公开(公告)号：KR101552364B1

公开(公告)日：2015-09-10

申请号：KR1020100094884

申请日：2010-09-30

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 와까모또유끼히로 ,  다께꾸마다까시 ,  곤도오다이스께

IPC: B05D1/26 ,  H01L21/027 ,  G03F7/26

Abstract: 본발명의과제는프라이밍처리의신뢰성을보장하면서세정액의사용량을한층삭감하는것이다. 슬릿노즐(72)의토출구를프라이밍롤러(14)의정상부에대해평행하게대향시켜, 슬릿노즐(72)에일정량의레지스트액(R)을토출시켜, 그대로소정시간방치한다. 다음에, 프라이밍롤러(14)의회전을개시하여, 프라이밍롤러(14)의외주면상에레지스트액(R)을권취한다. 계속해서, 프라이밍롤러(14)의회전속도를한번에올려, 슬릿노즐(72)측과프라이밍롤러(14)측으로나뉘도록레지스트액(R)의액막을분리하고, 분리한후에도프라이밍롤러(14)의회전을그대로계속시켜, 프라이밍롤러(14) 상의레지스트액막(RM)을소정의대기용회전각위치에오게한다.

公开(公告)号：KR1020110044141A

公开(公告)日：2011-04-28

申请号：KR1020100094884

申请日：2010-09-30

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 와까모또유끼히로 ,  다께꾸마다까시 ,  곤도오다이스께

IPC: B05D1/26 ,  H01L21/027 ,  G03F7/26

CPC classification number: B05D1/265 ,  G03F7/16 ,  G03F7/2041 ,  G03F7/265 ,  G03F7/70341 ,  H01L21/0274

Abstract: PURPOSE: A priming method and a priming apparatus are provided to improve the reliability of a priming process by preventing the sagging phenomenon a coating liquid film on a priming roller. CONSTITUTION: Coating liquid(R) is discharged to a lit nozzle(72). A priming roller(14) is stopped and is maintained. The priming roller is rotated to wind a part of the coating liquid on the priming roller as a first coating liquid film. The first coating liquid film is reached to a first stand-by rotation angle, and the rotation of the priming roller is stopped. The first coating liquid film is naturally dried. The first coating liquid film is eliminated by a cleaning process.

Abstract translation: 目的：提供起动方法和起动装置，以通过防止起动辊上的涂覆液膜的下垂现象来提高起动过程的可靠性。 构成：将涂布液（R）排放到点燃的喷嘴（72）。 起动辊（14）停止并保持。 使起动辊旋转以将涂布液的一部分卷绕在起动辊上作为第一涂布液膜。 第一涂布液膜达到第一待机旋转角度，停止启动辊的旋转。 第一涂布液膜自然干燥。 通过清洗处理消除第一涂布液膜。