Abstract:
A method of forming a thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.
Abstract:
An array of nanometric dimensions consisting of two or more arms, positioned side by side, wherein the arms are of such nanometric dimensions that the beams can be moved or deformed towards or away from one another by means of a low voltage applied between the beams, whereby to produce a desired optical, electronic or mechanical effect. At nanometer scale dimensions structures previously treated as rigid become flexible, and this flexibility can be engineered since it is a direct consequence of material and dimensions. Since the electrostatic force between the two arms is inversely proportional to the square of the distance, a very considerable force will be developed with a low voltage of the order of 1-5 volts, which is sufficient to deflect the elements towards or away from one another. As preferred, the bulk of the element may be comprises an insulating material, and an upper conductive layer is applied on the upper surface, where the element is formed by a nanolithography method such as nanoimprint lithography (NIL). Alternatively the elements may be formed completely of conductive material, where the elements are formed by a CMOS metalization process.
Abstract:
A thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.
Abstract:
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.
Abstract:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract:
Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
Abstract:
A pump is provided that includes a nanometer- scale beam that is suspended in a housing. The housing may include a number of apertures such that molecules can move in and out of the housing. The nanometer- scale beam may be suspended as a jump rope or as a cantilever. The movement of the nanometer- scale beam may be mechanically stopped from moving in a particular way (e.g. , towards a particular end of the housing) . Thus, for example, the beam and the stop work together to pump molecules in the direction that the beam bounces off the stop. The speed and movement of the nanometer- scale beam can also be influenced either electrostatically or electromagnetically . As such, the speed and direction that a working substance is pumped by a nanometer- scale beam may be electrically controlled.
Abstract:
Selon l'invention, le dispositif microfluidique (120 ; 140 ; 150 ; 170) comprend un empilement (110) recouvert d'une plaque de fermeture (102) et comportant une plaque de support (108), une couche intermédiaire et une plaquette, ladite couche intermédiaire (106) étant d'épaisseur constante sur sa surface, en définissant, entre ladite plaque de fermeture (102) et ladite plaquette (104), au moins une cavité avant (103) destinée à être remplie de liquide, ladite couche intermédiaire (106) étant conformée afin de définir, entre ladite plaque de support (108) et ladite plaquette (104), au moins une cavité arrière (107), ladite cavité arrière (107) étant au moins partiellement située en regard de la cavité avant (103), de l'autre côté de la plaquette (104), afin de définir, dans ladite plaquette (104), un organe mobile (1042 ; 1044 ; 1045 ; 1047) à se rapprocher, de manière réversible, de la plaque de fermeture (102).
Abstract translation:根据本发明,微流体装置(120; 140; 150; 170)包括由封闭板(102)覆盖并包括支撑板(108),中间层和晶片的堆叠(110),所述中间体 层(106)在其表面上具有恒定的厚度,同时在所述封闭板(102)和晶片(104)之间限定用于填充液体的至少一个前腔(103)。 中间层(106)被设计用于在支撑板(108)和晶片(104)之间限定至少一个后腔(107),该后空腔(107)至少部分地定位成使得其面向 前腔(103),并且在所述晶片(104)的另一侧上,用于在所述晶片(104)中限定移动元件(104→104 SUB 以便以可逆的方式接近封闭板(102)。
Abstract:
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.