公开(公告)号：WO2011113495A1

公开(公告)日：2011-09-22

申请号：PCT/EP2010/053646

申请日：2010-03-19

Applicant: EPCOS AG ,  MORTENSEN, Dennis ,  DAMSGAARD, Christian Danvad ,  HANSEN, Ole

Inventor： MORTENSEN, Dennis ,  DAMSGAARD, Christian Danvad ,  HANSEN, Ole

IPC: B81C1/00

CPC classification number: B81C1/00158 ,  B81B2201/016 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81C2201/036

Abstract: A MEMS device is disclosed comprising a micro-machined bulk body and fixed thereto a membrane comprising a coined metal foil.

Abstract translation: 公开了一种MEMS器件，其包括微加工体本体并将其固定在其上，所述膜包括金属箔。

公开(公告)号：WO2008106161A1

公开(公告)日：2008-09-04

申请号：PCT/US2008/002585

申请日：2008-02-27

Applicant: CORNING INCORPORATED ,  DANNOUX, Thierry L ,  MARQUES, Gaspar P ,  MORENA, Robert M ,  TANNER, Cameron W

Inventor： DANNOUX, Thierry L ,  MARQUES, Gaspar P ,  MORENA, Robert M ,  TANNER, Cameron W

IPC: C03B11/08

CPC classification number: C03B11/084 ,  B81B2201/051 ,  B81C99/0085 ,  B81C2201/019 ,  B81C2201/036 ,  C03B2215/07

Abstract: Methods for molding glass and glass composites, including providing a first structure having a first surface, providing a second structure having a second surface, the second surface being patterned and porous, and disposing between the first and second surfaces an amount of a composition comprising a glass, then heating together the first and second structures and the first amount of the composition sufficiently to soften the first amount of the composition such that the first and second structures, under gravity or an otherwise applied force, move toward each other, such that the pattern of the second surface is formed into the first amount of the composition, then cooling the composition sufficiently to stabilize it, the second structure comprising porous carbon having an open porosity of at least 5% and wherein the amount of the composition is removable from the second surface, without damage to the amount of the composition or to the second surface, such that the second surface is in condition for re-use.

Abstract translation: 用于模制玻璃和玻璃复合材料的方法，包括提供具有第一表面的第一结构，提供具有第二表面的第二结构，第二表面被图案化和多孔化，并且在第一表面和第二表面之间设置一定量的组合物， 玻璃，然后将第一和第二结构和第一量的组合物充分加热以软化第一量的组合物，使得第一和第二结构在重力或以其他方式施加的力下朝向彼此移动，使得 将第二表面的图案形成为第一量的组合物，然后充分冷却组合物以使其稳定，第二结构包含具有至少5％的开放孔隙率的多孔碳，并且其中组合物的量可从 第二表面，而不损害组合物的量或第二表面，使得第二表面是 在重新使用的条件下。

公开(公告)号：WO2003029803A1

公开(公告)日：2003-04-10

申请号：PCT/US2002/029179

申请日：2002-09-13

Applicant: CORNING INCORPORATED

Inventor： GUZMAN, Guillaume ,  THEMONT, Jean-Pierre

IPC: G01N27/26

CPC classification number: B81C1/00119 ,  B01L3/5027 ,  B33Y70/00 ,  B33Y80/00 ,  B81B2201/058 ,  B81B2203/0353 ,  B81C1/00071 ,  B81C2201/019 ,  B81C2201/036 ,  C03B19/063 ,  C03B23/20 ,  Y10T137/0391 ,  Y10T137/0402 ,  Y10T137/2224 ,  Y10T137/6416

Abstract: The present invention relates to microfluidic devices and to their method of manufacture. The microfluidic devices are original by their specific structure (of sandwich type) and by the materials from which they are made (mainly glasses, glass ceramics, ceramics), and also by their specific method of manufacture, which is based on a vacuum-forming operation. The microfluidic device includes a first assembly including a microstructure and a first substrate, wherein the microstructure is constructed and arranged on the substrate under vacuum. A second assembly includes a second substrate positioned on the microstructure after the first assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates.

