公开(公告)号：WO2022214267A1

公开(公告)日：2022-10-13

申请号：PCT/EP2022/056091

申请日：2022-03-09

Applicant: ASML NETHERLANDS B.V.

Inventor： KARA, Dogacan ,  JENSEN, Erik ,  WILDENBERG, Jochem, Sebastiaan ,  DECKERS, David, Frans, Simon ,  GULER, Sila ,  ASTUDILLO RENGIFO, Reinaldo, Antonio ,  YUDHISTIRA, Yasri ,  HILHORST, Gijs ,  CAICEDO FERNANDEZ, David, Ricardo ,  SPIERING, Frans, Reinier ,  KHO, Sinatra, Canggih ,  BLOM, Herman, Martin ,  KIM, Sang Uk ,  KIM, Hyun-Su

IPC: G03F7/20 ,  G03F9/00

Abstract: A method for determining a substrate model for describing a first measurement dataset and a second measurement dataset relating to a performance parameter. The method comprises obtaining candidate basis functions for a plurality of substrate models. Steps 1 to 4 are performed iteratively for said first measurement dataset and said second measurement dataset until at least one stopping criterion is met so as to determine said substrate model, said steps comprising: 1. selecting a candidate basis function from said candidate basis functions; 2. updating a substrate model by adding the candidate basis function into this substrate model to obtain an updated substrate model; 3. evaluating the updated substrate model based on at least one of said first measurement dataset and said second measurement dataset; and 4. determining whether to include the basis function within the substrate model based on 10 the evaluation.

公开(公告)号：EP4071554A1

公开(公告)日：2022-10-12

申请号：EP21167479.1

申请日：2021-04-08

Applicant: ASML Netherlands B.V.

Inventor： KARA, Dogacan ,  WILDENBERG, Jochem Sebastiaan ,  DECKERS, David Frans Simon ,  YUDHISTIRA, Yasri ,  HILHORST, Gijs ,  CAICEDO FERNANDEZ, David Ricardo ,  SPIERING, Frans Reinier ,  KHO, Sinatra Canggih ,  BLOM, Herman Martin ,  KIM, Sang-Uk ,  KIM, Hyun Su

IPC: G03F7/20 ,  G03F9/00

Abstract: Disclosed is a method for modeling measurement data relating to a parameter of interest over at least two substrate portions of a substrate and associated apparatuses. The method comprises obtaining at least a first substrate portion model for describing the parameter of interest across one or more first substrate portions on the substrate and a second substrate portion model for describing the parameter of interest across one or more second substrate portions on the substrate; and performing steps 1 to 4 iteratively for each of said plurality of substrate portion models until a stopping criterion is met. These steps comprise 1. selecting a candidate basis function from a plurality of candidate basis functions; 2. updating the substrate portion model by adding the candidate basis function into the substrate portion model; 3. evaluating the updated substrate portion model using the measurement data; and 4. determining whether to include the basis function within the substrate portion model based on the evaluation.

公开(公告)号：EP4320483A1

公开(公告)日：2024-02-14

申请号：EP22710625.9

申请日：2022-03-09

Applicant: ASML Netherlands B.V.

Inventor： KARA, Dogacan ,  JENSEN, Erik ,  WILDENBERG, Jochem, Sebastiaan ,  DECKERS, David, Frans, Simon ,  GULER, Sila ,  ASTUDILLO RENGIFO, Reinaldo, Antonio ,  YUDHISTIRA, Yasri ,  HILHORST, Gijs ,  CAICEDO FERNANDEZ, David, Ricardo ,  SPIERING, Frans, Reinier ,  KHO, Sinatra, Canggih ,  BLOM, Herman, Martin ,  KIM, Sang Uk ,  KIM, Hyun-Su

IPC: G03F7/20 ,  G03F9/00