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公开(公告)号:CN1215537C
公开(公告)日:2005-08-17
申请号:CN96114520.X
申请日:1996-11-08
Applicant: 富士通株式会社
CPC classification number: H01L21/4832 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/67138 , H01L21/6833 , H01L23/3107 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L24/97 , H01L25/105 , H01L29/0657 , H01L2224/05554 , H01L2224/11 , H01L2224/1134 , H01L2224/13 , H01L2224/13099 , H01L2224/16 , H01L2224/45015 , H01L2224/45144 , H01L2224/45565 , H01L2224/4569 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/48464 , H01L2224/48465 , H01L2224/48471 , H01L2224/4848 , H01L2224/48599 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/7865 , H01L2224/85001 , H01L2224/85051 , H01L2224/85181 , H01L2224/85205 , H01L2224/85439 , H01L2224/85444 , H01L2224/85455 , H01L2224/85664 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2225/1035 , H01L2225/107 , H01L2225/1094 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10158 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/18161 , H01L2924/18165 , H01L2924/3011 , H05K1/181 , H05K3/303 , H05K3/305 , H05K3/3436 , H05K3/3442 , H05K2201/09045 , H05K2201/10727 , H05K2201/10977 , Y02P70/613 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 一种元件,它包含以下部分:芯片(111);封装芯片的树脂封壳(112,151,314),该树脂封壳的安装面上设有树脂凸部(117,154,318),树脂凸部上设有相应的金属膜(113,155,315)。芯片的电极焊盘与金属膜由连接部分(118,101,163,245,313,343,342)电连接,每个所述树脂凸部都被所述金属膜整体地覆盖。
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公开(公告)号:CN100386875C
公开(公告)日:2008-05-07
申请号:CN200410085187.6
申请日:2004-09-30
Applicant: 富士通株式会社
CPC classification number: H01L23/3114 , H01L23/49827 , H01L24/11 , H01L24/13 , H01L2224/0401 , H01L2224/05017 , H01L2224/05558 , H01L2224/1147 , H01L2224/13082 , H01L2224/13144 , H01L2224/13155 , H01L2224/1357 , H01L2224/136 , H01L2224/16 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/181 , H01L2924/30105 , H01L2924/00014 , H01L2224/13099 , H01L2924/00
Abstract: 本发明提供半导体器件。该半导体器件包括:半导体芯片;形成在半导体芯片上的布线层;在第一端处连接到布线层的柱状电极和形成在半导体芯片上的封装树脂。在该半导体器件中,柱状电极具有与第一端相对、从封装树脂突出的第二端,外部连接部件在第二端处连接到柱状电极,使得外部连接部件与封装树脂的表面分离。本发明可以防止在形成外部连接端子时和在安装半导体器件时相邻外部连接端子的短路(桥接);此外,通过使外部连接端子和封装树脂彼此分离,可以使封装树脂变薄,并且可以减小半导体器件中存在的弯曲量。
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公开(公告)号:CN1307698C
公开(公告)日:2007-03-28
申请号:CN200410047635.3
申请日:1996-11-08
Applicant: 富士通株式会社
CPC classification number: H01L21/4832 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/67138 , H01L21/6833 , H01L23/3107 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L24/97 , H01L25/105 , H01L29/0657 , H01L2224/05554 , H01L2224/11 , H01L2224/1134 , H01L2224/13 , H01L2224/13099 , H01L2224/16 , H01L2224/45015 , H01L2224/45144 , H01L2224/45565 , H01L2224/4569 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/48464 , H01L2224/48465 , H01L2224/48471 , H01L2224/4848 , H01L2224/48599 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/7865 , H01L2224/85001 , H01L2224/85051 , H01L2224/85181 , H01L2224/85205 , H01L2224/85439 , H01L2224/85444 , H01L2224/85455 , H01L2224/85664 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2225/1035 , H01L2225/107 , H01L2225/1094 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10158 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/18161 , H01L2924/18165 , H01L2924/3011 , H05K1/181 , H05K3/303 , H05K3/305 , H05K3/3436 , H05K3/3442 , H05K2201/09045 , H05K2201/10727 , H05K2201/10977 , Y02P70/613 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 一种元件,它包含以下部分:芯片(111);封装芯片的树脂封壳(112,151,314),该树脂封壳的安装面上设有树脂凸部(117,154,318),树脂凸部上设有相应的金属膜(113,155,315)。芯片的电极焊盘与金属膜由连接部分(118,101,163,245,313,343,342)电连接,每个所述树脂凸部都被所述金属膜整体地覆盖。
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公开(公告)号:CN101136344A
公开(公告)日:2008-03-05
申请号:CN200710182321.8
申请日:2004-09-30
Applicant: 富士通株式会社
CPC classification number: H01L23/3114 , H01L23/49827 , H01L24/11 , H01L24/13 , H01L2224/0401 , H01L2224/05017 , H01L2224/05558 , H01L2224/1147 , H01L2224/13082 , H01L2224/13144 , H01L2224/13155 , H01L2224/1357 , H01L2224/136 , H01L2224/16 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/181 , H01L2924/30105 , H01L2924/00014 , H01L2224/13099 , H01L2924/00
Abstract: 本发明提供一种制造半导体器件的方法。该方法包括如下步骤:在半导体衬底上形成布线层;在该布线层上形成具有一开口的抗蚀层,该开口用于在该布线层上形成一柱状电极,并且利用该抗蚀层在该开口中形成一导电金属作为该柱状电极,使得该导电金属的厚度超过该抗蚀层的厚度;在除去该抗蚀层之后,在该半导体衬底上形成封装树脂;进行使所形成的封装树脂的厚度变小的处理。本发明可以防止在形成外部连接端子时和在安装半导体器件时相邻外部连接端子的短路(桥接);此外,通过使外部连接端子和封装树脂彼此分离,可以使封装树脂变薄,并且可以减小半导体器件中存在的弯曲量。
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公开(公告)号:CN101086979A
公开(公告)日:2007-12-12
申请号:CN200610163974.7
申请日:2006-12-01
Applicant: 富士通株式会社
IPC: H01L23/00 , H01L23/522 , H01L21/00 , H01L21/768 , H01L21/50
CPC classification number: H01L23/3114 , H01L21/561 , H01L21/563 , H01L23/3171 , H01L23/564 , H01L24/03 , H01L24/05 , H01L24/13 , H01L24/94 , H01L2224/0231 , H01L2224/0236 , H01L2224/024 , H01L2224/0401 , H01L2224/13022 , H01L2224/13023 , H01L2224/13099 , H01L2224/13111 , H01L2224/16 , H01L2224/274 , H01L2224/2908 , H01L2224/29111 , H01L2224/73203 , H01L2224/83104 , H01L2224/94 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/0132 , H01L2924/0133 , H01L2924/014 , H01L2924/12044 , H01L2924/1579 , H01L2924/181 , H01L2924/19043 , H01L2924/30105 , H01L2924/351 , H01L2924/3512 , H01L2924/00 , H01L2924/00014 , H01L2224/03 , H01L2224/11
Abstract: 一种半导体器件,包括:半导体衬底,其中形成有多个功能元件;以及多层互连层,其设置于该半导体衬底的上方,该多层互连层包括相互连接多个功能元件的布线层,并且包括层间绝缘层,其中,形成布线层的区域由槽形成部包围,该槽形成部穿透该多层互连层;并且该槽形成部填充有有机绝缘材料。
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公开(公告)号:CN1697148A
公开(公告)日:2005-11-16
申请号:CN200410085187.6
申请日:2004-09-30
Applicant: 富士通株式会社
CPC classification number: H01L23/3114 , H01L23/49827 , H01L24/11 , H01L24/13 , H01L2224/0401 , H01L2224/05017 , H01L2224/05558 , H01L2224/1147 , H01L2224/13082 , H01L2224/13144 , H01L2224/13155 , H01L2224/1357 , H01L2224/136 , H01L2224/16 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/181 , H01L2924/30105 , H01L2924/00014 , H01L2224/13099 , H01L2924/00
