Abstract:
A skid steering-type remote-controllable unmanned sprayer includes: wheels installed at the both lateral sides; a chemical spray device to spray a chemical through a chemical spray nozzle; and a boom to locate the chemical spray nozzle to spray the chemical to a target. The sprayer may include: a manipulation unit which includes switches for a user to manually or automatically control the driving, posture, and chemical spraying of the skid steering-type remote-controllable unmanned sprayer and generates selection signals according to the manipulation of the switches; a sensor unit which includes sensors for sensing the driving status and speed of the skid steering-type remote-controllable unmanned sprayer and neighboring obstacles and generates sensor signals by the sensors; a control unit which calculates pre-compensation position data, which is not yet compensated, from the sensors, compensates the observation errors included in the pre-compensation position data using the expanded Kalman filter to calculate post-compensation position data, determines the next target position according to the current position determined based on the post-compensation position data, the detected moving object guiding lines, and a certain operation schedule, and generates a wheel control signal for operating the wheels to move to the next target position; and a wheel driving unit which drives the wheels based on the wheel control signal.
Abstract:
A system for measuring displacement amount and a method for correcting the error in a laser interferometer using a capacitance sensor are provided to improve accuracy in measuring displacement of the laser interferometer by calculating average value. A system for measuring displacement amount in a laser interferometer using a capacitance sensor comprises a detecting unit, a measuring unit, a first stage(150), a second stage(140), and a computer(200). The laser interferometer measures displacement of a target. The detecting unit measures displacement of the target from the laser interferometer. The measuring unit converts distance measured by the detecting unit into a numerical value. The first stage reciprocates on one axis to measure millimeter displacement. The second stage is mounted on the first stage and reciprocates on one axis to measure nanometer and micrometer displacement. The computer calculates displacement value on the basis of a measured value of the laser interferometer obtained by the measuring unit and a value measured on the second stage.
Abstract:
A system for compensating error of laser interferometer and a method thereof are provided to measure displacement similar to resolution of a corresponding interferometer without an expensive measuring circumstance. A system for compensating error of laser interferometer includes an interferometer(50) using a single path heterodyne laser(51), a measuring unit(60) to measure a displacement using the interferometer, and a correcting unit(70) to correct an error of the measurement measured by the measuring unit using double Kalman filter algorithm. The correcting unit models measurement noise due to environmental error and reduces the measurement noise to increase measuring precision. The interferometer includes a laser to output a laser beam with a first frequency(f1) and a second frequency(f2), a beam splitter(52) installed on an optical path of the laser to split the first frequency and the second frequency, a first quarter plate installed on an optical path of the first frequency, a movable mirror(54) installed in a driving unit, a second quarter plate(55) installed on an optical path of the second frequency, and a fixed mirror(56) fixed on the optical path of the second frequency.
Abstract:
PURPOSE: A laser interferometer compensating apparatus using an extended kalman filter is provided to enable high-precision measurement by removing frequency mixing and errors resulting from the frequency mixing in a heterodyne laser interferometer for nano-scale measurement. CONSTITUTION: A laser interferometer compensating apparatus comprises an Ir operation unit(210), an Im operation unit(220), a pre-preprocessing unit(230), a database(260), and an extended kalmam filter(240). The Ir operation unit creates a reference signal from the signal inputted from a heterodyne laser interferometer. The Im operation unit creates a measurement signal from the signal inputted from the heterodyne laser interferometer. The pre-processing unit receives the reference signal and the measurement signal and outputs a signal including phase information. The database stores noise dispersion information of the extended kalmam filter. The extended kalmam filter corrects an error using the noise dispersion information of the database and information on the moving speed of a target object in the heterodyne laser interferometer.
