公开(公告)号：WO2014060149A1

公开(公告)日：2014-04-24

申请号：PCT/EP2013/068669

申请日：2013-09-10

Applicant: ASML NETHERLANDS B.V.

Inventor： KOK, Haico ,  VOOGD, Robbert Jan

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G03F7/70775 ,  G01B11/0675 ,  G01B11/14 ,  G03F7/70483 ,  G03F7/70525 ,  G03F9/7046 ,  G03F9/7049 ,  G03F9/7092

Abstract: A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors.

Abstract translation: 一种用于测量物理量的传感器系统，所述系统包括具有多个检测器的并行检测装置，以允许在不同空间位置处并行测量，其中所述多个检测器共享噪声源，其中所述传感器系统被配置为使得所述多个检测器 输出作为物理量的函数的信号，并且其中所述传感器系统被配置为使得至少一个检测器对所述共享噪声源产生的噪声的响应不同于所述一个或多个其它检测器。

公开(公告)号：WO2014067754A3

公开(公告)日：2014-05-08

申请号：PCT/EP2013/071080

申请日：2013-10-09

Applicant: ASML NETHERLANDS B.V.

Inventor： NIHTIANOV, Stoyan ,  KOK, Haico ,  WEHRENS, Martijn

IPC: G03F7/20 ,  H01L27/146 ,  H01L27/148

Abstract: A backside illuminated sensor comprising a supporting substrate, a semiconductor layer which comprises a photodiode comprising a region of n-doped semiconductor provided at a first surface of the semiconductor layer, and a region of p-doped semiconductor, wherein a depletion region is formed between the region of n-doped semiconductor and the region of p-doped semiconductor, and a layer of p-doping protective material provided on a second surface of the semiconductor layer, wherein the first surface of the semiconductor layer is fixed to a surface of the supporting substrate.

公开(公告)号：WO2013174539A1

公开(公告)日：2013-11-28

申请号：PCT/EP2013/055701

申请日：2013-03-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LAURENT, Thibault ,  JACOBS, Johannes, Henricus, Wilhelmus ,  KOK, Haico ,  VAN DE VIJVER, Yuri ,  VAN DE WAL, Johannes ,  KNARREN, Bastiaan ,  VOOGD, Robbert Jan ,  WESTERLAKEN, Jan, Steven, Christiaan ,  VAN DE RIJDT, Hans ,  KOOIKER, Eelco ,  HURKENS-MERTENS, Wilhelmina Margareta Jozef ,  TEILLET, Yohann, Bruno, Yvon

IPC: G03F7/20

CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70666 ,  G03F7/70858 ,  G03F7/70891

Abstract: A sensor (100) for use in lithographic apparatus of an immersion type and which, in use, comes into contact with the immersion liquid (11) is arranged so that the thermal resistance of a first heat path from a transducer (104) of the sensor to a temperature conditioning device (107) is less than the thermal resistance of a second heat flow path from the transducer to the immersion liquid. Thus, heat flow is preferentially towards the temperature conditioning device and not the immersion liquid so that temperature-induced disturbance in the immersion liquid is reduced or minimized.

Abstract translation: 用于浸没式光刻设备中并且在使用中与浸液（11）接触的传感器（100）被布置成使得来自第一传感器（104）的第一热路的热阻 温度调节装置（107）的传感器小于从换能器到浸液的第二热流路的热阻。 因此，热流优先朝向温度调节装置，而不是浸没液体，使得浸没液体中的温度引起的干扰减小或最小化。

公开(公告)号：EP2909677A1

公开(公告)日：2015-08-26

申请号：EP13759242.4

申请日：2013-09-10

Applicant: ASML Netherlands B.V.

Inventor： KOK, Haico ,  VOOGD, Robbert Jan

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G03F7/70775 ,  G01B11/0675 ,  G01B11/14 ,  G03F7/70483 ,  G03F7/70525 ,  G03F9/7046 ,  G03F9/7049 ,  G03F9/7092

Abstract: A sensor system to measure a physical quantity, the system including a parallel detection arrangement with multiple detectors to allow measurements in parallel at different spatial locations, wherein the multiple detectors share a noise source, wherein the sensor system is configured such that the multiple detectors each output a signal as a function of the physical quantity, and wherein the sensor system is configured such that at least one detector responds differently to noise originating from the shared noise source than the one or more other detectors.

Abstract translation: 一种用于测量物理量的传感器系统，所述系统包括具有多个检测器的并行检测装置，以允许在不同空间位置处并行测量，其中所述多个检测器共享噪声源，其中所述传感器系统被配置为使得所述多个检测器 输出作为物理量的函数的信号，并且其中所述传感器系统被配置为使得至少一个检测器响应于来自所述共享噪声源的噪声不同于所述一个或多个其它检测器