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公开(公告)号：KR102027675B1
公开(公告)日：2019-10-01
申请号：KR1020180007042
申请日：2018-01-19
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01J37/32 , H01L21/67 , H01L21/027
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