막질 간 인터믹싱을 제어하는 DPT 공정을 이용한 반도체 소자의 제조방법 및 그 방법에 의해 제조된 반도체 소자
    61.
    发明公开
    막질 간 인터믹싱을 제어하는 DPT 공정을 이용한 반도체 소자의 제조방법 및 그 방법에 의해 제조된 반도체 소자 审中-实审
    使用DPT工艺制造半导体器件的方法,其控制由其制造的薄膜和半导体器件之间的混合

    公开(公告)号:KR1020120061209A

    公开(公告)日:2012-06-13

    申请号:KR1020100122407

    申请日:2010-12-03

    Inventor: 김경미 정진하

    Abstract: PURPOSE: A method for manufacturing a semiconductor device using a DPT(Double Pattern Technology) process and the semiconductor device manufactured by the same are provided to improve productivity by efficiently controlling a critical dimension of a line width of a pattern by minimizing intermixing between a photoresist pattern and an oxide film. CONSTITUTION: A silicon oxide layer(20) is formed on a semiconductor substrate(10). A polysilicon layer(30) is formed on the silicon oxide layer. An ARC(Anti-Reflective Coating) layer(40) is formed on the polysilicon layer. A photoresist pattern(50) is formed on the ARC layer. An oxide coating layer(60) is formed on the ARC layer to cover the photoresist pattern.

    Abstract translation: 目的:提供一种使用DPT(双图案技术)工艺制造半导体器件的方法及其制造的半导体器件,以通过使光刻胶之间的混合最小化来有效地控制图案的线宽的临界尺寸来提高生产率 图案和氧化膜。 构成:在半导体衬底(10)上形成氧化硅层(20)。 在氧化硅层上形成多晶硅层(30)。 在多晶硅层上形成有ARC(防反射涂层)层(40)。 在ARC层上形成光致抗蚀剂图案(50)。 在ARC层上形成氧化物覆盖层(60)以覆盖光致抗蚀剂图案。

    반도체 소자의 제조 방법
    62.
    发明公开
    반도체 소자의 제조 방법 无效
    制造半导体器件的方法

    公开(公告)号:KR1020110095799A

    公开(公告)日:2011-08-25

    申请号:KR1020100096497

    申请日:2010-10-04

    Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to improve the reliability of a semiconductor device by stably burying an opening unit with semiconductor solutions using a spin-on method. CONSTITUTION: First material layers(110L,110,110U) and second material layers are alternatively laminated on a substrate(100). An opening unit pass through the first material layers and the second material layers. A semiconductor solution(132) is formed in the opening unit using a spin-on method. The semiconductor solutions are thermally processed. A solid semiconductor layer is crystallized. The opening unit exposes the upper side of the substrate.

    Abstract translation: 目的:提供一种用于制造半导体器件的方法,以通过使用旋转方法通过半导体解决方案稳定地埋入开口单元来提高半导体器件的可靠性。 构成:第一材料层(110L,110,110U)和第二材料层交替层压在基底(100)上。 开口单元穿过第一材料层和第二材料层。 使用旋涂法在开口单元中形成半导体溶液(132)。 半导体解决方案被热处理。 固体半导体层结晶。 打开单元暴露衬底的上侧。

    연수기 및 이를 갖춘 세탁기
    63.
    发明公开
    연수기 및 이를 갖춘 세탁기 无效
    水洗衣机和洗衣机

    公开(公告)号:KR1020080107209A

    公开(公告)日:2008-12-10

    申请号:KR1020070055242

    申请日:2007-06-05

    CPC classification number: C02F1/001 C02F1/42 C02F5/00 C02F2307/12

    Abstract: A water softener is provided not to inject a NaCl solution for regenerating an ion-exchange resin and to supply continuously soft water. A water softener without injecting a NaCl solution in an ion exchanger contains ion exchangers(21A, 21B) including an ion-exchange resin. The ion exchanger contains a first ion exchanger and a second ion exchange unit for softening water and regenerating the ion-exchange resin by turns. Additionally, the water softener contains an acidity water forming unit(22) for supplying acidity water selectively to one of the first ion exchanger and the second ion exchange unit by generating the acidity water in which large amount of cation is included.

