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公开(公告)号:DE3817012A1
公开(公告)日:1989-11-30
申请号:DE3817012
申请日:1988-05-19
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , BINDER HORST
IPC: G03F7/023 , C08F8/00 , C08F12/22 , C08G8/28 , C08G8/36 , C08K5/372 , C08L25/18 , C08L61/08 , C09D125/18 , C09D161/08 , G03F7/004 , G03F7/038 , G03F7/039 , G03F7/38 , H01L21/027
Abstract: The invention relates to positive-and negative-working radiation-sensitive mixtures and to processes for the formation of relief patterns. The radiation-sensitive mixtures contain a polymeric binder and an organic compound whose solubility in an aqueous-alkaline developer is increased by the action of acid and which contains at least one grouping cleavable by acid, and one additional grouping which forms a strong acid under the action of radiation, the polymeric binders used being reaction products of polymers containing phenolic hydroxyl groups with dihydropyran or alkyl vinyl ethers. These radiation-sensitive mixtures are particularly suitable for the formation of relief patterns.
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公开(公告)号:DE3702035A1
公开(公告)日:1988-08-04
申请号:DE3702035
申请日:1987-01-24
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , BINDER HORST
IPC: G03C1/72 , C08F20/34 , C08F30/08 , C08F220/26 , C08F220/36 , C08F222/22 , C08F230/08 , G03F7/004 , G03F7/039 , G03F7/095 , G03F7/11 , H01L21/027 , H01L21/30 , C08F220/04 , C08F222/02
Abstract: Copolymers useful in particular for producing two-layer resists and fabricating semiconductor devices contain from 5 to 50 mol % of monomers having o-nitrocarbinol ester groups, from 95 to 50 mol % of an olefinically unsaturated silicon-containing organic compound, from 0 to 20 mol % of an olefinically unsaturated carboxylic acid and from 0 to 25 mol % of other copolymerizable monomers.
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公开(公告)号:AT360656T
公开(公告)日:2007-05-15
申请号:AT03002773
申请日:2003-02-07
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , HEISCHKEL YVONNE DR , WEISS HORST DR
Abstract: Polymers with fluoranthene-based repeat units are new. Polymers containing repeat units of formula (I) are new. a = 0-3; R1-R3 = H, 1-20C alkyl, (optionally with one or more Si, N, P, O or S atoms), 6-30C (preferably 6-14C) aryl, 4-14C heteroaryl with at least one S or N atom, -N(6-14C aryl)2 or the group Y1; Y1 = vinyl, (E)- or (Z)-phenylethenyl, (meth)acryloyl, methyl styryl, vinyloxy, glycidyl, phenylethynyl or the group -Phe-O-Y2; Phe = 1,4-phenylene; Y2 = vinyl, (E)- or (Z)-phenyl-ethenyl, (meth)acryloyl, methyl styryl, vinyloxy or glycidyl, optionally with one or more groups Y1 or Y2 crosslinked together. Independent claims are also included for: (1) a method (M1) for the production of (I) from monomers of formula (II) by reaction in the presence of nickel or palladium compounds (2) monomers of formula (II) with a halogen or esterified sulfonate group on ring C (preferably at position 8 of the fluoranthene system) and a boron-containing group (c) (see below) on ring B (preferably at position 3) (i.e. monomers III) (3) a method for the preparation of (III) from the corresponding compounds with halogen or sulfonate groups, by metalation with at least 2 or at least 4 equivalents of a strong organometallic base followed by reaction with 1 or 2 equivs. of boron compounds of formula (V) (4) a method (M2) for the production of (I) by the photochemical or thermal polymerisation of monomers of formula (II) with no X1 or X2 groups (i.e. monomers VI) (5) films containing or consisting of (I) (6) organic electro luminescent diodes based on (I). X1, X2 = (a) halogen, (b) esterified sulfonate, or (c) boron-containing groups of formula -B(O-(C(R6)2)n)-O-), using either one monomer of formula (II) in which X1 is a group (a) or (b) and X2 is (c), or at least two different monomers (II), one of which has two (a) and two (b) groups, or one of each, and the other monomer has two groups (c), with (a + b) and (c) in a mol ratio of (0.8:1)-(1.2:1) ; R6 = H or 1-20C alkyl; n = 2-10; X5 = 1-6C alkoxy.
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公开(公告)号:DE59209708D1
公开(公告)日:1999-07-15
申请号:DE59209708
申请日:1992-10-24
Applicant: BASF AG
Inventor: BINDER HORST , SCHWALM REINHOLD DR , FUNHOFF DIRK DR
IPC: G03F7/004 , G03F7/039 , H01L21/027
Abstract: The invention relates to a positive UV-radiation sensitive composition comprising (a1) an organic binder containing acid-labile ether, ester or carbonate groups, or (a2) a water-insoluble polymeric binder soluble in aqueous alkaline solutions and (a2.1) an organic compound whose solubility in an aqueous alkaline developer is increased by the influence of acid, or (a2.2) an organic compound whose solubility in an aqueous alkaline developer is increased by the influence of acid and which contains at least one group cleavable by acid and additionally a group which forms an acid under the influence of radiation, or a mixture of the organic compounds (a2.1) and (a2.2) and b) an arylsulphonic acid ester. This radiation-sensitive composition is suitable for forming relief patterns.
