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公开(公告)号:DE69315650T2
公开(公告)日:1998-04-16
申请号:DE69315650
申请日:1993-09-23
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: TSUNO TAKASHI , IMAI TAKAHIRO , FUJIMORI NAOJI
Abstract: A plurality of single-crystalline diamond plates (52) having principal surfaces consisting essentially of {100} planes are prepared. The plurality of single-crystalline diamond plates (52) are so arranged that the respective principal surfaces are substantially flush with each other. At this time, an angle formed by crystal orientations in relation to the principal surfaces between adjacent plates (52) is not more than 5 DEG , a clearance between the adjacent plates is not more than 30 mu m, and difference in height in relation to the principal surfaces is not more than 30 mu m between the adjacent plates. In order to fix such a state, it is possible to join the plurality of diamond plates with each other by depositing diamond on these plates. After such joining, the principal surfaces of the diamond plates are polished in order to eliminate steps. Then, diamond is epitaxially grown on a polished surface of a large diamond plate (53) which is formed by the plurality of diamond plates (52) from a vapor phase. In this vapor phase, proportions A, B and C obtained from the following equations I, II and III respectively satisfy the following conditions: 0.5 at 1332 cm in a Raman scattering spectrum.
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公开(公告)号:DE69223177T2
公开(公告)日:1998-04-09
申请号:DE69223177
申请日:1992-06-05
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , NAKAHATA HIDEAKI , HACHIGO AKIHIRO , FUJIMORI NAOJI
Abstract: A surface acoustic wave device having a diamond layer (2), a piezoelectric layer (3) and a comb-like electrode (4), in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, whose surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method. The substrate is then removed chemically to produce a highly stable device in an economical way.
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公开(公告)号:DE69404357D1
公开(公告)日:1997-09-04
申请号:DE69404357
申请日:1994-04-05
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: YAMAMOTO YOSHIYUKI , IMAI TAKAHIRO , TSUNO TAKASHI , FUJIMORI NAOJI
IPC: C04B35/584 , C04B35/628 , C04B35/80 , C08K9/02 , C22C26/00 , C23C16/00 , C23C16/01 , C23C16/26 , C23C16/27 , C23C16/56 , C22C1/09 , C22C29/00
Abstract: An object of the present invention is to provide adhesion or bonding to a matrix in relation to a composite material which is reinforced with vapor-deposited diamond. In order to improve bondability to the matrix, hydrogen is removed from the surface of vapor-deposited diamond fiber. For the removal of hydrogen, the diamond is heated under an oxidative atmosphere at a temperature of about 150 DEG C to about 800 DEG C, or under a non-oxidative atmosphere at a temperature of about 800 DEG C to about 1500 DEG C. The surface of the vapor-deposited diamond containing not more than about 1 x 10 /cm of hydrogen atoms is bonded to the matrix of resin or a metal with sufficient strength. In order to improve bondability to the matrix (1), the surface of diamond (2) is coated with graphite, Al, Si or B, or a carbide or a nitride thereof (3). In order to reinforce bondability, diamond doped with B or N is employed as a reinforcing material. The matrix (1) is prepared from a metal, ceramics or resin.
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公开(公告)号:DE69125895D1
公开(公告)日:1997-06-05
申请号:DE69125895
申请日:1991-08-13
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: IMAI TAKAHIRO , FUJIMORI NAOJI
IPC: G03F1/22 , H01L21/027 , G03F1/14
Abstract: An X-ray lithography mask comprising an X-ray transparent film (1) made from diamond, X-ray absorber patterns (4) deposited on the X-ray transparent film and diamond crosspieces (2) shaped on the diamond X-ray transparent film for reinforcing the diamond X-ray transparent film. Since both the transparent film (1) and the reinforcing crosspieces (2) are made from diamond, no thermal stress is induced by the change of temperature. The mask excels in transmittance for X-ray, flatness and strength.
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公开(公告)号:DE69301801T2
公开(公告)日:1996-08-01
申请号:DE69301801
申请日:1993-09-14
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: KAWARADA HIROSHI , IMAI TAKAHIRO , NISHIBAYASHI YOSHIKI , FUJIMORI NAOJI
IPC: H01S3/02 , H01S3/0959 , H01S3/16 , H01S5/30 , H01S3/091
Abstract: A solid state laser includes a diamond crystal as a medium of laser beam emission, which generates a laser beam having a wavelength of 225 to 300 nm through exciton light emission.
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公开(公告)号:SG30643G
公开(公告)日:1995-09-01
申请号:SG1995907085
申请日:1990-04-10
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: NAKAHATA HIDEAKI , IMAI TAKAHIRO , FUJIMORI NAOJI
IPC: H01L21/205 , C23C16/27 , H01C7/04 , H01L21/314 , H01L23/29 , H01L29/16
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公开(公告)号:DE68908729T2
公开(公告)日:1994-02-03
申请号:DE68908729
申请日:1989-02-01
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: TANABE KEIICHIRO , IMAI TAKAHIRO , FUJIMORI NAOJI
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公开(公告)号:CA2023933C
公开(公告)日:1993-11-09
申请号:CA2023933
申请日:1990-08-24
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: NAKAMURA TSUTOMU , TANAKA KATSUYUKI , NAKAI TETSUO , IMAI TAKAHIRO , IKEGAYA AKIHIKO , FUJIMORI NAOJI
IPC: C04B41/50 , C04B41/85 , H01L21/447 , C23C16/26 , H01L21/603
Abstract: TITLE OF THE INVENTION A bonding tool A bonding tool for TAB, used in the production of semiconductor chips, which is provided with, at the end thereof, a substrate consisting of a member selected from the group consisting of sintered compacts of Si or Si3N4 as a predominant component, sintered compacts of SiC as a predominant component, sintered compacts of AlN as a predominant component and composite compacts thereof, the substrate being coated with polycrystalline diamond deposited by gaseous phase synthesis method.
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公开(公告)号:ZA9106142B
公开(公告)日:1992-05-27
申请号:ZA9106142
申请日:1991-08-05
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: FUJIMORI NAOJI , NAOJI FUJIMORI , IKEGAYA AKIHIKO , AKIHIKO IKEGAYA , IMAI TAKAHIRO , TAKAHIRO IMAI , OTA NOBUHIRO , NOBUHIRO OTA , SHIBATA TAKAYUKI , TAKAYUKI SHIBATA
IPC: C30B29/04 , C30B20060101 , C30B
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公开(公告)号:DE3772671D1
公开(公告)日:1991-10-10
申请号:DE3772671
申请日:1987-08-11
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: FUJIMORI NAOJI , IMAI TAKAHIRO
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