    Abstract translation: 提供一种软水器不注入用于再生离子交换树脂的NaCl溶液并且连续供给软水。 在离子交换器中不注入NaCl溶液的软水剂含有离子交换树脂的离子交换体(21A,21B)。 离子交换器包含第一离子交换器和第二离子交换单元,用于软化水并轮流再生离子交换树脂。 此外,软水剂含有酸性水形成单元(22),用于通过产生包含大量阳离子的酸性水,向第一离子交换器和第二离子交换单元之一选择性地供给酸性水。

    연수장치
    64.
    发明公开
    연수장치 有权
    水软装置

    公开(公告)号:KR1020080102588A

    公开(公告)日:2008-11-26

    申请号:KR1020070049217

    申请日:2007-05-21

    CPC classification number: C02F5/02 B01D35/00 C02F1/28 C02F1/42

    Abstract: A water softener for increasing processing amount is provided to prevent environmental contamination by the Na+ ion, and soften water of the large amount, by including a chamber with a water path. A chamber where the flow channel in which a water path is formed(10). An ion exchange part(10a) in which the ion-exchange resin the chamber is adopted. A negative ion absorbing part(10b) installed to be segmented in one side of the ion exchange part, absorbs the material of the anion state from the ion exchange process part. A positive ion absorbing part(10c) installed in the other side of the ion exchange process part to be segmented with the ion exchange process part, absorbs the material of the positive ion condition from the ion exchange process part. The negative ion absorbing part includes the first base electrode. The first base electrode is arranged to be located with the first net electrode and the material of the negative ion state is flowed in into the negative ion absorbing body when the plus electricity source is applied.

    Abstract translation: 提供一种用于增加处理量的软水器,以通过包括具有水路的室来防止Na +离子的环境污染和软化大量的水。 其中形成水路的流动通道的腔室(10)。 其中采用离子交换树脂的离子交换部分(10a)。 安装成在离子交换部分的一侧被分段的负离子吸收部分(10b)从离子交换处理部分吸收阴离子状态的材料。 安装在离子交换处理部分的另一侧的正离子吸收部分(10c)将被离子交换处理部分分离,从离子交换处理部分吸收正离子条件的材料。 负离子吸收部包括第一基极。 当施加正电源时,第一基极布置成与第一网状电极定位并且负离子状态的材料流入负离子吸收体。

    연수기
    65.
    发明公开
    연수기 无效
    水肥皂

    公开(公告)号:KR1020080102079A

    公开(公告)日:2008-11-24

    申请号:KR1020070048421

    申请日:2007-05-18

    Abstract: A water softener is provided to apply a magnetic field in an orthogonal direction of an electrode unit to which a positive ion is applied and an electrode unit to which a negative ion is applied in order to improve the speed of ion to the electrode unit, thereby relatively increasing liquid capacity which can be processed within unit time. Hard water is flowed into a chamber(10) and softened hard water is discharged. A plurality of electrode units(20) is stacked in the chamber. Positive and negative voltages are alternately applied to the electrode unit. A magnetic member(30) applies a magnetic field to the hard water flowed into the chamber. The magnetic member is among a plurality of electrode units.

    Abstract translation: 为了提高与电极单元的离子速度,提供了一种软水器,用以在施加正离子的电极单元的正交方向和施加负离子的电极单元上施加磁场,由此 相对增加的液体容量可以在单位时间内进行处理。 硬水流入室(10),软化硬水排出。 多个电极单元(20)堆叠在腔室中。 正电压和负电压交替施加到电极单元。 磁性构件(30)对流入腔室的硬水施加磁场。 磁性部件是多个电极单元。

    냉장고
    66.
    发明公开
    냉장고 无效
    冰箱

    公开(公告)号:KR1020080088943A

    公开(公告)日:2008-10-06

    申请号:KR1020070031855

    申请日:2007-03-30

    Abstract: A refrigerator is provided to prevent freezing of a beverage in a supercooling container and to lower a supercooling temperature by transmitting vibration to supercooled water, which is thermodynamically unstable, using a solenoid cell. A refrigerator comprises a body, a supercooling chamber, plural supercooling containers(30), and a solenoid cell. The supercooling chamber is installed in the body to supercool a beverage. The supercooling containers are formed in the supercooling chamber and store the beverage. The solenoid cell transmits vibration to the supercooling containers and has a coil(32) and a power unit(35). The coil is wound in a wall of the supercooling container. The power unit supplies power to the coil.

    Abstract translation: 提供了一种用于防止过冷却容器中的饮料冻结并且通过使用螺线管电池将振动传递到热力学不稳定的过冷却水来降低过冷却温度的冰箱。 冰箱包括主体,过冷室,多个过冷容器(30)和螺线管单元。 过冷室安装在主体中以使饮料过冷。 过冷却容器形成在过冷室中并储存饮料。 螺线管单元将振动传递到过冷容器并具有线圈(32)和动力单元(35)。 线圈缠绕在过冷容器的壁上。 电源单元为线圈供电。

