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    METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON MICROSCOPY
    62.
    发明申请
    METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON MICROSCOPY 审中-公开
    4D扫描和超声波扫描电子显微镜的方法和系统

    公开(公告)号：WO2011146084A1

    公开(公告)日：2011-11-24

    申请号：PCT/US2010/049185

    申请日：2010-09-16

    Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY ,  ZEWAIL, Ahmed H. ,  KWON, Oh-Hoon ,  ABDELSABOOR, Omar Farghaly Mohammed ,  YANG, Ding-Shyue

    Inventor： ZEWAIL, Ahmed H. ,  KWON, Oh-Hoon ,  ABDELSABOOR, Omar Farghaly Mohammed ,  YANG, Ding-Shyue

    IPC: H01J37/26

    CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/285 ,  H01J2237/0432 ,  H01J2237/2004 ,  H01J2237/20207 ,  H01J2237/2065 ,  H01J2237/2611 ,  H01J2237/2803

    Abstract: A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomgraphic image set from the sets of images.

    Abstract translation: 4D电子断层摄影系统包括具有一个或多个自由度的阶段，电子源和可操作以将电子脉冲引导到支撑在舞台上的样本上的电子光学器件。 电子脉冲的脉冲在第一次撞击样品。 该系统还包括激光系统和光学器件，其可操作以引导光脉冲撞击样品。 光脉冲的脉冲在第二次撞击样品。 该系统还包括可操作以接收通过样品的电子脉冲的检测器，可操作以独立地修改载物台的取向和第一时间或第二时间中的至少一个的控制器，可操作地存储图像集合的存储器， 以及处理器，可操作以从所述图像集合形成4D成像图像集。

    走査型電子顕微鏡及び試料観察方法
    63.
    发明申请
    走査型電子顕微鏡及び試料観察方法 审中-公开
    扫描电子显微镜和样品观察方法

    公开(公告)号：WO2011016208A1

    公开(公告)日：2011-02-10

    申请号：PCT/JP2010/004843

    申请日：2010-07-30

    Applicant: 株式会社日立ハイテクノロジーズ ,  程 朝輝 ,  小山 光 ,  木村 嘉伸 ,  品田 博之 ,  小室 修

    Inventor： 程　朝輝 ,  小山　光 ,  木村　嘉伸 ,  品田　博之 ,  小室　修

    IPC: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22

    CPC classification number: H01J37/28 ,  H01J2237/2803

    Abstract: 　本発明の走査型電子顕微鏡は、試料（８）上の二次元領域に対し電子線（４）を走査して走査領域の画像を形成する際に、試料に応じて走査線密度を変化させて走査すること、又は、試料（８）に関する情報を入力する試料情報入力手段と、前記入力に応じた推奨走査条件を表示する表示手段（４０５）とを有するＧＵＩ（４０１）を備え、該推奨走査条件を選択することによって前記試料に応じた走査線密度で走査すること、を特徴とする。これにより、走査型電子顕微鏡を用いた観察の際に、一次荷電粒子線照射起因帯電の影響を抑制し、二次電子の検出率を向上させることで二次元パターンの輪郭のコントラストを向上させると共にシェーディングを抑制できる好適な走査装置及び走査方法を提供することが可能になった。

    Abstract translation: 扫描电子显微镜通过用电子束（4）扫描样品（8）的二维区域来形成要扫描的区域的图像时，根据样品改变扫描线密度以扫描该区域， 包括GUI（401），其包括用于输入关于样本（8）的信息的样本信息输入装置和用于基于输入显示推荐扫描条件的显示装置（405），并且基于扫描线密度扫描该区域 样品通过选择推荐的扫描条件。 因此，可以提供通过使用扫描电子显微镜适合于观察的扫描装置和扫描方法，其可以通过减少由一次带电粒子引起的充电的影响来改善二维图案的轮廓对比度并抑制阴影 光束照射以增加二次电子检测率。

    METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE
    66.
    发明申请
    METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE 审中-公开
    超导光电显微镜的方法与系统

