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公开(公告)号:EP3144279A4
公开(公告)日:2018-04-18
申请号:EP15780571
申请日:2015-03-18
Applicant: ADEKA CORP
Inventor: KOBAYASHI ATSUSHI , TANIUCHI RYO , AOYAMA YOHEI
IPC: C01G39/06 , C01B21/064 , C01B33/40 , C01B33/42 , C01G17/00 , C01G19/00 , C01G25/00 , C01G33/00 , C01G39/00 , C07D233/58 , C07D233/60
CPC classification number: B01F17/0064 , B01F17/0007 , B01F17/0057 , B01F17/0085 , C01B19/04 , C01B21/0648 , C01B33/22 , C01B33/40 , C01B33/42 , C01G17/00 , C01G19/00 , C01G25/00 , C01G39/06
Abstract: A laminate of layered substances each containing two or more kinds of elements as constituent elements is contained in an ionic liquid containing a specific cation, and the ionic liquid containing the laminate is irradiated with one or both of sonic waves and electric waves.
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2.POSITIVE PHOTOSENSITIVE COMPOSITION, POSITIVE PERMANENT RESIST, AND METHOD FOR PRODUCING POSITIVE PERMANENT RESIST 有权
Title translation: 正感光组合物,正型永久抵制和产生正永久抗蚀剂方法公开(公告)号:EP2216682A4
公开(公告)日:2012-05-02
申请号:EP08850248
申请日:2008-11-12
Applicant: ADEKA CORP
Inventor: MORITA HIROSHI , SATO HIROMI , KOBAYASHI ATSUSHI , OMI JINICHI , SAITO SEIICHI
CPC classification number: C08G77/50 , C08G77/14 , C08G77/80 , C08K5/235 , C08K5/5419 , C08L83/06 , G03F7/0233 , G03F7/0758 , G03F7/40 , H01L23/296 , H01L2924/0002 , H01L2924/12044 , Y10S430/115 , Y10S430/12 , Y10S430/124 , H01L2924/00
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