APPARATUS FOR CLEANING DIE FOR COATING, METHOD FOR COATING USING THE SAME, AND APPARATUS OF AND METHOD FOR PREPARING COLOR FILTER

    公开(公告)号:JPH11300261A

    公开(公告)日:1999-11-02

    申请号:JP11240098

    申请日:1998-04-22

    Abstract: PROBLEM TO BE SOLVED: To always hold a cleaning tool under clean condition and to prevent longitudinal lines, etc., from being generated by providing a cleaning tool for removing a coating liq. stuck on the outlet of a die for coating accompanied by movement and providing a washing means for washing this cleaning tool. SOLUTION: In a die coater, when a coating liq. is applied, a base is held on a table by vacuum suction and the coating liq. is fed to a die 1 by means of a liq. feeding device such as a pump. A die cleaning apparatus equipped on the die coater like this is constituted of a cleaning unit 100 which brings a cleaning tool 110 fitted on the apex part into slide-contact with the surroundings of an outlet 2 of the die 1 to scrape excess coating liq., a liq. discharging unit 200 for discharging and recovering unnecessary liq. and a washing unit 300 for washing the cleaning tool 110 with a solvent. In addition, the washing unit 300 always holds the cleaning tool 110 clean by spraying the solvent from a solvent tank 331 to the cleaning tool 110 from a nozzle 320 through a pipe 320.

    METHOD AND APPARATUS FOR APPLYING COATING LIQUID ON UNEVEN SUBSTRATE, METHOD AND APPARATUS FOR PRODUCING PLASMA DISPLAY

    公开(公告)号:JPH11239751A

    公开(公告)日:1999-09-07

    申请号:JP6044698

    申请日:1998-02-25

    Abstract: PROBLEM TO BE SOLVED: To apply a coating liquid precisely in the extension direction of the recessed part of a substrate by detecting the stripe direction of the uneven substrate and the position of the discharge hole of a coating liquid discharge device and positioning the position of the opening part of the coating liquid discharge device in the recessed part of the substrate in pursuit of the relative position of the discharge hole to the recessed part of the substrate. SOLUTION: A table 6 and a nozzle 20 in which numbers of discharge holes 44 are formed in the lower part are to a prescribed position on a Y-axis coordinate, the hole 44 in the terminal part of the nozzle 20 is brought just above a camera. Next, after a position change quantity from a camera standard position by imaging treatment, each actuation part in an applicator is restored to an original point, and the table 6 and nozzle 20 are moved to respective standard positions of X-Z axes. After that, a lift pin is brought down, after an uneven substrate 4 being positioned on the upper surface of the table 6, mounted, and fixed, the table 6 is moved with a camera 72 until the application start part (recessed part) of the substrate reaches a position just under a height sensor 40, and a coating liquid is applied in the extension direction of the recessed part of the substrate.

    METHOD AND APPARATUS FOR APPLYING COATING LIQUID ON UNEVEN SUBSTRATE, METHOD AND APPARATUS FOR PRODUCING PLASMA DISPLAY

    公开(公告)号:JPH11239750A

    公开(公告)日:1999-09-07

    申请号:JP6045098

    申请日:1998-02-25

    Abstract: PROBLEM TO BE SOLVED: To enable constantly uniform application by keeping the discharge of a coating liquid from a coating liquid discharge device constant when the coating liquid is applied on the recessed part of an uneven substrate by installing an intermittent actuation type pump which can discharge the coating liquid accumulated temporarily to a coating liquid discharge device quantitatively and intermittently in a coating liquid supply device. SOLUTION: A substrate with a stripe-shaped uneven part formed on the surface is fixed on a table, opposite to the surface of the substrate, a nozzle 20 having a plurality of discharge holes 44 is supported by a lift. A coating liquid is applied at prescribed positions of the substrate by relatively moving the table and the nozzle 30 three dimensionally. In this operation, a syringe type pump 100 is used as the intermittent actuation type pump of a coating liquid supply device. By moving a piston 112 downward with an suction valve 54 opened and a discharge valve closed, a given amount of the coating liquid 42 in a coating tank 56 is packed in a cylinder 111. After that, the valves 54, 48 are changed over reversely, and the piston 112 is moved upward so that the coating liquid 42 is supplied to the nozzle 20 and discharged to the substrate.

    DIAPHRAGM PUMP AND COLOR FILTER MANUFACTURING METHOD

    公开(公告)号:JPH10281071A

    公开(公告)日:1998-10-20

    申请号:JP8366497

    申请日:1997-04-02

    Abstract: PROBLEM TO BE SOLVED: To make air expulsion from working fluid easy and maintain discharge accuracy of a pup by proving an exhaust port exhausting air bubble incorporated into working fluid to the atmosphere on the upper side of a working fluid inflow port of a working fluid side chamber. SOLUTION: Aeration into working fluid is caused by the entering of air into working fluid due to a defective of a seal part that an o-ring forms by coming into contact with the inner surface of a cylinder in a process that working fluid flows in/from working fluid side space 105 because a piston 121 reciprocates, a diaphragm 101 is pressed in the right and left directions and fed fluid is sucked and exhausted. This air bunbble is moved upward by the reciprocating motion of the piston 121 and is carried up to the vicinity of an exhaust port 108 of working fluid side space 105. If a cock valve 111 is opened at this time, air bubble can be easily exhausted to the outside through a tube 112. Namely, the exhaust port 108 is located on the upper side of a working fluid exit/entrance 107 of a working fluid side chamber 102 by taking the moving of air bubble into consideration.

