公开(公告)号：KR1020100036996A

公开(公告)日：2010-04-08

申请号：KR1020090092381

申请日：2009-09-29

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 아메미야히로시 ,  가타기리히로후미 ,  오츠카사토시 ,  후치가미신지

IPC: G01R31/26 ,  H01L21/66

CPC classification number: G01R31/2872 ,  G01R31/2601 ,  G01R31/2862 ,  G01R31/2874 ,  G01R31/2881

Abstract: PURPOSE: By compacting the circulator of the air and stabilizing the dew point within the prober chamber at the same time it highs the reliability, the inspection apparatus and inspecting method can practice the low temperature inspection. CONSTITUTION: A circulator(13) is arranged according to the rear side of the prober chamber(12). Circulator circulates the dry air within the prober chamber. A control device(14) controls the instrument including the main chuck within circulator and prober chamber. The vent unit circulates the dry air within the prober chamber. The filter unit eliminates the dust and dust from the dry air circulating through the vent unit.

Abstract translation: 目的：通过压缩空气循环器，同时稳定探针室内的露点，同时高可靠性，检测仪器和检查方法可以实施低温检测。 构成：循环器（13）根据探测室（12）的后侧布置。 循环器在干燥室内循环干燥空气。 控制装置（14）在循环器和探针室内控制包括主卡盘的仪器。 通风单元将干燥空气循环在探测室内。 过滤器单元消除了通过排气单元循环的干燥空气中的灰尘和灰尘。

公开(公告)号：KR101208800B1

公开(公告)日：2012-12-06

申请号：KR1020090092381

申请日：2009-09-29

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 아메미야히로시 ,  가타기리히로후미 ,  오츠카사토시 ,  후치가미신지

IPC: G01R31/26 ,  H01L21/66

Abstract: 본발명은공기의순환장치를콤팩트화하는동시에프로버실내의이슬점을안정화하여, 신뢰성이높은저온검사를실행할수 있는검사장치및 검사방법을제공한다. 본발명의검사장치(10)는프로버실(12)과, 프로버실(12)의배면을따라배치되는동시에프로버실(12) 내의건조공기를순환시키는순환장치(13)와, 순환장치(13) 및프로버실(12) 내의탑재대를포함하는기기를제어하는제어장치(14)를구비하고, 순환장치(13)는프로버실(12) 내의건조공기를순환시키는송풍유닛(131)과, 송풍유닛(131)을통해순환되는건조공기중으로부터티끌과먼지를제거하는필터유닛(132)을구비하고있다.