公开(公告)号：US09282415B2

公开(公告)日：2016-03-08

申请号：US13794412

申请日：2013-03-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: B81B3/00 ,  B06B1/02 ,  H04R19/00 ,  H04R31/00 ,  B81C1/00

CPC classification number: B81C1/00158 ,  B06B1/0292 ,  B81B2201/0285 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

Abstract translation: 本发明的机电换能器包括第一电极，通过间隙形成在第一电极上方的振动膜，形成在振动膜上的第二电极和形成在第二电极侧的表面上的绝缘保护层。 在振动膜的表面的至少一部分上存在未形成保护层的区域。

公开(公告)号：US09089055B2

公开(公告)日：2015-07-21

申请号：US14018686

申请日：2013-09-05

Applicant: Seiko Epson Corporation

Inventor： Yoji Kitano ,  Norio Okuyama

IPC: H01L23/053 ,  H05K5/02 ,  B81B7/00

CPC classification number: H05K5/0217 ,  B81B7/0041 ,  B81B2201/0285 ,  B81B2203/0118 ,  B81C2203/0136 ,  B81C2203/0145 ,  B81C2203/0163 ,  H01L23/053 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

Abstract: An electronic device includes a substrate, a cavity part formed above the substrate with a functional device placed therein, a coating structure that defines the cavity part, and the coating structure has a first surrounding wall formed around the cavity part above the substrate, a second surrounding wall formed around the cavity part above the first surrounding wall, a coating layer that defines an upper surface of the cavity part, wherein the second surrounding wall is located inside the first surrounding wall in a plan view.

Abstract translation: 一种电子设备，包括：衬底，形成在衬底上方的功能器件的空腔部分，其中限定空腔部分的涂层结构，并且涂层结构具有围绕衬底上方的空腔部分形成的第一环绕壁， 形成在第一周围壁上方的空腔部分周围的围绕壁，其形成限定空腔部分的上表面的涂层，其中第二周围壁在俯视图中位于第一周围壁的内部。

公开(公告)号：US20150156591A1

公开(公告)日：2015-06-04

申请号：US14558993

申请日：2014-12-03

Applicant: Robert Bosch GmbH

Inventor： Christoph SCHELLING ,  Rolf SCHEBEN ,  Ricardo EHRENPFORDT

IPC: H04R23/00

CPC classification number: H04R19/005 ,  B81B3/0018 ,  B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2201/0285 ,  H04R19/04 ,  H04R29/004

Abstract: A capacitive MEMS microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the MEMS microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection. At least one of the two carrier elements is sound pressure-sensitive and at least one of the two electrode sides includes at least two electrode segments which are electrically contactable independent of one another, which together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another.

Abstract translation: 描述了可以可选地用于检测声信号（麦克风模式）或用于在限定的频率范围（超声模式）中检测超声信号的电容式MEMS麦克风元件。 在MEMS麦克风元件的分层结构中，用于电容器系统的两个电极侧的至少两个载体元件彼此之间并且彼此间隔一定距离地形成用于信号检测。 两个载体元件中的至少一个是声压敏的，并且两个电极侧中的至少一个包括彼此独立地电接触的至少两个电极段，这两个电极段与另一个电极侧的至少一个电极 形成彼此独立的部分电容。

公开(公告)号：US20140070900A1

公开(公告)日：2014-03-13

申请号：US14018686

申请日：2013-09-05

Applicant: Seiko Epson Corporation

Inventor： Yoji Kitano ,  Norio Okuyama

IPC: H05K5/02

CPC classification number: H05K5/0217 ,  B81B7/0041 ,  B81B2201/0285 ,  B81B2203/0118 ,  B81C2203/0136 ,  B81C2203/0145 ,  B81C2203/0163 ,  H01L23/053 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

Abstract: An electronic device includes a substrate, a cavity part formed above the substrate with a functional device placed therein, a coating structure that defines the cavity part, and the coating structure has a first surrounding wall formed around the cavity part above the substrate, a second surrounding wall formed around the cavity part above the first surrounding wall, a coating layer that defines an upper surface of the cavity part, wherein the second surrounding wall is located inside the first surrounding wall in a plan view.

Abstract translation: 一种电子设备，包括：衬底，形成在衬底上方的功能器件的空腔部分，其中限定空腔部分的涂层结构，并且涂层结构具有围绕衬底上方的空腔部分形成的第一环绕壁， 形成在第一周围壁上方的空腔部分周围的围绕壁，其形成限定空腔部分的上表面的涂层，其中第二周围壁在俯视图中位于第一周围壁的内部。

公开(公告)号：US20130241346A1

公开(公告)日：2013-09-19

申请号：US13989885

申请日：2011-11-28

Applicant: Sebastien Boisseau ,  Ghislain Despesse

Inventor： Sebastien Boisseau ,  Ghislain Despesse

IPC: H02N1/00

CPC classification number: H02N1/002 ,  B81B3/0086 ,  B81B2201/0285 ,  H02N1/08 ,  Y10T29/49226

Abstract: An apparatus for converting mechanical vibrational energy into electrical power includes first and second collecting electrodes configured for connection to terminals of an electrical load, and an electret placed facing the first electrode. The electret is mounted so as to move relative to the first electrode in one degree-of-freedom in a plane. Relative movement between the electret and the first electrode induces a potential difference across the electrodes. The electret has a continuous layer and a series of protrusions, each of which extends perpendicular to the plane. These protrusions are distributed in the degree-of-freedom with a first pitch, which is smaller than the travel between the first electrode and the electret. The first electrode has faces facing the electret. These faces are distributed in the degree-of-freedom with a second pitch identical to the first pitch.

