公开(公告)号：KR101430186B1

公开(公告)日：2014-08-13

申请号：KR1020130012376

申请日：2013-02-04

Applicant: 한국기술교육대학교 산학협력단 ,  (주)해피글로벌솔루션

Inventor： 성상만 ,  윤해근

IPC: G01D5/245

CPC classification number: G01D5/24452 ,  G01B7/30 ,  G01D5/20

Abstract: The present invention relates to a method for detecting a phase of a resolver and an apparatus thereof. According to the present invention, provided is the method for detecting a phase of a resolver comprising a step for acquiring the envelope of first and second voltages by measuring excitation voltages of first and second stator coils when a rotor coil whose rotation center is arranged in a starting point rotates in at least one phase; a step for acquiring first and second amplitude values of the envelope of the first and second voltages; and a step for calculating a random rotation angle by using the first and second amplitude values, and the voltages of the first and second stator coils measured from the random rotation angle of the rotor coil. According to the method for detecting a phase of a resolver and the apparatus thereof, a rotation angle can be accurately measured with respect to the alignment and misalignment states of the rotor coil formed in the resolver, and the output of the resolver is compensated and provided when the misalignment exists.

Abstract translation: 本发明涉及一种用于检测旋转变压器的相位的方法及其装置。 根据本发明，提供了一种用于检测分解器的相位的方法，包括用于通过测量第一和第二定子线圈的激励电压来获取第一和第二电压的包络的步骤，当旋转中心布置在 起点在至少一个相位旋转; 用于获取第一和第二电压的包络的第一和第二幅度值的步骤; 以及通过使用第一和第二振幅值以及从转子线圈的随机旋转角度测量的第一和第二定子线圈的电压来计算随机旋转角度的步骤。 根据用于检测旋转变压器的相位的方法及其装置，可以相对于形成在旋转变压器中的转子线圈的对准和未对准状态来精确地测量旋转角度，并且分解器的输出被补偿和提供 当存在不对准时。

公开(公告)号：KR101511258B1

公开(公告)日：2015-04-14

申请号：KR1020140085462

申请日：2014-07-08

Applicant: (주)해피글로벌솔루션

Inventor： 윤해근 ,  서강열

IPC: H01L21/677

CPC classification number: H01L21/67742

Abstract: 본발명은연직으로적층되어독립적으로회전함에따라듀얼로봇암을독립적으로회전시키는로봇암 커플러장치가균일한수명을유지하도록하는기술로서, 듀얼로봇암을독립적으로회전시키는한 쌍의로우어커플러와어퍼커플러에채용되는로우어베어링과어퍼베어링이원통형의진공챔버외벽에개별적으로고정연결됨으로써어퍼로봇암에의한하중으로어퍼베어링에가해지는스트레스와로우어로봇암에의한하중으로로우어베어링에가해지는스트레스를균일하게유지하고동시에각각의베어링에연결되는로우어커플러와어퍼커플러의유격발생을최소화하기위한기술에관한것이다. 본발명에따르면, 협동하여독립적으로회전하는듀얼로봇암에대해각각의로봇암을회전시키기위해연직으로적층되어각각의로봇암에연결되는로우어베어링과어퍼베어링에대해어퍼로봇암은어퍼베어링에하중이전달되도록하고이와독립적으로로우어로봇암은로우어베어링에하중이전달되도록하여로우어베어링과어퍼베어링의수명을균일하게할 수있는장점이있다.

Abstract translation: 本发明涉及一种均匀地保持机器人臂耦合器装置的使用寿命的技术，其垂直堆叠并单独旋转以独立地旋转双机器人手臂。 所述机器人臂耦合器装置包括：一对下连接器和上联接器，其独立地旋转双机器人手臂; 以及下轴承和上轴承，其分别固定在圆柱形真空室的外壁上并彼此连接。 因此，该技术被提供为通过上部机器人臂的负载来均匀地保持施加到上部轴承的应力，以及由下部机器人臂的负载施加到下部轴承的应力; 并且同时最小化分别连接到轴承的下联接器和上部联接器之间的间隙的产生。 根据本发明，机器人臂耦合器具有通过使上部机器人臂向上部轴承输送载荷而均匀地确保下部轴承和上部轴承的使用寿命的优点，同时使下部机器人手臂向 下轴承，其中下轴承和上轴承垂直地堆叠并分别连接到机器人手臂，以便旋转彼此协作并独立旋转的双机器人臂中的每一个。

