51.
    发明专利
    未知

    公开(公告)号:DE69315650T2

    公开(公告)日:1998-04-16

    申请号:DE69315650

    申请日:1993-09-23

    Abstract: A plurality of single-crystalline diamond plates (52) having principal surfaces consisting essentially of {100} planes are prepared. The plurality of single-crystalline diamond plates (52) are so arranged that the respective principal surfaces are substantially flush with each other. At this time, an angle formed by crystal orientations in relation to the principal surfaces between adjacent plates (52) is not more than 5 DEG , a clearance between the adjacent plates is not more than 30 mu m, and difference in height in relation to the principal surfaces is not more than 30 mu m between the adjacent plates. In order to fix such a state, it is possible to join the plurality of diamond plates with each other by depositing diamond on these plates. After such joining, the principal surfaces of the diamond plates are polished in order to eliminate steps. Then, diamond is epitaxially grown on a polished surface of a large diamond plate (53) which is formed by the plurality of diamond plates (52) from a vapor phase. In this vapor phase, proportions A, B and C obtained from the following equations I, II and III respectively satisfy the following conditions: 0.5 at 1332 cm in a Raman scattering spectrum.

    52.
    发明专利
    未知

    公开(公告)号:DE69223177T2

    公开(公告)日:1998-04-09

    申请号:DE69223177

    申请日:1992-06-05

    Abstract: A surface acoustic wave device having a diamond layer (2), a piezoelectric layer (3) and a comb-like electrode (4), in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, whose surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method. The substrate is then removed chemically to produce a highly stable device in an economical way.

    53.
    发明专利
    未知

    公开(公告)号:DE69404357D1

    公开(公告)日:1997-09-04

    申请号:DE69404357

    申请日:1994-04-05

    Abstract: An object of the present invention is to provide adhesion or bonding to a matrix in relation to a composite material which is reinforced with vapor-deposited diamond. In order to improve bondability to the matrix, hydrogen is removed from the surface of vapor-deposited diamond fiber. For the removal of hydrogen, the diamond is heated under an oxidative atmosphere at a temperature of about 150 DEG C to about 800 DEG C, or under a non-oxidative atmosphere at a temperature of about 800 DEG C to about 1500 DEG C. The surface of the vapor-deposited diamond containing not more than about 1 x 10 /cm of hydrogen atoms is bonded to the matrix of resin or a metal with sufficient strength. In order to improve bondability to the matrix (1), the surface of diamond (2) is coated with graphite, Al, Si or B, or a carbide or a nitride thereof (3). In order to reinforce bondability, diamond doped with B or N is employed as a reinforcing material. The matrix (1) is prepared from a metal, ceramics or resin.

    54.
    发明专利
    未知

    公开(公告)号:DE69125895D1

    公开(公告)日:1997-06-05

    申请号:DE69125895

    申请日:1991-08-13

    Abstract: An X-ray lithography mask comprising an X-ray transparent film (1) made from diamond, X-ray absorber patterns (4) deposited on the X-ray transparent film and diamond crosspieces (2) shaped on the diamond X-ray transparent film for reinforcing the diamond X-ray transparent film. Since both the transparent film (1) and the reinforcing crosspieces (2) are made from diamond, no thermal stress is induced by the change of temperature. The mask excels in transmittance for X-ray, flatness and strength.

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