Abstract translation: 用于将机械振动能转换为电力的装置包括构造成用于连接到电负载的端子的第一和第二集电电极以及面向第一电极放置的驻极体。 驻极体被安装成相对于第一电极在平面内的一个自由度上移动。 驻极体和第一电极之间的相对运动在电极两端产生电位差。 驻极体具有连续层和一系列突起，每个突起垂直于平面延伸。 这些突起以比第一电极和驻极体之间的行进小的第一间距以自由度分布。 第一电极具有面向驻极体的面。 这些面以与第一间距相同的第二间距以自由度分布。

公开(公告)号：US20130192056A1

公开(公告)日：2013-08-01

申请号：US13794412

申请日：2013-03-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Chienliu Chang

IPC: H04R31/00

CPC classification number: B81C1/00158 ,  B06B1/0292 ,  B81B2201/0285 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  Y10T29/49005 ,  Y10T29/49007

Abstract: An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

Abstract translation: 本发明的机电换能器包括第一电极，通过间隙形成在第一电极上方的振动膜，形成在振动膜上的第二电极和形成在第二电极侧的表面上的绝缘保护层。 在振动膜的表面的至少一部分上存在未形成保护层的区域。

公开(公告)号：US20130098155A1

公开(公告)日：2013-04-25

申请号：US13711911

申请日：2012-12-12

Applicant: Denso Corporation ,  Toyota Jidosha Kabushiki Kaisha

Inventor： Tameharu OHTA ,  Tetsuo FUJII ,  Masanobu AZUKAWA ,  Takeshi ITO ,  Itaru ISHII

IPC: G01P15/08 ,  H05K13/00

CPC classification number: G01C19/56 ,  B81B7/0058 ,  B81B2201/0235 ,  B81B2201/0285 ,  G01D18/00 ,  G01P15/08 ,  H01L2224/48247 ,  H05K13/00 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49826

Abstract: A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing.

Abstract translation: 物理量传感器包括传感器部分，壳体和隔振器。 壳体包括具有支撑表面的支撑部分，支撑表面位于传感器部分的端表面上。 隔振器位于传感器部分的端面和壳体的支撑表面之间，以将传感器部分接合到壳体。 隔振器减小传感器部分和壳体之间的相对振动。

公开(公告)号：US20240182293A1

公开(公告)日：2024-06-06

申请号：US18287721

申请日：2022-04-12

Applicant: Technische Universität Wien

Inventor： Daniel PLATZ ,  Ulrich SCHMID ,  Jonas HAFNER

IPC: B81B3/00 ,  G01C19/5712 ,  G01Q60/24 ,  H10N30/30

CPC classification number: B81B3/0081 ,  G01C19/5712 ,  G01Q60/24 ,  H10N30/302 ,  H10N30/304 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0285

Abstract: A micro-electromechanical system (1) comprising: a sensor device (2), with a measuring deformer (3) exhibiting an effective temperature T1; a high-frequency resonator (4) that is mechanically coupled to the sensor device (2) and can interact with the measuring deformer (3); an energy converter (7) that is operatively connected to the high-frequency resonator (4) and is configured to excite the high-frequency resonator (4) into a vibration state, wherein, through the interaction of the vibrating high-frequency resonator (4) with the measuring deformer (3), energy can be transferred from the measuring deformer (3) to the high-frequency resonator (4) in such a manner that the measuring deformer (3) after the energy transfer exhibits an effective temperature T2 lower than T1.

公开(公告)号：US20180174021A9

公开(公告)日：2018-06-21

申请号：US14273540

申请日：2014-05-08

Applicant: Cornell University

Inventor： Amit Lal ,  Serhan Ardanuc ,  Jason T. Hoople ,  Justin C. Kuo

IPC: G06N3/04 ,  B81B3/00 ,  H01J49/02 ,  G06K9/00 ,  G01S7/521 ,  G01S15/02

CPC classification number: G06N3/04 ,  B81B3/0021 ,  B81B2201/018 ,  B81B2201/0214 ,  B81B2201/0285 ,  B81B2203/04 ,  G01S7/52079 ,  G01S7/521 ,  G01S15/02 ,  G01S15/8925 ,  G06K9/0002 ,  G06N3/0635 ,  H01H1/0094 ,  H01J49/025

Abstract: Techniques, systems, and devices are described for implementing for implementing computation devices and artificial neurons based on nanoelectromechanical (NEMS) systems. In one aspect, a nanoelectromechanical system (NEMS) based computing element includes: a substrate; two electrodes configured as a first beam structure and a second beam structure positioned in close proximity with each other without contact, wherein the first beam structure is fixed to the substrate and the second beam structure is attached to the substrate while being free to bend under electrostatic force. The first beam structure is kept at a constant voltage while the other voltage varies based on an input signal applied to the NEMS based computing element.

公开(公告)号：US20180017387A1

公开(公告)日：2018-01-18

申请号：US15637955

申请日：2017-06-29

Applicant: NXP USA, INC.

Inventor： Thierry Cassagnes ,  Gerhard Trauth ,  Margaret Leslie Kniffin ,  Aaron A. Geisberger

IPC: G01C19/5726 ,  G01C19/5755 ,  B81C1/00 ,  G01C19/5769

CPC classification number: G01C19/5726 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00246 ,  G01C19/5733 ,  G01C19/5755 ,  G01C19/5769

Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.