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公开(公告)号：GB2205942A
公开(公告)日：1988-12-21
申请号：GB8811132
申请日：1988-05-11
Applicant: CANON KK
Inventor： YOSHII MINORU , NOSE NORIYUKI , NIWA YUKICHI , KURODA RYO
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公开(公告)号：DE602004016662D1
公开(公告)日：2008-10-30
申请号：DE602004016662
申请日：2004-06-24
Applicant: CANON KK
Inventor： KURODA RYO , MIZUTANI NATSUHIKO , YAMADA TOMOHIRO
IPC: G03F7/20 , G03F1/00 , G03F1/70 , H01L21/027
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公开(公告)号：AU2003265176A8
公开(公告)日：2004-03-29
申请号：AU2003265176
申请日：2003-09-05
Applicant: CANON KK
Inventor： INAO YASUHISA , MIZUTANI NATSUHIKO , KURODA RYO
Abstract: An exposure method for exposing a workpiece on the basis of near-field light escaping from an opening of a mask. The method includes projecting non-polarized exposure light having a predetermined wavelength, emitted from a laser light source and passed through a depolarization device and a diffusion device, onto an exposure mask having a light blocking film formed with a plurality of rectangular openings therein, the openings having (i) a width in a widthwise direction not greater than one-third of the wavelength of the exposure light and (ii) two or more lengthwise directions extending along the mask surface, so that near-field light escaping from the openings performs exposure of a pattern on the basis of the openings.
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公开(公告)号：DE69232806D1
公开(公告)日：2002-11-07
申请号：DE69232806
申请日：1992-07-15
Applicant: CANON KK
Inventor： TAKIMOTO KIYOSHI , MIYAZAKI TOSHIHIKO , SAKAI KUNIHIRO , KURODA RYO
Abstract: The apparatus comprising: a plurality of probe electrodes (31) for recording and reproducing information; support means (33) for unitedly supporting said plurality of probe electrodes (31) in parallel facing the medium (34); adjusting means (35,37) for adjusting a spacing between said medium (34) and said support means (33); displacing means (32) for, in order to independently adjust a spacing between said medium (34) and each tip (3101) of the probe electrodes (31), independently displacing the respective probe electrodes (31) in a direction of the spacing; and control means (39,310) for controlling said displacing means (32) such that all spacings between said medium (34) and said respective probe electrode tips (3101) are made equivalent; in which apparatus or method said control means (39,310) are adapted to control said adjusting means (35,37) such that, upon the control of said displacing means (32), an average of displacement amounts of said plural probe electrodes (31) is substantially zero or a sum of squares of displacement of said plural probe electrodes (31) is minimized.
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公开(公告)号：DE69608180D1
公开(公告)日：2000-06-15
申请号：DE69608180
申请日：1996-07-09
Applicant: CANON KK
Inventor： TAKEDA TOSHIHIKO , KURODA RYO , YASUDA SUSUMU
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Patent Agency Ranking
公开(公告)号：AT193142T
公开(公告)日：2000-06-15
申请号：AT95201397
申请日：1991-07-31
Applicant: CANON KK
Inventor： MIYAZAKI TOSHIHIKO , SAKAI KUNIHIRO , NOSE HIROYASU , KISHI ETSURO , KURODA RYO
IPC: G01Q10/00 , G01Q60/10 , G01Q60/18 , G01Q60/22 , G01Q70/14 , G01Q80/00 , G11B7/00 , G11B7/004 , G11B7/0045 , G11B7/005 , G11B7/12 , G11B7/135 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/08 , G02B21/00
Abstract: Information is recorded by preparing a recording medium having a recording layer on an electroconductive substrate transmitting electromagnetic wave and an electroconductive optical probe arranged proximate to the recording medium, and applying a voltage between the substrate and the optical probe. The recorded information is read by irradiating electromagnetic wave, preferably with a plurality of wavelengths, on the recording layer from the substrate side, and detecting electromagnetic wave oozed out on the surface of the recording layer by the optical probe.
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公开(公告)号：ES2137167T3
公开(公告)日：1999-12-16
申请号：ES92112106
申请日：1992-07-15
Applicant: CANON KK
Inventor： TAKIMOTO KIYOSHI , MIYAZAKI TOSHIHIKO , SAKAI KUNIHIRO , KURODA RYO
Abstract: The apparatus comprising: a plurality of probe electrodes (31) for recording and reproducing information; support means (33) for unitedly supporting said plurality of probe electrodes (31) in parallel facing the medium (34); adjusting means (35,37) for adjusting a spacing between said medium (34) and said support means (33); displacing means (32) for, in order to independently adjust a spacing between said medium (34) and each tip (3101) of the probe electrodes (31), independently displacing the respective probe electrodes (31) in a direction of the spacing; and control means (39,310) for controlling said displacing means (32) such that all spacings between said medium (34) and said respective probe electrode tips (3101) are made equivalent; in which apparatus or method said control means (39,310) are adapted to control said adjusting means (35,37) such that, upon the control of said displacing means (32), an average of displacement amounts of said plural probe electrodes (31) is substantially zero or a sum of squares of displacement of said plural probe electrodes (31) is minimized.
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公开(公告)号：DE69227397T2
公开(公告)日：1999-04-29
申请号：DE69227397
申请日：1992-04-21
Applicant: CANON KK
Inventor： KURODA RYO , MIYAZAKI TOSHIHIKO , SAKAI KUNIHIRO , TAKIMOTO KIYOSHI
IPC: G01B11/00 , G01B11/30 , G01B21/30 , G01Q20/02 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01Q60/24 , G01Q60/40 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14
Abstract: An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.
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公开(公告)号：CA2065593C
公开(公告)日：1999-01-19
申请号：CA2065593
申请日：1992-04-08
Applicant: CANON KK
Inventor： KURODA RYO , HATANAKA KATSUNORI , MIYAZAKI TOSHIHIKO , YAGI TAKAYUKI , KAWASE TOSHIMITSU , SHINJO KATSUHIKO
IPC: G01B21/30 , G01B7/34 , G01B9/02 , G01N37/00 , G01P15/08 , G01Q20/02 , G01Q60/08 , G01Q60/24 , G01Q60/40 , G01Q60/50 , G01Q60/56 , G01Q70/14 , G01Q80/00 , G01R33/038 , G11B9/00 , G11B9/14 , G01B5/20 , G11B21/00 , G01B7/28
Abstract: A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of an displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.
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公开(公告)号：DE69227397D1
公开(公告)日：1998-12-03
申请号：DE69227397
申请日：1992-04-21
Applicant: CANON KK
Inventor： KURODA RYO , MIYAZAKI TOSHIHIKO , SAKAI KUNIHIRO , TAKIMOTO KIYOSHI
IPC: G01B11/00 , G01B11/30 , G01B21/30 , G01Q20/02 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01Q60/24 , G01Q60/40 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14
Abstract: An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.
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