公开(公告)号：KR101098556B1

公开(公告)日：2011-12-26

申请号：KR1020110006071

申请日：2011-01-20

Applicant: (주)해피글로벌솔루션

Inventor： 윤해근 ,  서강열 ,  박효근

IPC: B25J19/06 ,  G05B19/18 ,  B65G49/07 ,  H01L21/677

CPC classification number: H01L21/67742 ,  B25J9/1674 ,  G05B19/4062 ,  G05B2219/42306 ,  G05B2219/42307 ,  H01L21/67242 ,  H01L21/68707

Abstract: PURPOSE: A robot diagnosis system and a robot diagnosing method using the same are provided to prevent the damage of wafer and the malfunction of robot by monitoring the operation state of a robot in real time. CONSTITUTION: A robot diagnosis system comprises a capture module(30), a computation module(40) and a screen module(50). The capture module collects a command signal and a feedback signal from a driver module(20) and transmits to outside. The command signal is a pre-set reference value applied in a robot in order to activate a robot(T). The feedback signal copes with the actual motion of a robot. In order to grasp the operation state of a robot, the computation module generates the computation data about the vibration, torque, backlash and the location secession of a moving robot in response to the deviation of the command signal and feedback signal through a pre-set algorithm. The screen module displays the computation data about the vibration, torque, backlash and the location secession of a robot through the numerical values and graphic in real time.

Abstract translation: 目的：提供机器人诊断系统和使用该机器人诊断方法的机器人诊断方法，以通过实时监视机器人的操作状态来防止晶片的损坏和机器人的故障。 构成：机器人诊断系统包括捕获模块（30），计算模块（40）和屏幕模块（50）。 捕获模块从驱动器模块（20）收集命令信号和反馈信号，并将其发送到外部。 命令信号是为了激活机器人（T）而应用在机器人中的预设参考值。 反馈信号处理机器人的实际运动。 为了掌握机器人的操作状态，计算模块响应于命令信号和反馈信号通过预设的偏差产生关于移动机器人的振动，扭矩，间隙和位置分离的计算数据 算法。 屏幕模块通过数值和图形实时显示关于机器人的振动，扭矩，间隙和位置分离的计算数据。

公开(公告)号：KR101430062B1

公开(公告)日：2014-08-14

申请号：KR1020140050471

申请日：2014-04-28

Applicant: (주)해피글로벌솔루션

Inventor： 윤해근 ,  하재규

IPC: H01L21/02

CPC classification number: F15D1/02 ,  F15D1/08 ,  H01L21/02

Abstract: The present invention relates to a fluid acceleration type vacuum piping apparatus cable of preventing particles in reaction gas from being adsorbed in an inner wall of a vacuum pipe and accelerating a flow rate of reaction gas passing through a vacuum pipe during a process of discharging the reaction gas generated from a reaction chamber for a semiconductor process. More particularly, the present invention relates to a fluid acceleration type vacuum piping apparatus cable of preventing reaction gas flowing through the vacuum pipe from generating a vertex in an inner wall of the vacuum pip by mounting a vertex prevention pipe part at the center of the vacuum pipe to reduce the reduction of the flow rate of the reaction gas, accelerating a flow rate of reaction gas flowing through the vortex prevention pipe part by injecting gas at high pressure along an inner wall of the vortex prevention pipe part by mounting a gas injection pipe part at a center of the vortex prevention pipe part and a flow rate of the reaction gas by attenuating a friction force between inner sidewalls of the vortex prevention pipe part. According to the present invention prevents, a gas injection hole of the gas injection pipe part injects gas in a flow direction of the reaction gas into the vacuum pipe to accelerate a flow rate of the reaction gas. Therefore, particles are prevented from being adsorbed in an inner wall of the vacuum pipe.

