公开(公告)号：WO2022144156A1

公开(公告)日：2022-07-07

申请号：PCT/EP2021/085051

申请日：2021-12-09

Applicant: ASML NETHERLANDS B.V.

Inventor： BOSCH, Niels, Johannes, Maria ,  WANG, Xu ,  HEMPENIUS, Peter, Paul ,  WANG, Yongqiang ,  BUTLER, Hans ,  WANG, Youjin ,  GRASMAN, Jasper, Hendrik ,  SUI, Jianzi ,  CHEN, Tianming ,  WU, Aimin

IPC: H01J37/21 ,  H01J37/28

Abstract: There is provided a charged particle apparatus comprising: a particle beam generator, optics, a first and a second positioning device, both configured for positioning the substrate relative to the particle beam generator along its optical axis, and a controller configured for switching between a first operational mode and a second operational mode. The apparatus is configured, when operating in the first operational mode, for irradiating the substrate by the particle beam at a first landing energy of the particle beam and, when operating in the second operational mode, for irradiating the substrate at a second, different landing energy. When operating in the first operational mode, the second positioning device is configured to position the substrate relative to the particle beam generator at a first focus position of the particle beam and in the second operational mode, to position the substrate at a second, different focus position.

公开(公告)号：WO2022069420A1

公开(公告)日：2022-04-07

申请号：PCT/EP2021/076550

申请日：2021-09-28

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Erheng ,  VERDONCK, Adrianus, Marinus ,  SCHEERHOORN, Arjan, Gerrard, Pieter, Ivo ,  WANG, Xu ,  SUI, Jianzi ,  TU, Chin-Fa ,  VAN HEUMEN, Martijn, Petrus, Christianus

IPC: F04D19/04 ,  F04D29/60 ,  F04D29/66

Abstract: Described herein is a vacuum system configured to mitigate damage or risk associated with a pump malfunction (e.g., an imbalance, a catastrophic failure, etc.). An exemplary vacuum pump includes a housing; a vibration isolator coupled to the vacuum pump housing and configured to isolate vibrations generated by the vacuum pump during operation; and a stop structure (a first component) disposed between the vacuum pump housing and an adjacent fixture (a second component). The stop structure configured to prevent displacement of the vacuum pump housing relative to the fixture above a threshold amount, wherein the displacement of the vacuum pump housing is configured to be within the threshold amount during normal operation. The vacuum system may further include a collar (a third component) configured to limit an axial displacement of the pump.