公开(公告)号：WO1993026054A1

公开(公告)日：1993-12-23

申请号：PCT/US1993005362

申请日：1993-06-03

Applicant: ULTRASONIC POWER CORPORATION

Inventor： ULTRASONIC POWER CORPORATION ,  PUSKAS, Peter, J.

IPC: H01L41/08

CPC classification number: B06B1/0246 ,  B06B2201/71 ,  H03L5/02

Abstract: A generator for driving an ultrasonic transducer for use in ultrasonic cleaning. The generator is based on a voltage controlled oscillator (26) which drives an output circuit which includes the ultrasonic transducer (22). The output circuit has a resonant frequency, and a resonance follower (30) produces a control voltage which tunes the voltage controlled oscillator to the resonant frequency. Operating in conjunction with the automatic tuning elements is a constant power control which allows the user to set a desired power level, and monitors the actual output power by means of an output wattmeter circuit (32) to cause the actual output power to match the level selected by the user. The constant output power circuit is effective even during resonance tracking of the system, or during frequency modulation of the ultrasonic output energy.

公开(公告)号：US20150206738A1

公开(公告)日：2015-07-23

申请号：US14159970

申请日：2014-01-21

Applicant: SEMATECH, Inc.

Inventor： Abbas Rastegar

IPC: H01L21/02 ,  B08B3/12

CPC classification number: B08B3/12 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/71 ,  C11D11/0047 ,  C11D11/007 ,  H01L21/67051

Abstract: An apparatus, system, and method for cleaning surfaces is presented. One embodiment of the system includes an array of surface acoustic wave (SAW) transducers coupled to a substrate. The system may include a positioning mechanism coupled to at least one of a target surface or the array of SAW transducers, and configured to position the array of SAW transducers within an effective cleaning distance of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of SAW transducers to the target surface. The system may further include a controller coupled to the array of SAW transducers and configured to activate the array of SAW transducers. At least one of the SAW transducers may be formed to focus cleaning liquid on a focal point and jet cleaning liquid in a direction substantially out of the place of the SAW transducer.

Abstract translation: 提出了一种用于清洁表面的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的表面声波（SAW）传感器的阵列。 该系统可以包括耦合到目标表面或SAW换能器阵列中的至少一个的定位机构，并且被配置为将SAW换能器阵列置于目标表面的有效清洁距离内。 该系统还可以包括布置成提供用于将SAW换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 该系统还可以包括耦合到SAW换能器阵列并被配置为激活SAW换能器阵列的控制器。 可以形成至少一个SAW换能器，以将清洁液体聚焦在焦点上，并将射流清洁液体基本上不在SAW换能器的位置。

公开(公告)号：US20140053864A1

公开(公告)日：2014-02-27

申请号：US13967950

申请日：2013-08-15

Applicant: IMEC

Inventor： Steven Brems ,  Paul Mertens

IPC: H01L41/09 ,  B08B3/12

CPC classification number: H01L41/09 ,  B06B1/0622 ,  B06B1/0688 ,  B06B2201/20 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67086

Abstract: This present application relates to a system for delivering megasonic energy to a liquid, involving one or more megasonic transducers, each transducer having a single operating frequency within an ultrasound bandwidth and comprising two or more groups of piezoelectric elements arranged in one or more rows, and a megasonic generator means for driving the one or more transducers at frequencies within the bandwidth, the generator means being adapted for changing the voltage applied to each group of piezoelectric elements so as to achieve substantially the same maximum acoustic pressure for each group of piezoelectric elements. The generator means and transducers being constructed and arranged so as to produce ultrasound within the liquid. Such a system may be part of an apparatus for cleaning a surface of an article such as a semiconductor wafer or a medical implant.

Abstract translation: 本发明涉及一种用于将兆声波能量传送到液体的系统，涉及一个或多个兆声换能器，每个换能器在超声波带宽内具有单个工作频率，并且包括两组或多组布置成一行或多行的压电元件，以及 用于在带宽内的频率驱动所述一个或多个换能器的兆声波发生器装置，所述发生器装置适于改变施加到每组压电元件的电压，以便为每组压电元件实现基本上相同的最大声压。 发生器装置和换能器被构造和布置成在液体内产生超声波。 这种系统可以是用于清洁诸如半导体晶片或医疗植入物的物品的表面的设备的一部分。

公开(公告)号：US20120024313A1

公开(公告)日：2012-02-02

申请号：US12847621

申请日：2010-07-30

Applicant: Abbas Rastegar

Inventor： Abbas Rastegar

IPC: B08B3/12

CPC classification number: H01L21/67046 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/02041

Abstract: An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.

