Abstract:
PROBLEM TO BE SOLVED: To provide a low dielectric thermosetting resin which can be formed at a low temperature, is excellent in heat resistance, and can lighten plasma displays. SOLUTION: Provided is a thermosetting resin prepared by hydrolyzing a compound (1) (wherein, R 1 to R 3 are each identically or differently a straight chain or branched chain 1 to 4C alkyl group; R 4 is H or a straight chain or branched chain 1 to 4C alkyl group) and a compound (2) (wherein, R 5 to R 8 are each identically or differently a straight chain or branched chain 1 to 4C alkyl group) in a (1):(2) molar ratio of 70:30 to 90:10, and having a mol.wt. of ≥10,000. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a cyclosiloxane compound capable of giving a positive resist composition having excellent physical properties as a resist, and to provide a positive resist composition using the cyclosiloxane compound. SOLUTION: The cyclosiloxane compound is produced by the hydrosilylation of a compound expressed by formula (1) and/or a compound prepared by the hydrosilylation of the compound expressed by formula (1) with a divinyl compound expressed by formula (2): CH 2 =CH-R 2 -CH=CH 2 , and a compound expressed by formula (3): CH 2 =CR 3 -(R 4 ) h -T. COPYRIGHT: (C)2009,JPO&INPIT