公开(公告)号：EP2378273A2

公开(公告)日：2011-10-19

申请号：EP10182395.3

申请日：2004-12-03

Applicant: Candela Instruments

Inventor： Meeks, Steven W.

IPC: G01N21/21 ,  G01N21/47 ,  G01N21/95 ,  H01L21/66

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 一种用于测量物体表面上的缺陷的方法，包括：将第一光束在第一入射平面中朝向物体上的第一位置引导; 将第二光束引导到物体（4501）上的第二位置的第二入射平面中，其中第一入射平面和第二入射平面之间的角度为零，并且其中第一光束被引导在圆周 方向（4504），并且所述第二光束被引导在所述物体（4501）的径向方向上; 检测第一散射光束; 并检测第二散射光束; 其中所述第一散射光束包括来自所述第一位置的散射光强度，并且所述第二散射光束包括来自所述第二位置的散射光强度，所述方法还包括比较所述第一散射光束和所述第二散射光束以确定 物体表面上的缺陷的第一纵横比（4501）。

公开(公告)号：EP0380904B1

公开(公告)日：1994-05-04

申请号：EP89850028.5

申请日：1989-02-01

Applicant: XILLIX TECHNOLOGIES CORPORATION

Inventor： Jaggi, Bruno ,  Deen, Mohamed J. ,  Palcic, Branko

IPC: G02B21/00

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G01N2021/5938 ,  G01N2021/5957 ,  G01N2201/103

公开(公告)号：EP0557558A1

公开(公告)日：1993-09-01

申请号：EP92103406.2

申请日：1992-02-27

Applicant: MITSUI MINING & SMELTING CO., LTD.

Inventor： Moriya, Kazuo ,  Tsuzura, Takayuki

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2021/8845 ,  G01N2021/8887 ,  G01N2201/0696 ,  G01N2201/103

Abstract: An apparatus for inspecting the surface of a sheet-like object, comprising:
   a movable stage with an object mounted thereon;
   lighting means for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions;
   image pickup means for fetching the image of the object under illumination of said lighting means as image data or the images of parts of the object as image data obtained on the respective different wavelengths;
   image data processing means for inspecting said image data for defects;
   and synchronization control means either for flashing the lighting means at a predetermined time interval just after the said stage commences its movement, synchronously with fetching the image data or for flashing the lighting means and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving said stage.

Abstract translation: 一种用于检查片状物体的表面的装置，包括：安装有物体的可移动台; 照明装置，用于照亮舞台上的物体，特别是通过分别具有不同波长的多个照明光从各个预定方向入射到物体的表面上; 图像拾取装置，用于在所述照明装置的照明下将所述物体的图像作为图像数据或所述对象的部分的图像作为在各个不同波长上获得的图像数据; 图像数据处理装置，用于检查所述图像数据的缺陷; 以及同步控制装置，用于在所述阶段开始其移动之后的预定时间间隔闪烁照明装置，与获取图像数据同步或用于闪烁照明装置并同时取得在各个不同波长上获得的图像数据 同时舞台上的物体在移动所述舞台时达到相应的预定位置。

公开(公告)号：EP3256856A4

公开(公告)日：2018-06-06

申请号：EP15871090

申请日：2015-12-17

Applicant: SINGULEX INC

Inventor： LIVINGSTON RICHARD ,  GILBERT MICHELLE ,  FELBERG JACQUELINE ,  BISHOP JEFFREY

IPC: G01N33/58 ,  G01J3/44 ,  G01N21/62 ,  G01N21/64 ,  G01N33/53

CPC classification number: G01N21/6428 ,  G01J3/4406 ,  G01N21/645 ,  G01N21/6452 ,  G01N33/5302 ,  G01N33/536 ,  G01N33/58 ,  G01N33/6845 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2201/0612 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/105

Abstract: Analyzers and analyzer systems that include an analyzer for determining multiple label species, methods of using the analyzer and analyzer systems to analyze samples, are disclosed herein. The analyzer includes one or more sources of electromagnetic radiation to provide electromagnetic radiation at wavelengths within the excitation bands of one or more fluorophore species to an interrogation space that is translated through the sample to detect the presence or absence of molecules of different target analytes. The analyzer may also include one or more detectors configured to detect electromagnetic radiation emitted from the one or more fluorophore species. The analyzer for determining multiple target molecule species provided herein is useful for diagnostics because the concentration of multiple species of target molecules may be determined in a single sample and with a single system.

