公开(公告)号：WO2016162231A1

公开(公告)日：2016-10-13

申请号：PCT/EP2016/056710

申请日：2016-03-25

Applicant: ASML NETHERLANDS B.V.

Inventor： MOS, Everhardus, Cornelis ,  IGNATOVA, Velsilava, Angelova ,  JENSEN, Erik ,  KUBIS, Michael ,  SIMONS, Hubertus, Johannes, Gertrudus ,  TEN BERGE, Peter ,  WALLERBOS, Erik, Johannes, Maria ,  WILDENBERG, Jochem, Sebastiaan

IPC: H01L21/66 ,  G03F7/20

CPC classification number: G06F17/18 ,  G03F7/705 ,  G03F7/70508 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7003 ,  G06F17/5009 ,  H01L22/12 ,  H01L22/20

Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.

Abstract translation: 一种方法，包括针对表示拟合测量数据的数学模型的剩余不确定性的参数，针对测量数据拟合一个或多个数学模型以及用于测量数据的一个或多个测量采样方案与跨基板的测量数据的识别 一个或多个数学模型和/或一个或多个测量采样方案，参数越过阈值。