公开(公告)号：WO00058232A1

公开(公告)日：2000-10-05

申请号：PCT/US2000/005947

申请日：2000-03-07

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/014 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01446 ,  C03B2201/12 ,  C03B2203/26 ,  C03C2201/12 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/46

Abstract: A method for controlling the refractive index achieved using a fluorine dopant gas, wherein CF4 is employed as the dopant gas, and the soot preform (12) is doped using the CF4 for a time and temperature sufficient to result in a decrease in fluorine dopant nearest the surface which is in contact with the CF4 gas. Preform (12) is mounted on handle (11) which is fused to handle (14) and the assembly (20) is heated in a furnace muffle (15). The CF4 flows through furnace muffle (15), as indicated by arrows (17), and preferably contains a diluent gas such as helium. An optional centerflow gas (16) may be flowed through the centerline hole (18) in several embodiments, which consists of helium. The end of the porous preform (12) may optionally include a capillary tube (19) to prevent the muffle gases (17) from entering the preform.

Abstract translation: 控制使用氟掺杂剂气体实现的折射率的方法，其中使用CF 4作为掺杂剂气体，并且使用CF 4掺杂烟灰预制件（12）足够的时间和温度以使氟掺杂剂最近的降低 与CF4气体接触的表面。 预制件（12）安装在手柄（11）上，手柄（11）熔合到手柄（14）上，并且组件（20）在炉马弗炉（15）中被加热。 如箭头（17）所示，CF4流过炉马弗炉（15），并且优选地包含诸如氦气的稀释气体。 在由氦组成的几个实施例中，可选的中心流气体（16）可以流过中心线孔（18）。 多孔预型件（12）的端部可任选地包括毛细管（19），以防止马弗炉气体（17）进入预型件。

公开(公告)号：WO00055689A1

公开(公告)日：2000-09-21

申请号：PCT/US2000/003588

申请日：2000-02-11

IPC: C03B19/14 ,  C03B20/00 ,  C03C3/06 ,  C03C4/00 ,  G03F1/00 ,  G03F7/20 ,  G03F1/14

CPC classification number: C03C4/0085 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1492 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/66 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  G03F1/60

Abstract: The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.

Abstract translation: 本发明包括制造光刻光掩模坯料的方法。 本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。 制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。 该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。 将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟硅氧化物玻璃体。 该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

公开(公告)号：WO00024685A1

公开(公告)日：2000-05-04

申请号：PCT/JP1999/005995

申请日：1999-10-28

IPC: C03B8/04 ,  C03B19/14 ,  C03C3/06 ,  C03C23/00 ,  C03B20/00 ,  G02B1/00 ,  G03F1/16 ,  H01L21/027

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C23/002 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/16 ,  Y10S501/90 ,  Y10S501/905

Abstract: A synthetic quartz glass for optical use which is used through irradiation of rays of light from the ultraviolet region to the vacuum ultraviolet region, characterized in that the quartz glass contains fluorine and has a ratio of the intensity of a scattering peak at 2250 cm (I 2250) to that of a scattering peak at 800 cm (I 800), that is I 2250/I 800, in a laser Raman spectrum of 1 x 10 or less and an absorption coefficient of the light having a wave length of 245 nm of 2 x 10 cm or less.

Abstract translation: 一种用于光学用途的合成石英玻璃，其通过从紫外线区域到真空紫外线区域的光线照射而被使用，其特征在于，所述石英玻璃含有氟并且具有在2250cm -1处的散射峰的强度比， 1×10 -4或更小的激光拉曼光谱中，在800cm -1（I 800）处的散射峰的峰值（I 2250）为I 2250 / I 800，吸收 波长245nm的光的系数为2×10 -3 cm -1以下。

公开(公告)号：WO1991011401A1

公开(公告)日：1991-08-08

申请号：PCT/JP1991000134

申请日：1991-02-05

Applicant: THE FURUKAWA ELECTRIC CO., LTD. ,  OYOBE, Akira ,  NAKAMURA, Kazunori ,  KAGI, Nobuyuki ,  SASAKI, Yasumasa

Inventor： THE FURUKAWA ELECTRIC CO., LTD.

IPC: C03C03/06

CPC classification number: C03C13/045 ,  C03B19/1438 ,  C03B19/1453 ,  C03B37/01433 ,  C03B37/01446 ,  C03B37/016 ,  C03B37/01838 ,  C03B37/01853 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/095 ,  C03C4/12 ,  C03C23/0095 ,  C03C2201/12 ,  C03C2201/31 ,  C03C2201/3435 ,  C03C2201/3476 ,  C03C2201/36 ,  C03C2203/50 ,  Y10S65/16 ,  Y10S501/90

Abstract: A quartz glass doped with rare earth element, aluminium and further fluorine, and endowed with various characteristics such as practicable luminescent properties, high amplification gain, achievement of wider band, size reduction of elements, fusibility and connectivity of quartz glasses with each other, and so forth. This glass is not accompanied with crystallization inherent in this type of doped quartz glass in the course of its producton, so that it is transparent of course and contains no residual bubbles. Since the production process comprises a combination of a technique for forming a porous glass with a method of solution impregnation, it is possible to produce readily a quartz glass doped with both rare earth element and aluminum, having high purity and excellent transparency, and being useful as an active optical element.