    公开(公告)号：WO2005098895A3

    公开(公告)日：2006-12-07

    申请号：PCT/US2005011018

    申请日：2005-04-01

    Applicant: CALIFORNIA INST OF TECHN ,  ZEWAIL AHMED ,  LOBASTOV VLADIMIR

    Inventor： ZEWAIL AHMED ,  LOBASTOV VLADIMIR

    IPC: H01J37/26 ,  G01N23/04 ,  H01J37/073

    CPC classification number: H01J37/26 ,  H01J37/065 ,  H01J37/073 ,  H01J37/24 ,  H01J37/243 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/206 ,  H01J2237/2065 ,  H01J2237/24585 ,  H01J2237/2482 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2813 ,  H01J2237/2855

    Abstract: An ultrafast system (and methods) for characterizing one or more samples. The system includes a stage assembly, which has a sample (150) to be characterized. The system has a laser source that is capable of emitting an optical pulse of less than 1 ps in duration. The system has a cathode coupled to the laser source. In a specific embodiment, the cathode (140) is capable of emitting an electron pulse less than 1 ps in duration. The system has an electron lens assembly (146) adapted to focus the electron pulse onto the sample disposed on the stage. The system has a detector (154) adapted to capture one or more electrons passing through the sample. The one or more electrons passing through the sample is representative of the structure of the sample. The detector provides a signal (e.g. , data signal) associated with the one or more electrons passing through the sample that represents the structure of ihe sample. T he system has a processor coupled to the detector. The processor is adapted to process the data signal associated with the one or more electrons passing through the sample to output information associated with the structure of the sample. The system has an output device coupled to the processor. The output device is adapted to output the information associated with the structure of the sample.

    Abstract translation: 用于表征一个或多个样品的超快系统（和方法）。 该系统包括具有要表征的样品（150）的台架组件。 该系统具有能够发射持续时间小于1ps的光脉冲的激光源。 该系统具有耦合到激光源的阴极。 在具体实施例中，阴极（140）能够发射持续时间小于1ps的电子脉冲。 该系统具有适于将电子脉冲聚焦到设置在台上的样品上的电子透镜组件（146）。 该系统具有适于捕获穿过样品的一个或多个电子的检测器（154）。 通过样品的一个或多个电子代表样品的结构。 检测器提供与通过样品的一个或多个电子相关联的信号（例如，数据信号），其表示样品的结构。 系统具有耦合到检测器的处理器。 处理器适于处理与通过样本的一个或多个电子相关联的数据信号，以输出与样本的结构相关联的信息。 该系统具有耦合到处理器的输出设备。 输出设备适于输出与样本结构相关联的信息。

    SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF IMAGE GENERATION
    67.
    发明公开
    SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF IMAGE GENERATION 审中-公开

    公开(公告)号：EP3327749A1

    公开(公告)日：2018-05-30

    申请号：EP17204093.3

    申请日：2017-11-28

    Applicant: Jeol Ltd.

    Inventor： SAGAWA, Ryusuke

    IPC: H01J37/28 ,  G01N23/20058 ,  H01J37/244

    CPC classification number: H01J37/28 ,  G01N23/20058 ,  G01N2223/0565 ,  G01N2223/102 ,  G01N2223/3302 ,  G01N2223/418 ,  H01J37/10 ,  H01J37/1475 ,  H01J37/1477 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/2446 ,  H01J2237/2802 ,  H01J2237/2803

    Abstract: There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

    CHARGED PARTICLE BEAM SYSTEM AND MEASURING METHOD
    68.
    发明公开
    CHARGED PARTICLE BEAM SYSTEM AND MEASURING METHOD 审中-公开
    MESSVERFAHREN的TEILCHENSTRAHLSYSTEM

    公开(公告)号：EP3142139A1

    公开(公告)日：2017-03-15

    申请号：EP16187492.0

    申请日：2016-09-06

    Applicant: JEOL LTD.

    Inventor： Yamazaki, Kazuya

    IPC: H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/226 ,  H01J37/10 ,  H01J37/147 ,  H01J37/268 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2803

    Abstract: There is provided a charged particle system capable of measuring deflection fields in a sample without using a segmented detector. The charged particle system (100) has: illumination optics (104) for illuminating the sample with charged particles; an imaging deflector system (112) disposed behind an objective lens (110) and operative to deflect the charged particles; a detector (116) having a detection surface (115) and operative to detect the charged particles incident thereon, imaging optics (114) disposed behind the imaging deflector system (112) and operative to focus the charged particles as diffraction discs (2) onto the detection surface (115); a storage unit (120) for storing intensity information detected by the detector (116); and a controller (130) for controlling the imaging deflector system (112). The controller (130) controls the imaging deflector system (112) to cause the charged particles passing through a given position of particle impingement on the sample to be deflected under successively different sets of deflection conditions and to bring the diffraction discs (2) into focus onto successively different regions of the detection surface (115). The storage unit (120) stores the intensity information for each set of the deflection conditions.

