公开(公告)号：US11740560B2

公开(公告)日：2023-08-29

申请号：US17910454

申请日：2021-03-01

Applicant: ASML NETHERLANDS B.V.

Inventor： Eleftherios Koulierakis ,  Carlo Lancia ,  Juan Manuel Gonzalez Huesca ,  Alexander Ypma ,  Dimitra Gkorou ,  Reza Sahraeian

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70525

Abstract: A method for determining an inspection strategy for at least one substrate, the method including: quantifying, using a prediction model, a compliance metric value for a compliance metric relating to a prediction of compliance with a quality requirement based on one or both of pre-processing data associated with the substrate and any available post-processing data associated with the at least one substrate; and deciding on an inspection strategy for the at least one substrate, based on the compliance metric value, an expected cost associated with the inspection strategy and at least one objective value describing an expected value of the inspection strategy in terms of at least one objective relating to the prediction model.

公开(公告)号：US11687007B2

公开(公告)日：2023-06-27

申请号：US17423325

申请日：2020-01-09

Applicant: ASML NETHERLANDS B.V.

Inventor： Arnaud Hubaux ,  Johan Franciscus Maria Beckers ,  Dylan John David Davies ,  Johan Gertrudis Cornelis Kunnen ,  Willem Richard Pongers ,  Ajinkya Ravindra Daware ,  Chung-Hsun Li ,  Georgios Tsirogiannis ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Juan Manuel Gonzalez Huesca ,  Andriy Hlod ,  Maxim Pisarenco

IPC: G03F1/70 ,  G03F7/30 ,  G03F7/00 ,  G06F30/392

CPC classification number: G03F7/70508 ,  G03F1/70 ,  G03F7/70616 ,  G06F30/392 ,  G05B2219/45028 ,  G05B2219/45031

Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：US12204252B2

公开(公告)日：2025-01-21

申请号：US18212334

申请日：2023-06-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Arnaud Hubaux ,  Johan Franciscus Maria Beckers ,  Dylan John David Davies ,  Johan Gertrudis Cornelis Kunnen ,  Willem Richard Pongers ,  Ajinkya Ravindra Daware ,  Chung-Hsun Li ,  Georgios Tsirogiannis ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Juan Manuel Gonzalez Huesca ,  Andriy Hlod ,  Maxim Pisarenco

IPC: G03F1/70 ,  G03F7/00 ,  G06F30/392

Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：US20230333482A1

公开(公告)日：2023-10-19

申请号：US18212334

申请日：2023-06-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Arnaud HUBAUX ,  Johan Franciscus Maria Beckers ,  Dylan John David Davies ,  Johan Gertrudis Cornelis Kunnen ,  Willem Richard Pongers ,  Ajinkya Ravindra Daware ,  Chung-Hsun Li ,  Georgios Tsirogiannis ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Juan Manuel Gonzalez Huesca ,  Andriy Hlod ,  Maxim Pisarenco

IPC: G03F7/20 ,  G06F30/392 ,  G03F1/70

CPC classification number: G03F7/70508 ,  G06F30/392 ,  G03F1/70 ,  G03F7/70616 ,  G05B2219/45028 ,  G05B2219/45031

Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.