Abstract: 本发明提供半导体器件及制造该半导体器件的方法。该半导体器件包括:半导体芯片;形成在半导体芯片上的布线层;在第一端处连接到布线层的柱状电极和形成在半导体芯片上的封装树脂。在该半导体器件中,柱状电极具有与第一端相对、从封装树脂突出的第二端,外部连接部件在第二端处连接到柱状电极,使得外部连接部件与封装树脂的表面分离。
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公开(公告)号:CN1549317A
公开(公告)日:2004-11-24
申请号:CN200410047635.3
申请日:1996-11-08
Applicant: 富士通株式会社
CPC classification number: H01L21/4832 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/67138 , H01L21/6833 , H01L23/3107 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L24/97 , H01L25/105 , H01L29/0657 , H01L2224/05554 , H01L2224/11 , H01L2224/1134 , H01L2224/13 , H01L2224/13099 , H01L2224/16 , H01L2224/45015 , H01L2224/45144 , H01L2224/45565 , H01L2224/4569 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/48464 , H01L2224/48465 , H01L2224/48471 , H01L2224/4848 , H01L2224/48599 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/7865 , H01L2224/85001 , H01L2224/85051 , H01L2224/85181 , H01L2224/85205 , H01L2224/85439 , H01L2224/85444 , H01L2224/85455 , H01L2224/85664 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2225/1035 , H01L2225/107 , H01L2225/1094 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10158 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/18161 , H01L2924/18165 , H01L2924/3011 , H05K1/181 , H05K3/303 , H05K3/305 , H05K3/3436 , H05K3/3442 , H05K2201/09045 , H05K2201/10727 , H05K2201/10977 , Y02P70/613 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 一种元件,它包含以下部分:芯片(111);封装芯片的树脂封壳(112,151,314),该树脂封壳的安装面上设有树脂凸部(117,154,318),树脂凸部上设有相应的金属膜(113,155,315)。芯片的电极焊盘与金属膜由连接部分(118,101,163,245,313,343,342)电连接,每个所述树脂凸部都被所述金属膜整体地覆盖。
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公开(公告)号:CN1152797A
公开(公告)日:1997-06-25
申请号:CN96114520.X
申请日:1996-11-08
Applicant: 富士通株式会社
CPC classification number: H01L21/4832 , H01L21/561 , H01L21/565 , H01L21/568 , H01L21/67138 , H01L21/6833 , H01L23/3107 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L24/97 , H01L25/105 , H01L29/0657 , H01L2224/05554 , H01L2224/11 , H01L2224/1134 , H01L2224/13 , H01L2224/13099 , H01L2224/16 , H01L2224/45015 , H01L2224/45144 , H01L2224/45565 , H01L2224/4569 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/48464 , H01L2224/48465 , H01L2224/48471 , H01L2224/4848 , H01L2224/48599 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/7865 , H01L2224/85001 , H01L2224/85051 , H01L2224/85181 , H01L2224/85205 , H01L2224/85439 , H01L2224/85444 , H01L2224/85455 , H01L2224/85664 , H01L2224/85986 , H01L2224/92 , H01L2224/92247 , H01L2224/97 , H01L2225/1035 , H01L2225/107 , H01L2225/1094 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10158 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/18161 , H01L2924/18165 , H01L2924/3011 , H05K1/181 , H05K3/303 , H05K3/305 , H05K3/3436 , H05K3/3442 , H05K2201/09045 , H05K2201/10727 , H05K2201/10977 , Y02P70/613 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 一种元件,它包含以下部分:芯片(111);封装芯片的树脂封壳(112,151,314),该树脂封壳的安装面上设有树脂凸部(117,154,318)。树脂凸部上设有相应的金属膜(113,155,315)。芯片电极焊盘与金属膜由连接部分(118,101,163,245,313,343,342)接通。
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