전구체를 이용한 CIS 박막의 제조방법
    1.
    发明授权
    전구체를 이용한 CIS 박막의 제조방법 有权
    使用前置体的CIS薄膜的制造方法

    公开(公告)号:KR101124226B1

    公开(公告)日:2012-03-27

    申请号:KR1020110013259

    申请日:2011-02-15

    CPC classification number: Y02E10/50 H01L31/0445 H01L31/0216

    Abstract: PURPOSE: A method for manufacturing a CIS thin film is provided to mass-produce a CuInSe2 photoactive layer with a solution process. CONSTITUTION: A CuInSe2 nano particle is made by using copper amino alkoxide, indium amino alkoxide and selenium powder. A coating layer is formed by coating a molybdenum film of a glass substrate with coating solutions including CuInSe2 nano particles. A CuInSe2 thin film is formed by thermally processing the glass substrate with the coating layer between 300 and 600 degrees centigrade.

    Abstract translation: 目的:提供一种用于制造CIS薄膜的方法,以大量生产具有溶液工艺的CuInSe 2光敏层。 构成:使用铜氨基醇盐,铟氨基醇盐和硒粉制成CuInSe2纳米颗粒。 通过用包括CuInSe 2纳米颗粒的涂布溶液涂覆玻璃基板的钼膜来形成涂层。 CuInSe 2薄膜是通过在300〜600摄氏度的涂层之间热处理玻璃基板而形成的。

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