Abstract:
An in-channel check valve assembly (116) is disclosed comprising, an in-channel check valve (100), connected between the front (110) and rear (114) of a channel (102) attached to a silicon substrate (106). The channel may have a width between 10 microns and 400 microns, and the check valve may have a width between about 50 microns and 500 microns. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and the rear portions of the channel. The check valve may include a sealing cap (122) that contacts a valve seat (120) to seal the valve. The valve seat may include a metal layer (130) to separate the contacting surfaces of the valve seat and the sealing cap in the closed position.
Abstract:
A micromachined membrane particle filter is formed by etching a silicon substrate (104) and silicon nitride overlayers (100 and 102) and coating the entire membrane structure with a layer of parylene (150) for the purposes of imparting the characteristics of strength and biocompatibility.
Abstract:
A micro-electromechanical relay ('micro-relay') designed to both miniaturize and improve upon present day electromechanical relays. The micromachining fabrication process used to make the inventive micro-relay is based upon technology originally used by integrated circuit (IC) manufacturers. In simplest terms, the preferred inventive process consists of three steps, all performed using micromachining techniques. First, a layer of magnetic material is laid down on a substrate and patterned into a desired shape. Next, an electromagnetic coil (3) is created adjacent this material. Finally, a second layer of very efficient magnetic material is laid down adjacent the first two layers, forming a magnetic circuit, and having a portion fashioned into a deflectable structure, such as a cantilever beam (4A). The deflectable structure (4A, 4B) has at least a portion that is suspended over or adjacent to at least one electrical contact. In operation, current passes through the coil (3), clausing the deflectable structure (4A, 4B) to defect, and either make or break contact with the electrical contacts. The invention includes a unique unpowered hold feature. By integrating an electrostatic actuating capacitor into the micro-relay, an electrostatic force can be generated between the cantilever beam and the substrate (1) of the micro-relay that is strong enough to hold the relay in the 'ON' position. Turning the relay 'OFF' requires only that the voltage be removed.
Abstract:
A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 νs. The mixer chip contains two tee mixers (120, 130) connected by one channel which serves a reaction chamber (140). Each tee mixer consists of opposing channels (110, 120) where liquids meet head-on and exit into a third channel (150) forming the base of a 'T'.
Abstract:
A neurostimulator device for use with groups (e.g., more than four groups) of electrodes. The neurostimulator may include a stimulation assembly configured to deliver different stimulation to each of the groups. The neurostimulator may also include at least one processor configured to direct the stimulation assembly to deliver stimulation to the groups. The stimulation delivered to at least one of the groups may include one or more waveform shapes other than a square or rectangular wave shape. The processor may receive data from one or more sensors and use that data to modify the stimulation delivered. The neurostimulator may be configured to communicate with an external computing device. The neurostimulator may send data to and/or receive data and/or instructions from the computing device. The computing device may use information collected by one or more sensors to at least partially determine stimulation parameters to communicate to the neurostimulator.
Abstract:
Methods of enabling locomotor control, postural control, voluntary control of body movements (e.g., in non-weight bearing conditions), and/or autonomic functions in a human subject having spinal cord injury, brain injury, or neurological neuromotor disease. In certain embodiments, the methods involve stimulating the spinal cord of the subject using an epidurally placed electrode array, subjecting the subject to physical training thereby generating proprioceptive and/or supraspinal signals, and optionally administering pharmacological agents to the subject. The combination of stimulation, physical training, and optional pharmacological agents modulate in real time electrophysiological properties of spinal circuits in the subject so they are activated by supraspinal information and/or proprioceptive information derived from the region of the subject where locomotor activity is to be facilitated.
Abstract:
A neurostimulator device for use with groups (e.g. more than four groups) of electrodes. The neurostimulator may include a stimulation assembly configured to deliver different stimulation to each of the groups. The neurostimulator may also 5 include at least one processor configured to direct the stimulation assembly to deliver stimulation to the groups. The stimulation delivered to at least one of the groups may include one or more waveform shapes other than a square or rectangular wave shape. The processor may receive data from one or more sensors and use that data to modify the stimulation delivered. The neurostimulator may be configured to communicate with 10 an external computing device. The neurostimulator may send data to and/or receive data and/or instructions from the computing device. The computing device may use information collected by one or more sensors to at least partially determine stimulation parameters to communicate to the neurostimulator.
Abstract:
Micro válvulas de retención con una flotación libre para el control de los flujos de líquido en aplicaciones de microfluídos y biomédicas y sus métodos de fabricación. Una microválvula incluye un asiento de la válvula, una tapa de la válvula que pone en contacto con el asiento de la válvula flotante y un miembro sin ataduras que puede moverse entre el asiento de la válvula y la tapa de la válvula. Algunas microválvulas tienen apertura con cero o poca presión y no flujo reverso. Algunos otros tipos de válvulas pueden ser configuradas para permitir el flujo de líquido dentro de un rango de presiones. El miembro flotante puede ser sólido o definir un orificio, y el asiento de la válvula puede tener uno o dos niveles. Estas Válvulas pueden ser configuradas para permitir el flujo de líquido cuando el miembro flotante es empujado por el fluido contra la tapa de la válvula o en contra del asiento de la válvula. El asiento de la válvula puede ser de silicio u otro material que sea compatible con los micro-procesos, la tapa de la válvula y el miembro flotante pueden ser de un polímero como Parylene.
Abstract:
A combined IC/Mems process forms the IC parts first, and then forms the MEMS parts (110). One option forms a parylene overlayer, then forms a cavity unde r the parylene overlayer.
Abstract:
An in-channel check valve assembly (116) is disclosed comprising, an in- channel check valve (100), connected between the front (110) and rear (114) of a channel (102) attached to a silicon substrate (106). The channel may have a width between 10 microns and 400 microns, and the check valve may have a wid th between about 50 microns and 500 microns. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and the rear portions of the channel. The check valve may include a sealing cap (122 ) that contacts a valve seat (120) to seal the valve. The valve seat may inclu de a metal layer (130) to separate the contacting surfaces of the valve seat an d the sealing cap in the closed position.