    Abstract translation: 提供了一种能够在不使用分段检测器的情况下测量样品中的偏转场的带电粒子系统。 带电粒子系统（100）具有：用于用带电粒子照射样品的照明光学器件（104） 设置在物镜后面并可操作以使带电粒子偏转的成像偏转器系统（112）; 检测器（116），其具有检测表面（115）并且可操作以检测入射在其上的带电粒子;成像光学器件（114），设置在成像偏转器系统（112）的后面，并可操作以将带电粒子作为衍射光盘（2）聚焦到 检测表面（115）; 存储单元（120），用于存储由所述检测器（116）检测的强度信息; 以及用于控制成像偏转器系统（112）的控制器（130）。 控制器（130）控制成像偏转器系统（112），使带电颗粒通过粒子撞击给定位置的样品在连续不同组的偏转条件下偏转，并使衍射光盘（2）成为焦点 到所述检测表面（115）的连续不同的区域。 存储单元（120）存储每组偏转条件的强度信息。

    LEED FOR SEM
    69.
    发明公开
    LEED FOR SEM 有权
    SEM的LEED

    公开(公告)号：EP2997590A1

    公开(公告)日：2016-03-23

    申请号：EP14797934.8

    申请日：2014-05-14

    Applicant: Okinawa Institute of Science and Technology School Corporation

    Inventor： SHINTAKE, Tsumoru

    IPC: H01J37/244 ,  G01N23/20 ,  H01J37/295

    CPC classification number: H01J37/244 ,  G01N23/20 ,  H01J37/2955 ,  H01J2237/2449 ,  H01J2237/24578 ,  H01J2237/2544 ,  H01J2237/2803

    Abstract: A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).

    Abstract translation: 低能电子衍射（LEED）检测模块（100）包括：用于接收来自样品（109）的衍射电子的第一真空室; 与第一真空室连接以接收已经通过第一真空室传送的衍射电子的较大的第二真空室; 设置在第二真空室中以检测衍射电子的二维电子探测器; 大致沿着第一真空室的内表面和第二真空室的内表面设置的电位屏蔽件（106） 磁透镜（105），其将通过所述第一真空室输送的所述衍射电子的束向所述二维电子检测器扩展; 和大致平面形状的能量滤波器（103），以排斥能量低于撞击在样本（109）上的电子的探测光束（203）的能量。

    System and method for localization of large numbers of fluorescent markers in biological samples
    70.
    发明公开
    System and method for localization of large numbers of fluorescent markers in biological samples 有权
    系统和方法，用于定位在生物样品中的大量荧光标记的

    公开(公告)号：EP2482061A2

    公开(公告)日：2012-08-01

    申请号：EP12152791.5

    申请日：2012-01-27

    Applicant: FEI Company

    Inventor： Parker, N. William ,  Utlaut, Mark

    IPC: G01N23/225 ,  H01J37/28 ,  G01N21/64

    CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

    Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert "reporter" genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (Gols), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (Pols) coded for by the Gols. One goal of biologists is more precise localization of Pols within cells. The invention is a method and system for enabling more rapid and precise Pol localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels. Fig. 3

    Abstract translation: 一种用于成像和荧光标记物的定位方法和系统：如荧光蛋白或生物样品中的量子点是游离缺失盘。 插入“记者”的基因分为许多种类，利用重组遗传学技术已经非常成熟。 特别是绿色荧光蛋白（GFP）及其转基因变种，从蓝色到黄色，很容易被拼接成许多基因在其中的GFP过表达与功能上没有明显效果的利息（GOLS），基因位点 感兴趣的（极）由GOLS编码蛋白质。 生物学家的一个目标是细胞内的极的更精确的定位。 本发明是用于使用到的GFP极带电粒子束诱导的损伤实现更快速和精确定位的方法和系统。 的用于实现该方法系统的多个实施例是，与图像处理方法相对不受高统计噪声水平沿。 图3

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