公开(公告)号：US20180052280A1

公开(公告)日：2018-02-22

申请号：US15725014

申请日：2017-10-04

Applicant: YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY

Inventor： Lei ZHANG ,  Shengya LONG ,  Jihong ZHU ,  Jun WU ,  Ruichun WANG

IPC: G02B6/036 ,  C03C13/04

CPC classification number: G02B6/03683 ,  C03C3/06 ,  C03C13/045 ,  C03C13/046 ,  C03C2201/12 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2213/00 ,  G02B6/02009

Abstract: A doping optimized single-mode optical fiber with ultra low attenuation includes a core layer and cladding layers. The cladding layers has an inner cladding layer surrounding the core layer, a trench cladding layer surrounding the inner cladding layer, an auxiliary outer cladding layer surrounding the trench cladding layer, and an outer cladding layer surrounding the auxiliary outer cladding layer. The content of fluorine in the core layer is ≦0.5 wt %, ΔGe≦0.12%, Δn1≦0.12%. The content of fluorine in the inner cladding layer is 0.5-1.5 wt %, Δn2≦−0.14%. The content of fluorine in the trench cladding layer is 1-3 wt %, Δn3≦−0.25%. The content of fluorine in the auxiliary outer cladding layer is 0.5-2 wt %, Δn4≦−0.14%. The outer cladding layer is a pure silicon dioxide glass layer and/or a metal-doped silicon dioxide glass layer.

公开(公告)号：US09878933B2

公开(公告)日：2018-01-30

申请号：US14804673

申请日：2015-07-21

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Malte Schwerin ,  Martin Trommer ,  Steffen Zwarg

IPC: C03C3/06 ,  C03B19/06 ,  C03B37/014 ,  C03B19/14 ,  C03C13/04 ,  C03B23/045 ,  C03B23/09

CPC classification number: C03B19/066 ,  C03B19/1453 ,  C03B19/1461 ,  C03B23/045 ,  C03B23/095 ,  C03B23/099 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/0146 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/42 ,  C03C3/06 ,  C03C13/045 ,  C03C2201/12 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/36 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/46

Abstract: One aspect relates to a method for the manufacture of doped quartz glass. Moreover, one aspect relates to quartz glass obtainable according to the method including providing a soot body, treating the soot body with a gas, heating an intermediate product and vitrifying an intermediate product.

公开(公告)号：US20180002221A1

公开(公告)日：2018-01-04

申请号：US15689648

申请日：2017-08-29

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC: C03C13/04 ,  C03C3/06 ,  G02B6/028 ,  G02B6/02 ,  G02B6/036 ,  C03B37/014

CPC classification number: C03C13/046 ,  C03B37/014 ,  C03B37/01446 ,  C03B37/01453 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2203/23 ,  C03C3/06 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/12 ,  G02B6/02019 ,  G02B6/0281 ,  G02B6/0288 ,  G02B6/03627 ,  G02B6/03655 ,  G02B6/03683

Abstract: A co-doped optical fiber is provided having an attenuation of less than about 0.17 dB/km at a wavelength of 1550 nm. The fiber includes a core region in the fiber having a graded refractive index profile with an alpha of greater than 5. The fiber also includes a first cladding region in the fiber that surrounds the core region. Further, the core region has a relative refractive index of about −0.10% to about +0.05% compared to pure silica. In addition, the core region includes silica that is co-doped with chlorine at about 1.2% or greater by weight and fluorine between about 0.1% and about 1% by weight.

公开(公告)号：US20170371096A1

公开(公告)日：2017-12-28

申请号：US15700493

申请日：2017-09-11

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Hirotaka SAKUMA ,  Yoshiaki TAMURA ,  Keisei MORITA

IPC: G02B6/02 ,  C03B37/014 ,  C03C13/04

CPC classification number: G02B6/02 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01248 ,  C03B37/014 ,  C03B37/01453 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/22 ,  C03C3/06 ,  C03C13/042 ,  C03C13/045 ,  C03C25/607 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/50 ,  C03C2201/54

Abstract: An optical fiber containing alkali metal elements or the like in which Rayleigh scattering loss can be reduced is provided. An optical fiber includes a core composed of silica glass and a cladding which surrounds the core, has a refractive index lower than a refractive index of the core, and is composed of silica glass containing fluorine. The core contains a first group of dopants and a second group of dopants having a diffusion coefficient lower than a diffusion coefficient of the first group of dopants. The difference between the maximum value and the minimum value of residual stress in the optical fiber is 150 MPa or less.

公开(公告)号：US20170349478A1

公开(公告)日：2017-12-07

申请号：US15686313

申请日：2017-08-25

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina ,  William Rogers Rosch

IPC: C03C3/076 ,  C03B19/14 ,  C03B25/00 ,  C03C23/00 ,  C03B19/12 ,  C03C3/089 ,  C03C3/112 ,  C03C3/06 ,  C03B25/02

CPC classification number: C03C3/076 ,  C03B19/12 ,  C03B19/1453 ,  C03B25/00 ,  C03B25/02 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/089 ,  C03C3/112 ,  C03C23/007 ,  C03C2201/10 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2203/52

Abstract: Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

公开(公告)号：US09802852B2

公开(公告)日：2017-10-31

申请号：US14582237

申请日：2014-12-24

Applicant: NIKON CORPORATION

Inventor： Toshio Yoshinari ,  Tadahiko Saito

IPC: C03B19/14 ,  C03B11/00 ,  C03C3/06 ,  C03B32/00 ,  C03B23/00 ,  C03B23/049 ,  C03C3/04

CPC classification number: C03B19/1415 ,  C03B11/00 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1476 ,  C03B19/1492 ,  C03B23/0013 ,  C03B23/0496 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/04 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52

Abstract: A method for manufacturing an SiO2—TiO2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO2—TiO2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.