow region, and is generally desirably used in a range from 100 Pa to near atmospheric pressure.
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公开(公告)号：JPH1040806A
公开(公告)日：1998-02-13
申请号：JP11264197
申请日：1997-04-30
Applicant: CANON KK
Inventor： MITOME MASANORI , AEBA TOSHIAKI , MATSUTANI SHIGEKI , OKUDA MASAHIRO , TAKADA KAZUHIRO , ASAI AKIRA
Abstract: PROBLEM TO BE SOLVED: To improve efficiency, defined to be a ratio of the current flowing through a surface conduction electron emission element to the current of electrons migrating to a pull-up electrode by controlling an electric field applied to electrons, emitted in advance into the outside (vacuum) of an element. SOLUTION: This device consists of an electron emission element having a conductive film containing an electron emission part, and an electrode for pulling up electrons. In this case, an electrically insulated long narrow region 6 is formed on the conductive films 4 and 5, so as to divide the conductive films 4 and 5 between a high and low electric potential section. The shape of the insulated region 6 is roughly periodical, as a combination of a part bent toward a high electric potential section with a part bent toward a low electric potential section. The part bent toward a high electric potential section in a period of the insulated region 6 includes the continuous electric emission part in a linearly continuos shape.
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