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公开(公告)号:DE19826716A1
公开(公告)日:1999-01-21
申请号:DE19826716
申请日:1998-06-16
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , REICH WOLFGANG DR , PAULUS WOLFGANG DR , WEISER JUERGEN DR , LOKAI MATTHIAS , BAER STEFAN
IPC: C09D4/06 , C09D179/02 , B05D7/26 , B05D3/06 , C09D4/00 , C09D133/04 , C09D139/02
Abstract: Preparation of coatings comprises: (a) applying a polymeric amino compound(s), with at least 30 wt.% units of formula -H2C-CH-R -NH- (I), -H2C-C(H)-N(R )-C(=O)-R (II) or their hydrolysis products or -H2C-CH(NH2)- (III) to a substrate; (b) coating with radically or cationically polymerisable materials; and (c) curing using light or electron radiation. The obtained coatings are also claimed per se.
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公开(公告)号:DE19614635A1
公开(公告)日:1997-10-16
申请号:DE19614635
申请日:1996-04-13
Applicant: BASF AG
Inventor: REICH WOLFGANG DR , SCHWALM REINHOLD DR , HAEUSLING LUKAS DR , NUYKEN OSKAR PROF DR , RAETHER ROMAN-BENEDIKT
IPC: G03F7/039 , C08G65/06 , C08G65/16 , C08G65/22 , C09D5/25 , G03C9/08 , G03F7/004 , G03F7/027 , C09D171/00 , C09D5/28 , C08L101/12 , C08J5/00 , H01L23/29
Abstract: Polymers obtainable by the polymerisation or copolymerisation of 2,7-dioxabicyclo[3,2,1]octane derivatives of the formula (I), in which X, X', Y, Y', Z and Z' are mutually independently a C1-C2 hydrocarbon radical or an H atom.
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公开(公告)号:DE19539294A1
公开(公告)日:1997-04-24
申请号:DE19539294
申请日:1995-10-23
Applicant: BASF AG
Inventor: REICH WOLFGANG DR , SCHWALM REINHOLD DR , BECK ERICH DR , HAEUSLING LUKAS DR , NUYKEN OSKAR PROF DR , RAETHER ROMAN-BENEDIKT
IPC: C08F2/48 , C08F34/02 , C08G59/24 , C08G65/14 , C08G65/16 , C09D163/00 , C09D4/00 , C09D145/00
Abstract: A process for the production of coatings or moulded products by radiation curing, in which radiation-curable materials (I) containing 1-100 wt% compounds (A) with at least one cationically polymerisable 2,3-dihydrofuran (DHF) base unit (based on the total amt. of cationically and optionally radically polymerisable compounds) are irradiated with high-energy light. Also claimed are (i) radiation-curable materials (I), and (ii) compounds with 2 or more DHF units.
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公开(公告)号:DE19535161A1
公开(公告)日:1997-03-27
申请号:DE19535161
申请日:1995-09-22
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , REICH WOLFGANG DR , HAEUSLING LUKAS DR , BECK ERICH DR
IPC: C08F2/48 , C08F2/44 , C08F2/46 , C08F2/50 , C08F8/30 , C08F8/32 , C08F20/10 , C08F290/06 , C08G73/00 , C09D4/00 , C09D4/02 , C08J3/24 , C08J3/28 , C08L67/07 , C08L63/10 , C08L75/16 , C09D167/07 , C09D163/10 , C09D175/16
Abstract: Radiation-curable compsns. (I), contg. (a) radiation-curable, radically-polymerisable cpds. and (b) capped amino cpds. which are surface-active in cpds. (a) and which release amino cpds. with free prim. and/or sec. amino gps. when irradiated with high-energy light, the total no. of H atoms contained in amino gps. being at least 2. Also claimed is (i) a process for the prodn. of (I) by adding cpds. (b) to cpds. (a); (ii) a process for the prodn. of coatings or mouldings by irradiating (I) with high-energy light; (iii) moulded prods. or coatings obtd. by this process.
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公开(公告)号:DE19520888A1
公开(公告)日:1996-12-12
申请号:DE19520888
申请日:1995-06-08
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR , REICH WOLFGANG DR , HAEUSLING LUKAS DR , BECK ERICH DR
IPC: C09D179/00 , C08F2/48 , C08F299/02 , C08G73/00 , C09D4/00 , C09D4/02 , C08F20/34 , C08F20/20 , C09D133/14 , C08L33/14
Abstract: Radiation-curable compsns. (I), contg. (a) cpds. with at least 2 C=C double bonds which can undergo Michael addn. reactions with prim. or sec. amino gps. ("activated double bonds"), and (b) capped amino cpds. which form free prim. and/or sec. amino gps. on irradiation with high-energy light, the total no. of amino-H atoms being at least 2. Also claimed are moulded prods. or coatings obtd. from (I). Pref. the activated double bonds are in gps. of formula >C=C(Z)-, in which Z = -CHO, -CO-C
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公开(公告)号:DE59010186D1
公开(公告)日:1996-04-18
申请号:DE59010186
申请日:1990-04-24
Applicant: BASF AG
Inventor: SCHWALM REINHOLD DR
IPC: C08G64/00 , C08G75/00 , C08G77/00 , G03F7/004 , G03F7/039 , G03F7/075 , H01L21/027 , H01L21/30 , H01L21/312 , H01L21/47
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