Abstract translation: 本发明涉及一种防止反应气体中的颗粒吸附在真空管的内壁中并加速在反应过程中通过真空管的反应气体的流量的流体加速型真空管道装置电缆 从用于半导体工艺的反应室产生的气体。 更具体地，本发明涉及一种流体加速型真空管道装置电缆，其防止流经真空管的反应气体在真空管的内壁中产生顶点，通过将顶点防止管部分安装在真空中心 管，以减少反应气体的流量，通过沿着防涡流管部的内壁高压注入气体来加速流过防涡流管部的反应气体的流量，通过安装气体喷射管 部分在防涡流管部分的中心处，并且通过减弱防涡流管部分的内侧壁之间的摩擦力来产生反应气体的流量。 根据本发明，防止气体注入管部分的气体注入孔将反应气体的流动方向的气体注入真空管中，以加速反应气体的流量。 因此，防止了颗粒被吸附在真空管的内壁中。

公开(公告)号：KR1020130035140A

公开(公告)日：2013-04-08

申请号：KR1020110099417

申请日：2011-09-29

Applicant: (주)해피글로벌솔루션 ,  윤해근

Inventor： 윤해근 ,  박헌수 ,  박효근

IPC: H01L21/02

CPC classification number: H01L21/02 ,  B05B1/005 ,  F16L55/07 ,  F24F9/00

Abstract: PURPOSE: An air curtain system for preventing the diffusion of the chemical is provided to facilitate an installation process by arranging an air inhalation unit and an air spray unit in parallel. CONSTITUTION: An air spray unit(10) is mounted on the upper side of a door frame in a processing chamber and prevents the circulation of air between the inner side and the outer side of the processing chamber. The processing chamber generates an organic chemical element mixed with the air. An air inhalation unit(20) is mounted on the lower side of the door frame in the processing chamber and reduces air pressure in the processing chamber. [Reference numerals] (AA) Primary barrier film; (BB) Secondary barrier film;

Abstract translation: 目的：提供一种用于防止化学物质扩散的气幕系统，以便通过并排布置空气吸入单元和空气喷雾装置来实现安装过程。 构成：在处理室中的门框的上侧安装有空气喷射单元（10），并且防止处理室的内侧和外侧之间的空气循环。 处理室产生与空气混合的有机化学元素。 空气吸入单元（20）安装在处理室中的门框的下侧，并且减小处理室中的空气压力。 （附图标记）（AA）主要阻挡膜; （BB）二次阻隔膜;

公开(公告)号：KR101223756B1

公开(公告)日：2013-01-22

申请号：KR1020120106812

申请日：2012-09-25

Applicant: (주)해피글로벌솔루션 ,  박창기 ,  이희정

Inventor： 윤해근 ,  박창기 ,  문생민 ,  이희정 ,  박효근

IPC: G01R31/34 ,  G01M1/00

Abstract: PURPOSE: A belt and motor diagnosing system is provided to prevent loss of wafer processing due to sudden malfunction by detecting the initial signals of a malfunction and fixing it. CONSTITUTION: A belt and motor diagnosing system comprises the following steps: A capture module(20) collects a command signal delivered from a main controller(10) to a driver module(21) and pulse signals generated from an encoder, and sends them to the outside. A calculation module(30) creates calculation data about the speed, acceleration, drive time, vibration, backlash, and position separation of a motor, a belt, and a moving shaft working by a preset algorism based on command signals and pulse signals sent from capture modules. A display module(40) displays the calculation data generated by the calculation module as a value and a graphic in the real time. [Reference numerals] (10) Main controller; (20) Capture module; (21) Driver; (30) Calculation module; (40) Display module; (50) Central control part; (51) Monitor; (A) Movement axis; (B) Belt; (E) Encoder; (L) Loader; (M) Motor

Abstract translation: 目的：提供皮带和电机诊断系统，以通过检测故障的初始信号并进行固定来防止由于突然故障导致的晶片处理损失。 构成：皮带和电动机诊断系统包括以下步骤：捕获模块（20）收集从主控制器（10）传送到驱动器模块（21）的命令信号和从编码器产生的脉冲信号，并将它们发送到 外。 计算模块（30）基于由命令信号和脉冲信号发送的预设算法，创建关于电机，皮带和移动轴的速度，加速度，驱动时间，振动，间隙和位置分离的计算数据 捕获模块。 显示模块（40）将由计算模块生成的计算数据实时显示为值和图形。 （附图标记）（10）主控制器; （20）捕捉模块; （21）司机; （30）计算模块; （40）显示模块; （50）中央控制部分; （51）监视器; （A）运动轴; （B）皮带; （E）编码器; （L）装载机; （M）电机