Abstract translation: 本发明涉及微流体装置及其制造方法。 微流体装置通过它们的具体结构（夹心型）和它们制备的材料（主要是玻璃，玻璃陶瓷，陶瓷）以及它们的具体制造方法是原始的，其基于真空成形 操作。 微流体装置包括包括微观结构和第一基底的第一组件，其中微结构在真空下构造和布置在基底上。 第二组件包括位于微结构体上的第二衬底，该第一衬底经预热烧结并通过热处理粘附在微结构上，以形成限定第一和第二衬底之间的至少一个凹部的一体式微结构。

公开(公告)号：WO01004938A1

公开(公告)日：2001-01-18

申请号：PCT/SG1999/000074

申请日：1999-07-09

IPC: H05B33/10 ,  B81B7/00 ,  B81C1/00 ,  H01L27/32 ,  H01L33/26 ,  H01L33/42 ,  H01L51/50 ,  H01L51/52 ,  H05B33/02 ,  H05B33/26 ,  H01L21/027 ,  H01L21/308 ,  H01L21/311 ,  H01L21/321

CPC classification number: H01L51/0023 ,  B81B7/0006 ,  B81C2201/036 ,  H01L27/3281 ,  H01L51/5206 ,  H01L2251/105

Abstract: A method of fabricating a device comprising mechanically patterning a device layer using a stamp containing the desired pattern. The device layer is formed on a plastic or polymeric substrate. The stamp is pressed against the substrate under a load which patterns the device layer without cracking it in the non-patterned areas.

Abstract translation: 一种制造器件的方法，包括使用包含所需图案的印模对器件层进行机械图案化。 器件层形成在塑料或聚合物基底上。 在图案化装置层的负载下，将印模压在衬底上，而不会在未图案化区域中破裂。

公开(公告)号：US11905163B2

公开(公告)日：2024-02-20

申请号：US16753362

申请日：2019-04-03

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiaochen Ma ,  Guangcai Yuan ,  Ce Ning ,  Xin Gu ,  Xiao Zhang ,  Chao Li

IPC: B81B1/00 ,  B81C1/00 ,  B01L3/00

CPC classification number: B81B1/002 ,  B01L3/502715 ,  B81C1/00071 ,  B01L2300/0645 ,  B81B2201/05 ,  B81B2203/0338 ,  B81C2201/0111 ,  B81C2201/036

Abstract: A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided by the embodiments of the present disclosure. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; and a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, and the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, and an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate.

公开(公告)号：US09718674B2

公开(公告)日：2017-08-01

申请号：US14914015

申请日：2014-08-26

Applicant: SILEX MICROSYSTEMS AB

Inventor： Edvard Kalvesten ,  Thorbjorn Ebefors ,  Niklas Svedin

IPC: H01L23/08 ,  B81B7/00 ,  H01L21/50 ,  B81C1/00 ,  H01L23/00

CPC classification number: B81B7/007 ,  B81B2201/01 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81B2207/095 ,  B81C1/00301 ,  B81C2201/0153 ,  B81C2201/036 ,  B81C2203/0109 ,  B81C2203/0145 ,  H01L21/50 ,  H01L23/08 ,  H01L24/94 ,  H01L2924/16235

Abstract: A device includes a base substrate (700) with a micro component (702) attached thereto. Suitably it is provided with routing elements (704) for conducting signals to and from the component (702). It also includes spacer members (706) which also can act as conducting structures for routing signals vertically. There is a capping structure (708) of a glass material, provided above the base substrate (700), bonded via the spacer members (706), preferably by eutectic bonding, wherein the capping structure (708) includes vias (710) including metal for providing electrical connection through the capping structure. The vias can be made by a stamping/pressing method entailing pressing needles under heating to soften the glass and applying pressure, to a predetermined depth in the glass. However, other methods are possible, e-g- drilling, etching, blasting.

