公开(公告)号：WO2018153711A1

公开(公告)日：2018-08-30

申请号：PCT/EP2018/053412

申请日：2018-02-12

Applicant: ASML NETHERLANDS B.V.

Inventor： TEL, Wim, Tjibbo ,  SEGERS, Bart, Peter, Bert ,  MOS, Everhardus, Cornelis ,  SCHMITT-WEAVER, Emil, Peter ,  ZHANG, Yichen ,  LIU, Xing, Lan ,  JUNGBLUT, Reiner, Maria ,  YU, Hyun-Woo ,  VAN RHEE, Petrus, Gerardus ,  KILITZIRAKI, Maria

IPC: G03F7/20 ,  G03F9/00

Abstract: A method, involving determining a first distribution of a first parameter associated with an error or residual in performing a device manufacturing process; determining a second distribution of a second parameter associated with an error or residual in performing the device manufacturing process; and determining a distribution of a parameter of interest associated with the device manufacturing process using a function operating on the first and second distributions. The function may comprise a correlation.