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1.发明申请
公开(公告)号：WO2020160852A1
公开(公告)日：2020-08-13
申请号：PCT/EP2020/050051
申请日：2020-01-03
Applicant: ASML NETHERLANDS B.V.
Inventor： BUTLER, Hans , JANSEN, Bas , DE HOON, Cornelius, Adrianus, Lambertus
Abstract: The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: - receive an acceleration signal from the piezoelectric element; - electronically dampen an amplitude of the first mechanical resonance frequency; and - generate a damped acceleration signal, b) an extender configured to: - receive the damped acceleration signal; - extend the frequency response; and - output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.
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公开(公告)号：WO2023078788A1
公开(公告)日：2023-05-11
申请号：PCT/EP2022/080138
申请日：2022-10-27
Applicant: ASML NETHERLANDS B.V.
Inventor： VERMEULEN, Johannes, Petrus, Martinus, Bernardus , DE GOEIJ, Johannes, Adrianus, Leonardus , LEENAARS, René, Wilhelmus, Antonius, Hubertus , JANSEN, Bas , DE BRUIJN, Ron, Geeraard, Catharina
Abstract: A coupling having a variable stiffness is disclosed. The coupling comprises: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component comprises a viscoelastic material and wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may comprise the coupling.
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公开(公告)号：WO2020234045A1
公开(公告)日：2020-11-26
申请号：PCT/EP2020/063178
申请日：2020-05-12
Applicant: ASML NETHERLANDS B.V.
Inventor： BUTLER, Hans , JANSEN, Bas
Abstract: The invention relates to an actuator assembly comprising a first piezo actuator and a second piezo actuator. According to a first aspect the piezo actuator comprises a correction unit, configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference. According to a second aspect a power unit, said power unit configured to generate a power signal for the first and second piezo actuator based on the set point, and to provide the power signal to the first terminal of the first piezo actuator and to the second terminal of the second piezo actuator.
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公开(公告)号：WO2021018499A1
公开(公告)日：2021-02-04
申请号：PCT/EP2020/068432
申请日：2020-06-30
Applicant: ASML NETHERLANDS B.V.
Inventor： JANSEN, Bas , BOS, Koen, Martin, Willem, Jan , VERMEULEN, Johannes, Petrus, Martinus, Bernardus
Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬ electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: • o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or • o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: • o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or • o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.
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5.发明申请
公开(公告)号：WO2020035242A1
公开(公告)日：2020-02-20
申请号：PCT/EP2019/068963
申请日：2019-07-15
Applicant: ASML NETHERLANDS B.V.
Inventor： JANSEN, Bas , BUTLER, Hans , DIJKSHOORN, Alexander, Pascal
Abstract: The disclosed piezo actuator (40) comprises a first pair of electrodes (410), a second pair of electrodes (420), and a piezoelectric material (42) having a first surface (44) and a second surface (46). The first surface is arranged along a first direction (x) and a second direction (y). The first pair of electrodes comprises a first electrode arranged on the first surface, and a second electrode arranged on the second surface. The second pair of electrodes is arranged on further surfaces (430, 432) to shear the piezoelectric material in the second direction. The first pair of electrodes is arranged to elongate the piezoelectric material in a third direction (z), perpendicular to the first and second directions. The first electrode is divided into at least two parts (410a, 410b), and is arranged to rotate the first and second surfaces relatively to each other about the first direction.
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Patent Agency Ranking
公开(公告)号：WO2022078743A1
公开(公告)日：2022-04-21
申请号：PCT/EP2021/076500
申请日：2021-09-27
Applicant: ASML NETHERLANDS B.V.
Inventor： STEUR, Michael, Marinus, Anna , JANSEN, Bas , JEUNINK, Andre, Bernardus , PIJNENBURG, Johannes, Adrianus, Cornelis, Maria
IPC: G03F7/20 , H01L21/683 , H01L21/687
Abstract: The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.
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7.发明申请A POSITIONING SYSTEM, METHOD TO POSITION, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开定位系统，定位方法，光刻设备和装置制造方法
公开(公告)号：WO2018024416A1
公开(公告)日：2018-02-08
申请号：PCT/EP2017/066101
申请日：2017-06-29
Applicant: ASML NETHERLANDS B.V.
Inventor： BUTLER, Hans , SYMENS, Wim , JANSEN, Bas
IPC: G03F7/20
Abstract: The invention relates to a positioning system comprising: - a first body; - a second body; - an actuator arranged between the first body and the second body to position the first body relative to the second body; and wherein the actuator comprises a first piezoelectric actuator and a second piezoelectric actuator arranged in series, wherein the first piezoelectric actuator has a first hysteresis, wherein the second piezoelectric actuator has a second hysteresis smaller than the first hysteresis, wherein the second piezoelectric actuator has a positioning range at least equal to the first hysteresis.
Abstract translation: 定位系统技术领域本发明涉及一种定位系统，其包括：第一主体; - 第二个机构; - 布置在第一主体和第二主体之间以将第一主体相对于第二主体定位的致动器; 且其中所述致动器包括串联布置的第一压电致动器和第二压电致动器，其中所述第一压电致动器具有第一滞后，其中所述第二压电致动器具有小于所述第一滞后的第二滞后，其中所述第二压电致动器具有 定位范围至少等于第一次滞后。
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公开(公告)号：EP4427099A1
公开(公告)日：2024-09-11
申请号：EP22808840.7
申请日：2022-10-27
Applicant: ASML Netherlands B.V.
Inventor： VERMEULEN, Johannes, Petrus, Martinus, Bernardus , DE GOEIJ, Johannes, Adrianus, Leonardus , LEENAARS, René, Wilhelmus, Antonius, Hubertus , JANSEN, Bas , DE BRUIJN, Ron, Geeraard, Catharina
CPC classification number: G03F7/70716 , G03F7/70758 , G03F7/709 , F16F1/428 , F16F1/44 , F16F1/445 , F16F1/46
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9.发明公开
公开(公告)号：EP3611770A1
公开(公告)日：2020-02-19
申请号：EP18189293.6
申请日：2018-08-16
Applicant: ASML Netherlands B.V.
Inventor： JANSEN, Bas , BUTLER, Hans , DIJKSHOORN, Alexander Pascal
Abstract: The disclosed piezo actuator (40) comprises a piezoelectric material (42), preferably cube-shaped, having first and second surfaces (44, 46) along first and second directions (x, y). A first set of electrodes (410) is arranged on the first and second surfaces to elongate the piezoelectric material in a third direction (z), perpendicular to the first and second directions, by providing at least two different voltages or charges simultaneously. A second electrode set (420) is arranged on further surfaces (430, 432) to shear the piezoelectric material in the first or second direction. The actuator is useful for mask or substrate supports of a lithographic apparatus.
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公开(公告)号：EP4465768A1
公开(公告)日：2024-11-20
申请号：EP23174083.8
申请日：2023-05-17
Applicant: ASML Netherlands B.V.
IPC: H05G2/00
Abstract: There is provided a droplet generator comprising: a conduit comprising an orifice configured to fluidly couple to a reservoir and to emit molten target material in a molten target material direction; a plurality of piezo elements (17) at least partially surrounding the conduit, characterized in that at least one of the piezo elements in configured to operate in shear mode such that shear motion of the at least one piezo element is in the molten target material direction.
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