Abstract:
A system for compensating laser interferometer and a method thereof are provided to estimate an optimal correction parameter using position information of a static capacity sensor and position information of a heterodyne laser interferometer. A system for compensating laser interferometer includes a measuring unit(10) to measure a displacement of a target, a preprocessing unit(20) to pre-process an output signal of the measuring unit, a correcting unit(30) to set a correction parameter to correct the measurement of the target processed by the preprocessing unit, and a mapper(40) to correct and output the measurement pre-processed by the preprocessing unit using the correction parameter set by the correcting unit. The correction value outputted by the mapper is outputted through an output unit(50). The measuring unit includes a heterodyne laser system(11) having two different frequencies and using two light sources orthogonally polarized with each other and a static sensor(12) to precisely measure a position with few nanometer unit precision. The heterodyne laser system has a performance of representing the position information of the target as an intensity of a signal.
Abstract:
PURPOSE: Error correction device and method of a heterodyne laser interferometer are provided to correct errors to adapt to the environment change by performing an error correction operation suitable for a new environment. CONSTITUTION: An error correction device of a heterodyne laser interferometer comprises a capacitance sensor(270), a pre-processing unit(240), a WLS processing unit(250), an error correction unit(280) and a CD data processing unit(260). The capacitance sensor measures the distance to an object. The pre-processing unit receives a reference signal and a measurement signal from the heterodyne laser interferometer(100) to measure the intensity. The WLS processing unit applies the measured intensity of the measurement signal and the reference signal to a WLS technique to obtain a WLS compensation parameter. The error correction unit applies the measured intensity of the measurement signal and the reference signal to the WLS compensation parameter to correct errors. Using the distance to the object output from the capacitance sensor, the CD data processing unit computes and outputs the intensity of a corresponding basic signal. The pre-processing unit comprises a phase retarder and a multiplier and a filter.
Abstract:
본 발명은 헤테로다인 레이저 간섭계의 보정시스템 및 출력보정방법에 관한 것이다. 본 발명에 따른 보정시스템은 측정 대상물에 대한 위치를 측정하여 측정값을 출력하는 헤테로다인 레이저 간섭계와; 상기 측정 대상물의 위치를 측정하여 제2 측정값을 출력하는 정전용량센서와; 상기 측정값 및 상기 제2 측정값을 이용하여 반복 최소 자승법을 통해 상기 측정값을 제1 보정값으로 보정하는 제1 보정부와; 상기 제1 보정값 및 상기 제2 측정값을 각각 입력값 및 목표값으로 하여 신경망 회로를 생성하고, 상기 제1 보정값을 상기 신경망 회로의 입력으로 하여 제2 보정값을 생성하는 제2 보정부와; 상기 제2 보정부로부터 출력되는 상기 제2 보정값에 기초하여 상기 측정값에 대한 보정 측정값을 생성하는 보정값 출력부를 포함하는 것을 특징으로 한다. 이에 따라, 정전용량센서로부터의 출력을 기본신호로 하여 반복 최소 자승법을 이용하여 헤테로다인 레이저 간섭계의 출력이 갖는 비선형성을 보정하고, 소음, 외란, 진동 등과 같은 불특정 요소에서 오는 환경적 오차를 신경망 회로를 이용하여 보정함으로써, 헤테로다인 레이저 간섭계의 출력의 정밀도를 향상시켜 선형성 및 환경적 요소에 적응적인 시스템의 구현이 가능하게 된다.
Abstract:
An optimal control method based on the sliding mode control applied to the ultra-precision positioning system is provided to minimized the rising time, to remarkably reduce the phenomenon at the target position and to be strong in non-linearity by the external noise. The system model about the ultra-precision positioning system is determined by reflecting The LQ control algorithm and the state observation algorithm. The general solution of the state removing the noise element from the system model is produced. The sliding surface according to the sliding mode control algorithm about the system model based on the general solution is determined. The feedback gain applied to the sliding surface through the LQ control algorithm is produced. The sliding mode controller is set by applying the sliding surface and the feedback gain to the sliding mode control algorithm.