    식기세척기
    67.
    发明授权
    식기세척기 有权
    洗碗机

    公开(公告)号:KR100854998B1

    公开(公告)日:2008-08-28

    申请号:KR1020070030568

    申请日:2007-03-28

    CPC classification number: A47L15/507 A47L19/04

    Abstract: A dishwasher is provided to move a lower basket upward, using a lifting device having a plurality of links, for taking out dishes which are kept on the lower basket easily. A dishwasher comprises a body, upper and lower baskets(13U,13L), and a lifting device(30). A cleaning tank(11) is arranged in the body. The upper and lower baskets are moved to upper and lower sides of the cleaning tank. The lifting device moves the lower basket upward. The lifting device includes a plurality of links, and stoppers(22). The stoppers are received and projected in/from sides of the cleaning tank to fix the lower basket which is rotated by the links at the upper position. The lifting device includes first four links(31) rotated at front and rear sides in the cleaning tank, a pair of second links(32), and third links(33) hinged with the first links. Supporting projections(13b) are installed at the lower basket. A pair of projections are formed at upper surfaces of the second links to mount the supporting projections. A plurality of wheels(13a) are installed at two sides of the front and two sides of the rear of the lower basket.

    Abstract translation: 提供洗碗机以使用具有多个连杆的提升装置向上移动下部篮子,以便容易地取出保存在下部篮子上的菜肴。 洗碗机包括主体,上下篮(13U,13L)和提升装置(30)。 清洁箱(11)布置在主体内。 上下篮子移动到清洗槽的上侧和下侧。 提升装置将下部篮子向上移动。 提升装置包括多个连杆和止动件(22)。 止动件被接收并突出在清洁槽的两侧或侧面,以将通过链节旋转的下筐固定在上部位置。 提升装置包括在清洗槽的前侧和后侧旋转的第一四个连杆(31),一对第二连杆(32)和与第一连杆铰接的第三连杆(33)。 支撑突起(13b)安装在下篮。 一对突起形成在第二连杆的上表面以安装支撑突起。 多个轮(13a)安装在下篮的后部的前侧和两侧的两侧。

    로봇청소기와 도킹스테이션을 구비한 로봇청소기시스템
    68.
    发明公开
    로봇청소기와 도킹스테이션을 구비한 로봇청소기시스템 无效
    机器清洁机系统,机器清洁器和锁止站

    公开(公告)号:KR1020070099763A

    公开(公告)日:2007-10-10

    申请号:KR1020060030923

    申请日:2006-04-05

    CPC classification number: A47L9/106 A47L9/0063 A47L9/2873 A47L2201/024

    Abstract: A robot cleaner system having a robot cleaner and a docking station is provided to prevent dust flowing into the docking station from the robot cleaner from leaking by forming a protrusion, communicating a dust outlet of the robot cleaner with a dust inlet of the docking station, on the robot cleaner. In a robot cleaner system having a robot cleaner(100) and a docking station(200), the robot cleaner includes a robot body(110) having a dust outlet(114) and the docking station includes a dust inlet(211) and a dust path(240). The dust inlet of the docking station sucks dust stored in the robot cleaner. The dust path of the docking station guides dust sucked through the dust inlet to a dust collecting unit. The robot cleaner is provided with a protrusion(150) protruded from the robot body outwardly so that the protrusion is inserted into the dust inlet of the docking station when the robot cleaner docks with the docking station. The dust outlet and the dust path are communicated with each other by the protrusion.

    Abstract translation: 提供了一种具有机器人清洁器和对接站的机器人清洁器系统,用于防止通过形成突起而使来自机器人清洁器的对接站中的灰尘泄漏,从而使机器人清洁器的灰尘出口与对接站的灰尘入口相通, 在机器人清洁剂上。 在具有机器人清洁器(100)和对接站(200)的机器人清洁器系统中,所述机器人清洁器包括具有灰尘出口(114)的机器人主体(110),并且所述对接站包括灰尘入口(211)和 灰尘路径(240)。 对接站的吸尘器吸入存储在机器人清洁器中的灰尘。 对接站的灰尘路径将通过灰尘入口吸入的灰尘引导到集尘单元。 机器人清洁器设置有从机器人主体向外突出的突起(150),使得当机器人清洁器与对接站对接时,突起被插入对接站的灰尘入口中。 灰尘出口和灰尘通过突起彼此连通。

    가스 공급 장치
    69.
    发明授权

    公开(公告)号:KR101894915B1

    公开(公告)日:2018-09-05

    申请号:KR1020120026670

    申请日:2012-03-15

    Abstract: 외부에서발생한가스로인하여불필요하게가스공급이차단되어, 반도체공정설비에가스공급이중단되는것을방지하기위해, 유해가스가가스공급장치내부로유입되는것을방지할수 있는가스공급장치를제공하는것이다. 상기가스공급장치는캐비닛, 상기캐비닛의내부에설치되고, 공정가스의흐름을조절할수 있는조절장치, 상기캐비닛의내부에설치되고, 상기공정가스의누출여부를감지할수 있는센서, 상기캐비닛의적어도일면에형성되어, 외부공기가인입되는통기구, 및상기통기부와접촉하여설치되고, 상기외부공기의유해가스성분을필터링하는처리필터를포함한다.

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