公开(公告)号：WO2013174539A1

公开(公告)日：2013-11-28

申请号：PCT/EP2013/055701

申请日：2013-03-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LAURENT, Thibault ,  JACOBS, Johannes, Henricus, Wilhelmus ,  KOK, Haico ,  VAN DE VIJVER, Yuri ,  VAN DE WAL, Johannes ,  KNARREN, Bastiaan ,  VOOGD, Robbert Jan ,  WESTERLAKEN, Jan, Steven, Christiaan ,  VAN DE RIJDT, Hans ,  KOOIKER, Eelco ,  HURKENS-MERTENS, Wilhelmina Margareta Jozef ,  TEILLET, Yohann, Bruno, Yvon

IPC: G03F7/20

CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70666 ,  G03F7/70858 ,  G03F7/70891

Abstract: A sensor (100) for use in lithographic apparatus of an immersion type and which, in use, comes into contact with the immersion liquid (11) is arranged so that the thermal resistance of a first heat path from a transducer (104) of the sensor to a temperature conditioning device (107) is less than the thermal resistance of a second heat flow path from the transducer to the immersion liquid. Thus, heat flow is preferentially towards the temperature conditioning device and not the immersion liquid so that temperature-induced disturbance in the immersion liquid is reduced or minimized.

Abstract translation: 用于浸没式光刻设备中并且在使用中与浸液（11）接触的传感器（100）被布置成使得来自第一传感器（104）的第一热路的热阻 温度调节装置（107）的传感器小于从换能器到浸液的第二热流路的热阻。 因此，热流优先朝向温度调节装置，而不是浸没液体，使得浸没液体中的温度引起的干扰减小或最小化。

公开(公告)号：WO2010118902A1

公开(公告)日：2010-10-21

申请号：PCT/EP2010/051901

申请日：2010-02-16

Applicant: ASML Netherlands B.V. ,  KNARREN, Bastiaan ,  TURK, Raymond ,  KOOIKER, Allard, Eelco

Inventor： KNARREN, Bastiaan ,  TURK, Raymond ,  KOOIKER, Allard, Eelco

IPC: G03F7/20 ,  G01M11/02 ,  G02B7/00 ,  G02B5/18

CPC classification number: G03F7/70858 ,  G03F7/706 ,  G03F7/70808 ,  G03F7/7085

Abstract: A detector module (20) is described that includes at least one detector (30) for sensing photon radiation, an electronic circuit (40) coupled to the at least one detector (30), and a housing (50) having a first and a second body (60, 70), each having a bottom part (62, 72) and an at least partially cylindrical part (64, 74) extending from the bottom part (62, 72), wherein the at least partially cylindrical part (64) of the first body (60) is thermally coupled with the at least partially cylindrical part (74) of the second body (70), wherein the at least partially cylindrical part (64) of the first body (60) extends towards the bottom part (72) of the second body (70), and wherein the electronic circuit (40) is arranged inside the housing (50). A lithographic apparatus including the detector module (20) is also described.

Abstract translation: 描述了检测器模块（20），其包括用于感测光子辐射的至少一个检测器（30），耦合到所述至少一个检测器（30）的电子电路（40）和具有第一和第二检测器 第二主体（60,70），每个具有底部部分（62,72）和从底部部分（62,72）延伸的至少部分圆柱形部分（64,74），其中至少部分圆柱形部分（64,74） 第一主体（60）的至少部分圆柱形部分（64）与第二主体（70）的至少部分圆柱形部分（74）热耦合，其中第一主体（60）的至少部分圆柱形部分（64）朝向底部 第二主体（70）的部分（72），并且其中电子电路（40）布置在壳体（50）内。 还描述了包括检测器模块（20）的光刻设备。