公开(公告)号：US09168680B2

公开(公告)日：2015-10-27

申请号：US13559640

申请日：2012-07-27

Applicant: Kwangyeol Lee

Inventor： Kwangyeol Lee

IPC: C23F1/00 ,  B29C33/38 ,  B81C1/00

CPC classification number: B29C33/3857 ,  B81C1/00031 ,  B81C2201/036

Abstract: One or more techniques for nano structure fabrication are provided. In an embodiment, an apparatus for manufacturing a nano structure is disclosed. The apparatus includes a stamp having a line pattern on a surface thereof that comprises a plurality of protrusions, a die configured to hold a substrate thereon, and a mechanical processing unit configured to press the plurality of protrusions of the stamp against the substrate with a predetermined pressure so as to form at least one channel pore therebetween.

Abstract translation: 提供一种或多种用于纳米结构制造的技术。 在一个实施例中，公开了一种用于制造纳米结构的装置。 该装置包括在其表面上具有线图案的印模，该印模包括多个凸起，模具，其构造成在其上保持基板;以及机械处理单元，其构造成以预定的方式将印模的多个突起压靠在基板上 以在其间形成至少一个通道孔。

公开(公告)号：US20100294741A1

公开(公告)日：2010-11-25

申请号：US12468300

申请日：2009-05-19

Applicant: Kwangyeol LEE

Inventor： Kwangyeol LEE

IPC: B44C1/22 ,  B29C59/02

CPC classification number: B29C33/3857 ,  B81C1/00031 ,  B81C2201/036

Abstract: Techniques for nano structure fabrication are provided.

Abstract translation: 提供了纳米结构制造技术。

公开(公告)号：US20090250130A1

公开(公告)日：2009-10-08

申请号：US12374180

申请日：2007-07-16

Applicant: Vincent Studer ,  Denis Bartolo ,  Guillaume Degre

Inventor： Vincent Studer ,  Denis Bartolo ,  Guillaume Degre

IPC: B81B7/00 ,  B29C35/08 ,  B32B9/04

CPC classification number: B81C1/00119 ,  B81B2201/058 ,  B81B2203/0323 ,  B81C2201/036 ,  B81C2203/032 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T137/0491 ,  Y10T137/2224 ,  Y10T137/598 ,  Y10T428/31504 ,  Y10T428/31663

Abstract: Method for producing a microfluidic device comprising a step in which a stamp made of elastomeric material is used for printing a photo-curable and/or heat-curable liquid disposed on a support.

Abstract translation: 用于制造微流体装置的方法包括以下步骤：由弹性体材料制成的印模用于印刷设置在载体上的可光固化和/或热固化液体。

公开(公告)号：US20080230951A1

公开(公告)日：2008-09-25

申请号：US12072754

申请日：2008-02-28

Applicant: Thierry Luc Alain Dannoux ,  Paulo Gaspar Jorge Marques ,  Robert Michael Morena ,  Cameron Wayne Tanner

Inventor： Thierry Luc Alain Dannoux ,  Paulo Gaspar Jorge Marques ,  Robert Michael Morena ,  Cameron Wayne Tanner

IPC: B28B11/08

CPC classification number: C03B23/203 ,  B81B2201/051 ,  B81C99/0085 ,  B81C2201/019 ,  B81C2201/036 ,  C03B2215/412

Abstract: Described herein are methods for making microfluidic devices comprising glass or glass-containing materials, wherein the methods have decreased cost and/or improved dimensional properties over similar formed glass articles produced using current techniques.

Abstract translation: 本文描述了用于制造包含玻璃或含玻璃材料的微流体装置的方法，其中相对于使用当前技术制备的相似的成形玻璃制品，所述方法具有降低的成本和/或改善的尺寸性能。