公开(公告)号：WO2021156387A1

公开(公告)日：2021-08-12

申请号：PCT/EP2021/052705

申请日：2021-02-04

Applicant: ASML NETHERLANDS B.V.

Inventor： FU, Chenxi ,  DI, Long ,  KUINDERSMA, Lucas ,  TSENG, Kuo-Feng ,  HEMPENIUS, Peter, Paul ,  LIU, Yu ,  LUO, Ying

IPC: H01J41/12 ,  F16L23/032

Abstract: Apparatuses and systems for damping vibration of a vacuum vessel mounted with a pump include a pump body and a damping element coupled to the pump body, wherein the pump body and the damping element form a mass-based damper, and wherein the pump body forms a mass component of the mass-based damper; and the damping element forms a damping component of the mass-based damper. The apparatuses and systems also include a pump body configured to be secured to a column of a charged-particle inspection apparatus, a sensor coupled to the pump body, an actuator coupled to the pump body, and a circuitry communicatively coupled to the sensor and the actuator for receiving motion data indicative of a vibration of the column; determining a damping based on the motion data; and actuate the actuator to react to the vibration of the column in accordance with the damping.

公开(公告)号：WO2020136094A3

公开(公告)日：2020-07-02

申请号：PCT/EP2019/086459

申请日：2019-12-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LUO, Ying ,  DONG, Zhonghua ,  YIN, Xuehui ,  DI, Long ,  DENG, Nianpei ,  FANG, Wei ,  PU, Lingling ,  FEI, Ruochong ,  ZHU, Bohang ,  LIU, Yu

IPC: H01J37/147 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28

Abstract: A charged-particle beam system (300) is disclosed. The charged- particle beam system comprises a stage (201) configured to hold a sample (203) and is movable in at least one of X-Y-Z axes. The charged-particle beam system further comprises a position sensing system (350,340) to determine a lateral and vertical displacement of the stage, and a beam deflection controller (367) configured to apply a first signal to deflect a primary charged-particle beam (330) incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively. Further, a non-transitory computer readable medium is disclosed, comprising a set of instructions for causing an apparatus (300) to perform a method, the apparatus including a charged-particle source (310) to generate a primary charged-particle beam (314,330), the method comprising determining a lateral displacement of a stage (201), wherein the stage is movable in at least one of X-Y axes; and instructing a controller (367) to apply a first signal to deflect the primary charged-particle beam incident on a sample (203) to at least partly compensate for the lateral displacement

公开(公告)号：WO2020136094A2

公开(公告)日：2020-07-02

申请号：PCT/EP2019/086459

申请日：2019-12-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LUO, Ying ,  DONG, Zhonghua ,  YIN, Xuehui ,  DI, Long ,  DENG, Nianpei ,  FANG, Wei ,  PU, Lingling ,  FEI, Ruochong ,  ZHU, Bohang ,  LIU, Yu

IPC: H01J37/147 ,  H01J37/20 ,  H01J37/21 ,  H01J37/28

Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 k Hz to 50 k Hz, and 50 k Hz to 200 k Hz, respectively.