Abstract:
According to the present invention, there is provided a micro-fluidic sensor system (6) including a micro-conduit (56) for carrying fluid therethrough having a flexible wall portion (18), at least one micro-fluidic actuator having a closed cavity, flexible mechanism defining a wall of the cavity (11) and flexible wall portion (18) of the micro-conduit for deflecting upon an application of pressure thereto, and expanding mechanism (14) disposed in the cavity for selectively expanding the cavity and thereby selectively flexing said expanding mechanism, and sensor mechanism in fluid communication with the micro-conduit for sensing the presence or absence of molecules. The present invention further provides for a micro-fluidic system for moving micro-fluid amounts including a micro-conduit and at least one micro-fluidic actuator in fluid communication with the micro-conduit.
Abstract:
A micromachined fluid handling device (600) includes a valve (138) made of reinforced parylene. A heater (440) heats a fluid to expand a thermopneumatic fluid (442). The heater (440) is formed on unsupported silicon nitride to provide a reduction in power.
Abstract:
Eine Anordnung von Kohlenstoff-Nanoröhren für einen Sensor oder einen Aktuator umfasst: mehrere schichtartig angeordnete Stapel hoher Dichte (110), zumindest einen schichtartig angeordneten Stapel geringer Dichte (120) und zumindest zwei elektrische Kontaktelemente (130). Die Stapel hoher Dichte (110) und die Stapel geringer Dichte (120) weisen jeweils eine Vielzahl von Kohlenstoff-Nanoröhren auf und der zumindest eine Stapel geringer Dichte (120) steht beidseitig in Kontakt zu jeweils einem der Stapel hoher Dichte (110), um diese in einem variierbaren Abstand (A) voneinander zu halten. Die zumindest zwei elektrischen Kontaktelemente (130) kontaktieren verschiedene Stapel hoher Dichte (110) elektrisch, um eine Änderung des variierbaren Abstandes (A) als ein elektrisches Sensorsignal zu erfassen, oder um den variierbaren Abstand (A) durch ein Anlegen einer elektrischen Spannung zwischen den zumindest zwei elektrischen Kontaktelementen (130) zu ändern.
Abstract:
A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.
Abstract:
The present invention relates to thin membranes (such as graphene windows) and methods of aligned transfer of such thin membranes to substrates. The present invention further relates to devices that include such thin membranes.
Abstract:
The invention relates to a method for producing at least one cavity in a microelectronic and/or micromechanical structure using at least one sacrificial layer and to a sensor or actuator produced therewith. The aim of the invention is to provide such a method or such a sensor or actuator, wherein the sacrificial layer has sufficient distance between the structure elements during preparation of the microelectronic and/or micromechanical structure, the sacrificial layer is easy to remove and, moreover, adhesion of the structure elements after removal of the sacrificial layer can be prevented in the simplest manner possible, wherein it should be possible to carry out the method steps at the lowest temperatures possible so as to be able to use polymeric functional layers, for example, for forming a sensor or actuator. The aim is achieved by a method of the type in question and by a sensor or actuator of the type mentioned above, wherein the sacrificial layer is composed of at least one solid matter sublimating below the melting temperature thereof at a sublimation rate of at least 1 nm/h, and wherein the sublimating solid matter has a melting temperature ranging between 18°C and 200°C.
Abstract:
The invention relates to a method for producing at least one deformable membrane micropump comprising a first substrate (10) and a second substrate (20) assembled together, the first substrate (10) comprising at least one cavity (12-2) and the second substrate (20) comprising at least one deformable membrane (22-2) arranged facing said cavity (12-2). Said method comprises the following steps: said cavity (12-2) is produced in the first substrate (10), then - the first (10) and second (20) substrates are assembled together, then - said deformable membrane (22-2) is produced in the second substrate (10).
Abstract:
A MEM device has a rigid body (30, 40, 60, 170, 250) and an actuator in the form of a flexible film (15, 50), able to move between a rolled up state away from the rigid body and a rolled out state against the rigid body, by a controllable driving force which causes an attraction of rolled up parts of the flexible film to the rigid body. The rigid body or the flexible film are patterned so that a given level of driving provides an attraction which differs at different parts of the pattern. By patterning to enable non uniform attraction at different parts, a range of attractions which could cause release of a given part of the film can be made narrower and thus more predictable. Thus the drive force needed to achieve initial separation can be controlled, or the roll up can be held stably at an intermediate point.