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公开(公告)号:KR102118734B1
公开(公告)日:2020-06-09
申请号:KR1020180107352
申请日:2018-09-07
Applicant: 한국과학기술연구원
Inventor: 전영민 , 김용태 , 김춘근 , 김영환 , 최민호 , 권세현
IPC: C01B19/00 , H01L45/00