公开(公告)号：KR1020130009700A

公开(公告)日：2013-01-23

申请号：KR1020120076764

申请日：2012-07-13

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 사카우에히로미츠 ,  오자와마시히토 ,  후루야유이치 ,  시노다나나코 ,  히로세가츠히토 ,  이나가키모리히토

IPC: H01L21/677 ,  H01L21/68 ,  B65G49/07 ,  G06F19/00

CPC classification number: H01L21/67742 ,  B25J9/043 ,  B25J9/106 ,  B25J9/1633 ,  B25J15/009 ,  H01L21/68707

Abstract: PURPOSE: A substrate transfer device, a substrate processing system, a substrate transfer method, and a storage medium are provided to suppress misalignment of a substrate by controlling a driving unit to transfer the substrate to a vacuum processing unit by correcting the misalignment of the substrate. CONSTITUTION: A rotating stand(40) is rotatably installed on a bottom plate(5a) of a transfer chamber. A first multi-joint arm device(41) and a second multi-joint arm device(42) include picks(41c,42c) which maintain a wafer. A driving link device(43) selectively bends one of the first multi-joint arm device and the second multi-joint arm device. A driving unit(44) includes a driving device to rotate the rotating stand and a driving device to move the driving link device. A transfer control unit(45) controls the transfer operation of the substrate by the pick. [Reference numerals] (30) Whole control unit; (45) Transfer control unit

Abstract translation: 目的：提供基板转印装置，基板处理系统，基板转印方法和存储介质，以通过控制驱动单元来抑制基板的未对准，以通过校正基板的未对准来将基板转印到真空处理单元 。 构成：旋转支架（40）可旋转地安装在传送室的底板（5a）上。 第一多关节臂装置（41）和第二多关节臂装置（42）包括保持晶片的拾取件（41c，42c）。 驱动连杆装置（43）选择性地弯曲第一多关节臂装置和第二多关节臂装置中的一个。 驱动单元（44）包括用于使旋转支架旋转的驱动装置和用于移动驱动连杆装置的驱动装置。 转移控制单元（45）通过拾取器控制衬底的转移操作。 （附图标记）（30）整体控制单元; （45）转移控制单元