公开(公告)号：KR1020080005662A

公开(公告)日：2008-01-15

申请号：KR1020060064263

申请日：2006-07-10

Applicant: 삼성전자주식회사

Inventor： 강태우 ,  임장빈 ,  배종환 ,  이병삼 ,  김대운

IPC: H01L21/02

CPC classification number: H01L21/02 ,  H01L21/6719 ,  H01L21/67201

Abstract: An apparatus for attaching or detaching a cover of a chamber is provided to prevent a shower head attached to a bottom surface of the cover from being damaged by preventing the cover and a container body from being collided with each other at the time of attaching or detaching the cover. An apparatus(100) for attaching or detaching a cover(14) of a chamber includes a supporting unit(110) and a driving unit(120). The supporting unit is attached to the cover attachable to or detachable from a container body(12). The supporting unit is attached to the container body. The driving unit linearly moves the supporting unit so as to attach or detach the cover to or from the container body. Plural driving units are arranged along the circumference of the container body at a predetermined interval. The supporting unit is projected to the outside of the cover. The supporting unit and the driving unit are attachable or detachable.

Abstract translation: 提供一种用于安装或拆卸室的盖子的装置，以防止在安装或拆卸时防止盖子和容器主体相互碰撞而附着在盖的底表面上的淋浴头被损坏 封面。 用于安装或拆卸腔室的盖子（14）的装置（100）包括支撑单元（110）和驱动单元（120）。 支撑单元附接到可附接到容器主体（12）上或从容器主体（12）拆卸的盖子。 支撑单元附接到容器主体。 驱动单元直线地移动支撑单元，以将盖与容器主体相连或者分离。 多个驱动单元以预定间隔沿容器主体的圆周布置。 支撑单元投影到盖的外侧。 支撑单元和驱动单元是可附接或可拆卸的。