VERTICAL OUTPUT COUPLERS FOR PHOTONIC DEVICES

    公开(公告)号:EP3286587A1

    公开(公告)日:2018-02-28

    申请号:EP16783759

    申请日:2016-04-20

    Inventor: LAMBERT DAMIEN

    Abstract: A method forms a vertical output coupler for a waveguide that propagates light along a horizontal propagation direction, through a waveguide material that overlies a buried oxide layer. The method includes etching the waveguide to remove a portion of the waveguide. The etching forms at least a first plane that is at an edge of the waveguide, is adjacent to the removed portion of the waveguide, and is tilted at a vertical angle between 20 degrees and 70 degrees with respect to the propagation direction. The method further includes coating the first tilted plane with a reflective metal to form a mirror, such that the mirror reflects the light into a direction having a vertical component.

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