    VERTICAL CONVEYING DEVICE, VERTICAL CONVEYING METHOD, AND DEVICE FOR MANUFACTURING BOARD WITH THIN FILM AND MANUFACTURE THEREOF

    公开(公告)号:JPH10250839A

    公开(公告)日:1998-09-22

    申请号:JP6121997

    申请日:1997-03-14

    Abstract: PROBLEM TO BE SOLVED: To eliminate adhesion of oil, abrasion powder, and the like to boards by composing a conveying means of a board holding unit for holding the boards, and a lifting unit for suspending the board holding unit. SOLUTION: A support shelf that can enclose cassettes 2 at constant pitches in shelf shape while supporting cassette end parts, and heaters 14 arranged in proximity to the cassettes in correspondence with the number of cassettes 2 are vertically provided inside a board holding unit 13. Boards can therefore be heated in the enclosed state to the specified temperature. The board holding unit 13 is engaged with a lifting unit 18 at the upper part and placed in the state of being suspended by the lifting unit 18. The lifting unit 18 is composed of a lifting member 27, four suspension belts 19, belt mounting brackets 21 for fixing each one end of the suspension belts 19 to the lifting member 27, and pulleys 20.

    METHOD AND DEVICE FOR COATING AND METHOD AND DEVICE FOR MANUFACTURE OF COLOR FILTER

    公开(公告)号:JPH10216598A

    公开(公告)日:1998-08-18

    申请号:JP2144997

    申请日:1997-02-04

    Abstract: PROBLEM TO BE SOLVED: To provide a coating device and a coating method for removing securely the adhered matter such as a coating liquid adhered on the periphery of a jet opening of a coating instrument regardless of the kind of the coating liquid while minimizing the wear of a cleaning head and securing the dustproof properties and long life and forming a high quality film free from film defects, and also provide a manufacturing device and a manufacturing method thereof for a color filter in which the above coating device and the coating method are used. SOLUTION: A cleaning component 94 moving along the longitudinal direction of a jet opening while being brought into contact slidably with a jet opening peripheral section 10 of a coating instrument 40 and removing a coating liquid adhered on the jet opening peripheral section is provided, and also a sensing means for sensing the position of the jet opening of the coating instrument is provided, and based on the measured value of the jet opening position sensed by the sensing means, the relative position between both of the cleaning component 94 and the coating instrument 40 at the time of being brought into contact slidably is controlled to be constant on the basis of the jet opening position of the coating instrument as a reference.

    COATING DEVICE AND COATING METHOD
    67.
    发明专利

    公开(公告)号:JPH09253558A

    公开(公告)日:1997-09-30

    申请号:JP6653296

    申请日:1996-03-22

    Abstract: PROBLEM TO BE SOLVED: To provide a coating device and a coating method suitable to a production of a color filter and capable of reconciling its productivity and quantity improvement. SOLUTION: In this coating device for executing the coating method used in the producing of the color filter, a glass substrate A being a substrate of the color filter is sorted based on its thickness. A sorting feed unit 8 for feeding only the glass substrate A having constant thickness to a downstream side conveyor line 2d and a slit die 12 for discharging continuously a coating liq. toward the surface of each glass substrate A transported continuously on the downstream side conveyor line 2d are provided.

    EQUIPMENT AND METHOD FOR COATING
    68.
    发明专利

    公开(公告)号:JPH09206657A

    公开(公告)日:1997-08-12

    申请号:JP2022896

    申请日:1996-02-06

    Abstract: PROBLEM TO BE SOLVED: To stably form a film on a glass base and improve its productivity. SOLUTION: A coating fluid storage source 66 for feeding a coating fluid into a slit die as a coating instrument through a syringe pump is provided in a coating equipment for carrying out a coating method used for the manufacture of a color filter, and the coating fluid storage source 66 is provided with the coating equipment through a closed type treatment tank 68, an exhaust pipe 78 for exhausting the inside of the treatment tank 68, a supersonic vibrator 78 disposed in the treatment tank 68, and a closed type storage tank 86 connected with the treatment tank 68 through a replenishment piping 96 and connected with the syringe pump through a suction hose 48.

    NOZZLE DEVICE
    69.
    发明专利

    公开(公告)号:JPH07186368A

    公开(公告)日:1995-07-25

    申请号:JP33513693

    申请日:1993-12-28

    Abstract: PURPOSE:To obtain a nozzle device having a heat transfer performance higher than that of a conventional device without increasing an energy required for blowing air from the nozzle device. CONSTITUTION:In a nozzle device for blowing air from a plurality of air blow holes 4 provided in a porous plate 3 of a nozzle part 1 to a running sheet material 5, a distance Z from the porous plate to the sheet material is determined to be smaller than 30mm, a percentage of a total area B of the air blow holes to a surface area A of the porous plate is 1.5-4%, and a bore diameter d (mm) of each of the air blow holes for a distance Z is found by a formula d=0.77.Z + or -0.3.

    DUST COLLECTOR FOR SHEET MATERIAL
    70.
    发明专利

    公开(公告)号:JPH05138136A

    公开(公告)日:1993-06-01

    申请号:JP32241891

    申请日:1991-11-12

    Abstract: PURPOSE:To strike air jetted from a nozzle against the surface of a sheet material to effectively float the dust stuck to it and to suck the floated dust into a box without letting it leak to the outside. CONSTITUTION:In a dust collector for sheet material, a nozzle 15 which is arranged on the surface opposite to the sheet material leaving space to the sheet material and jets air to the sheet material, a suction box which sucks air, and an intermediate chamber 22 which is arranged between the nozzle 1 5 and the suction box 16 and opens in the direction of the sheet material only and whose opening width is larger than that of the nozzle 15 are provided.

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