Abstract translation: 介绍了一种用于清洁表面的Gigasonic Brush的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的声学换能器阵列，其中各个声学换能器的尺寸在9um2至250,000um2的范围内。 系统可以包括耦合到目标表面或声换能器阵列中的至少一个的定位机构，并且被配置为将声换能器阵列定位在目标表面的1毫米内。 该系统还可以包括布置成提供用于将声换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 系统还可以包括耦合到声换能器阵列并被配置为激活声换能器阵列的控制器。

公开(公告)号：US07395827B2

公开(公告)日：2008-07-08

申请号：US11819265

申请日：2007-06-26

Applicant: Sameer I. Madanshetty

Inventor： Sameer I. Madanshetty

IPC: B08B3/10

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. The apparatus may be used to clean a semiconductor wafer, to de-coat a painted surface having, to induce a chemical reaction, and/or to provide recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过利用波形来控制气泡异常介质中的气蚀事件来产生声空化的装置，利用波形来激发具有在各个脉冲串之间具有介质恢复间隔的一系列双极性非对称音调脉冲串的换能器，使得介质从突发之间的空化事件重复地恢复。 该装置可以用于清洁半导体晶片，去除涂覆有引起化学反应的涂漆表面，和/或提供由通过空化脱墨的油墨纸制成的再生纸。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US20060027254A1

公开(公告)日：2006-02-09

申请号：US11241961

申请日：2005-10-04

Applicant: Sameer Madanshetty

Inventor： Sameer Madanshetty

IPC: B08B3/12

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. The apparatus may be used to clean a semiconductor wafer, to de-coat a painted surface having, to induce a chemical reaction, and/or to provide recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过利用波形来控制气泡异常介质中的气蚀事件来产生声空化的装置，利用波形来激发具有在各个脉冲串之间具有介质恢复间隔的一系列双极性非对称音调脉冲串的换能器，使得介质从突发之间的空化事件重复地恢复。 该装置可以用于清洁半导体晶片，去除涂覆有引起化学反应的涂漆表面，和/或提供由通过空化脱墨的油墨纸制成的再生纸。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US20050188751A1

公开(公告)日：2005-09-01

申请号：US11047110

申请日：2005-01-31

Applicant: William Puskas

Inventor： William Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  B08B3/12 ,  G10K11/00 ,  G01N21/70 ,  G01N33/00

CPC classification number: G10K11/004 ,  B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002

Abstract: The invention provides a sensing system for sensing process conditions within an ultrasonic process tank that includes process liquid, the liquid being subjected to ultrasound produced by transducers coupled to a generator. The sensing system includes an enclosure for housing a sample liquid, the enclosure passing ultrasonic energy from the process liquid to the sample liquid, the sample liquid being responsive to the ultrasonic energy, and at least one sensing device within the sample liquid, the sensing device generating signals indicative of characteristics of the sample liquid. The sample liquid includes materials adapted to produce chemiluminescence in response to the ultrasonic energy. The at least one sensing device includes a photo sensor for sensing the produced chemiluminescence and generating signals in response to the produced chemiluminescence.

Abstract translation: 本发明提供了一种感测系统，用于感测超声波处理槽内的处理条件，其包括处理液体，该液体经受与发生器耦合的换能器产生的超声波。 感测系统包括用于容纳样品液体的外壳，外壳将超声能量从处理液体传递到样品液体，样品液体响应于超声波能量，以及至少一个检测装置，在检测液体内，感测装置 产生指示样品液体特性的信号。 样品液体包括适于响应于超声能量产生化学发光的材料。 所述至少一个感测装置包括用于感测产生的化学发光并响应于所产生的化学发光产生信号的光传感器。

公开(公告)号：US20040187584A1

公开(公告)日：2004-09-30

申请号：US10817887

申请日：2004-04-06

Applicant: LG Electronics Inc.

Inventor： Seung Taek Baek

IPC: D06F039/00 ,  D06F029/00 ,  G01H011/02

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

公开(公告)号：US20040154637A1

公开(公告)日：2004-08-12

申请号：US10360322

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： John Boyd ,  Andras Kuthi ,  Michael G. R. Smith ,  Thomas W. Anderson ,  William Thie

IPC: B08B007/00 ,  H01L021/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract translation: 清洁衬底的系统和方法包括包括换能器和衬底的兆声波室。 换能器朝向基板。 可变距离d分离换能器和基板。 该系统还包括具有耦合到换能器的输出的动态可调的RF发生器。

公开(公告)号：US06462461B1

公开(公告)日：2002-10-08

申请号：US09609036

申请日：2000-06-30

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4106

CPC classification number: B06B1/0269 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72

Abstract: An AC switch is created by switching devices to modify the output of an ultrasonic generator. The AC switch introduces a modification circuitry into and out of the output stage of the ultrasonic generator. The AC switch is placed in parallel with the modification circuitry when inserting the modification circuitry into a conduction line of the ultrasonic generator. It is placed in series when inserting the modification circuitry between two nodes of the ultrasonic generator. A control circuit is associated with the AC switch to turn on and off the ultrasonic generator, overcoming the inability of triacs to turn off power when conducting ultrasonic current. The introduction of the modification circuitry by the AC switch allows the modification of the frequency, amplitude, power, impedance and waveform of an ultrasonic generator.

Abstract translation: 通过切换设备来创建交流开关，以修改超声波发生器的输出。 交流开关将修改电路引入和输出超声波发生器的输出级。 当将修改电路插入到超声波发生器的导线中时，AC开关与修改电路并联放置。 当将修改电路插入超声波发生器的两个节点之间时，它被串联放置。 控制电路与AC开关相关联以打开和关闭超声波发生器，克服了在执行超声波电流时三端双向可控硅开关器无法关闭电源的能力。 通过AC开关引入修改电路允许修改超声波发生器的频率，幅度，功率，阻抗和波形。