公开(公告)号：EP2909613A4

公开(公告)日：2016-10-26

申请号：EP13846939

申请日：2013-10-17

Applicant: BIO RAD LABORATORIES

Inventor： BARICH JOHN ,  LEMAIRE-ADKINS RENEE ,  NEAZ DAVID ,  NOTCOVICH ARIEL ,  PATT PAUL ,  SHORT RYAN ,  SWIHART STEVEN ,  THRUSH EVAN

IPC: G01N27/26 ,  G01N21/64 ,  G01N27/447 ,  H04N3/14

CPC classification number: G01N21/63 ,  G01N21/6452 ,  G01N27/44726 ,  G01N2021/6484 ,  G01N2201/0833 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/127 ,  H04N5/2624 ,  H04N5/349 ,  H04N5/3572 ,  H04N5/361

Abstract: Analyte arrays such as solutes in a slab-shaped gel following electrophoresis, and particularly arrays that are in excess of 3 cm square and up to 25 cm square and higher, are imaged at distances of 5 cm or less by either forming sub-images of the entire array and stitching together the sub-images by computer-based stitching technology, or by using an array of thin-film photoresponsive elements that is coextensive with the analyte array to form a single image of the array.

公开(公告)号：EP2829901A4

公开(公告)日：2015-03-25

申请号：EP13763578

申请日：2013-02-20

Applicant: SHARP KK

Inventor： WATANABE YUKIO

IPC: G02B21/00 ,  G01N21/64 ,  G02B19/00 ,  G02B21/02

CPC classification number: G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/008 ,  G02B19/0085 ,  G02B21/0076 ,  G02B2207/113

公开(公告)号：EP1553406B1

公开(公告)日：2013-02-13

申请号：EP04028745.0

申请日：2004-12-03

Applicant: Candela Instruments

Inventor： Meeks, Steven W.

IPC: G01N21/47 ,  G01N21/21 ,  G01N21/95 ,  G01B11/06 ,  G01B11/30

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP2350633A2

公开(公告)日：2011-08-03

申请号：EP09744723.9

申请日：2009-10-09

Applicant: Malvern Instruments Limited

Inventor： WATSON, Fraser McNeil

IPC: G01N27/447 ,  G01N15/02 ,  B01L3/00

CPC classification number: G01N21/253 ,  B01L3/5025 ,  B01L2300/0829 ,  B01L2400/0421 ,  G01N21/03 ,  G01N21/51 ,  G01N27/44721 ,  G01N2015/1493 ,  G01N2021/0346 ,  G01N2021/4707 ,  G01N2021/513 ,  G01N2201/103 ,  G01N2201/105

Abstract: A high-throughput optical suspension characterization instrument is disclosed, which can include hydraulically separate and at least partially transparent sample containers. A selection mechanism is operative to selectively direct light from a light source (12) through different ones of the sample containers along an optical axis, and an off-axis scattering detector (38,24) is responsive to scattered light from the light source after it has interacted with a sample. Phase analysis light scattering is used to determine the electrophoretic mobility and zeta potential of samples. A second instrument is disclosed, wherein all sample containers are illuminated simultaneously. Transmitted light is collected by a camera. The electrophoretic mobility and hydrodynamic size of the samples may be determined.

公开(公告)号：EP1554552A2

公开(公告)日：2005-07-20

申请号：EP03776262.2

申请日：2003-10-08

Applicant: Hinds Instruments, Inc.

Inventor： KAPLAN, Andrew, D. ,  MANSFIELD, James, C. ,  MARK, Douglas, C.

IPC: G01J4/00

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

公开(公告)号：EP0679325B1

公开(公告)日：1997-10-15

申请号：EP94905056.1

申请日：1994-01-13

Applicant: SCHUTZE, Raimund

Inventor： SCHUTZE, Raimund

IPC: H05H3/04 ,  G01N15/10 ,  G02B21/32

CPC classification number: G01N15/0205 ,  C12M41/46 ,  G01N2201/103 ,  G01N2201/1087

Abstract: The description relates to a device for handling, treating and observing small particles, especially biological particles. A first laser (4) generates light beams in a first wavelength range which are focussed by a first optical device (12, 13; 14, 15) and form an optical trap. A slide (22) holds corresponding particles. There is also a light source (17) for observation purposes and observation and recording devices for observing the particles and recording their behaviour. A second laser (3) generates light beams in a second wavelength range which are focussed so that particles on the slide may be treated. The optical devices for the light beams can be positioned and adjusted independently of each other and thus the light beams can be focussed in the same object plane of the slide at the start of treatment and observation independently of their wavelengths.